Cavity-less film bulk acoustic resonator (FBAR) devices
    1.
    发明申请
    Cavity-less film bulk acoustic resonator (FBAR) devices 有权
    无腔膜体声共振器(FBAR)器件

    公开(公告)号:US20050104690A1

    公开(公告)日:2005-05-19

    申请号:US10969744

    申请日:2004-10-19

    摘要: The film bulk acoustic resonator (FBAR) device comprises a substrate, an acoustic Bragg reflector over the substrate, a piezoelectric element over the acoustic Bragg reflector, and a remote-side electrode over the piezoelectric element. The acoustic Bragg reflector comprises a metal Bragg layer juxtaposed with a plastic Bragg layer. The large ratio between the acoustic impedances of the plastic material of the plastic Bragg layer and the metal of the metal Bragg layer provides sufficient acoustic isolation between the FBAR and the substrate for the frequency response of the FBAR device to exhibit minor, if any, spurious artifacts arising from undesirable acoustic coupling between the FBAR and the substrate.

    摘要翻译: 膜体声波谐振器(FBAR)器件包括衬底,衬底上的声布拉格反射器,声布拉格反射器上方的压电元件以及压电元件上的远端侧电极。 声布拉格反射器包括与塑料布拉格层并置的金属布拉格层。 塑料布拉格层的塑料材料的声阻抗与金属布拉格层的金属之间的较大的比率在FBAR和衬底之间提供足够的声学隔离,以使FBAR器件的频率响应显示较小的(如果有的话)杂散 FBAR和基片之间的不良声耦合产生的伪影。

    Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method
    2.
    发明授权
    Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method 有权
    制造薄膜体声共振器(FBAR)的方法和体现该方法的FBAR结构

    公开(公告)号:US06714102B2

    公开(公告)日:2004-03-30

    申请号:US09798496

    申请日:2001-03-01

    IPC分类号: H03H900

    CPC分类号: H03H3/02

    摘要: A method for fabricating an acoustic resonator, for example a Thin Film Bulk Acoustic Resonators (FBAR), on a substrate. A depression is etched and filled with sacrificial material. The FBAR is fabricated on the substrate spanning the depression, the FBAR having an etch hole. The depression may include etch channels in which case the FBAR may include etch holes aligned with the etch channels. A resonator resulting from the application of the technique is suspended in air and includes at least one etch hole and may include etch channels.

    摘要翻译: 一种用于在衬底上制造声共振器的方法,例如薄膜体声波谐振器(FBAR)。 蚀刻凹陷并填充牺牲材料。 FBAR制造在跨越凹陷的衬底上,FBAR具有蚀刻孔。 凹陷可以包括蚀刻通道,在这种情况下,FBAR可以包括与蚀刻通道对准的蚀刻孔。 由施加该技术产生的共振器悬浮在空气中并且包括至少一个蚀刻孔,并且可以包括蚀刻通道。

    Controlled effective coupling coefficients for film bulk acoustic resonators
    4.
    发明授权
    Controlled effective coupling coefficients for film bulk acoustic resonators 有权
    薄膜体声共振器的受控有效耦合系数

    公开(公告)号:US06472954B1

    公开(公告)日:2002-10-29

    申请号:US09841234

    申请日:2001-04-23

    IPC分类号: H03H9205

    摘要: In an array of acoustic resonators, the effective coupling coefficient of first and second filters are individually tailored in order to achieve desired frequency responses. In a duplexer embodiment, the effective coupling coefficient of a transmit band-pass filter is lower than the effective coupling coefficient of a receive band-pass filter of the same duplexer. In one embodiment, the tailoring of the coefficients is achieved by varying the ratio of the thickness of a piezoelectric layer to the total thickness of electrode layers. For example, the total thickness of the electrode layers of the transmit filter may be in the range of 1.2 to 2.8 times the total thickness of the electrode layers of the receive filter. In another embodiment, the coefficient tailoring is achieved by forming a capacitor in parallel with an acoustic resonator within the filter for which the effective coupling coefficient is to be degraded. Preferably, the capacitor is formed of the same materials used to fabricate a film bulk acoustic resonator (FBAR). The capacitor may be mass loaded to change its frequency by depositing a metal layer on the capacitor. Alternatively, the mass loading may be provided by forming the capacitor directly on a substrate.

    摘要翻译: 在声谐振器阵列中,分别对第一和第二滤波器的有效耦合系数进行定制,以实现期望的频率响应。 在双工器实施例中,发射带通滤波器的有效耦合系数低于同一双工器的接收带通滤波器的有效耦合系数。 在一个实施例中,通过改变压电层的厚度与电极层的总厚度之比来实现系数的调整。 例如,发射滤波器的电极层的总厚度可以在接收滤波器的电极层的总厚度的1.2至2.8倍的范围内。 在另一个实施例中,通过与滤波器内的声谐振器并联形成电容器来实现系数调整,有效耦合系数将被降低。 优选地,电容器由用于制造膜体声波谐振器(FBAR)的相同材料形成。 可以通过在电容器上沉积金属层来对电容器进行质量负载以改变其频率。 或者,可以通过将电容器直接形成在基板上来提供质量负载。

    Manufacturing process for thin film bulk acoustic resonator (FBAR) filters
    5.
    发明申请
    Manufacturing process for thin film bulk acoustic resonator (FBAR) filters 审中-公开
    薄膜体声波谐振器(FBAR)滤波器的制造工艺

    公开(公告)号:US20050088257A1

    公开(公告)日:2005-04-28

    申请号:US10994068

    申请日:2004-11-18

    摘要: Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.

    摘要翻译: 在具有顶面的基板上制造声学谐振器的方法。 首先,产生上表面的凹陷。 接下来,凹陷填充有牺牲材料。 填充的凹陷具有与所述基底的所述顶表面相对的上表面水平。 接下来,在所述上表面上沉积第一电极。 然后,在所述第一电极上沉积一层压电材料。 使用质量负载剥离工艺将第二电极沉积在压电材料层上。

    System and methods for processing and displaying aggregate status events for remote nodes
    8.
    发明授权
    System and methods for processing and displaying aggregate status events for remote nodes 有权
    用于处理和显示远程节点聚合状态事件的系统和方法

    公开(公告)号:US07603458B1

    公开(公告)日:2009-10-13

    申请号:US10674322

    申请日:2003-09-30

    IPC分类号: G06F15/173

    摘要: A status monitoring and reporting mechanism which distinguishes more significant events and prominently displays events pertaining to nodes, interconnections, and other network entities which may present problems, and to suppresses benign messages which may not require immediate attention, provides an “at a glance” view of overall system health. By processing and displaying aggregate status events from a plurality of agent components to highlight the most severe and critical events from among a large volume of general status events allows an operator to quickly diagnose potential problems before detrimental results occur, and helps maintain a general efficient system health by isolating less efficient areas to allow for timely remedial action prior to failure. Various agents disseminated in a storage area network determine and report status events back to a central server. The server receives, aggregates, and processes the status events to display a status array indicative of overall system health.

    摘要翻译: 区分更重要事件并显着地显示有关可能存在问题的节点,互连和其他网络实体的事件以及抑制可能不需要立即注意的良性消息的状态监视和报告机制提供了“一目了然”视图 的整体系统健康。 通过处理和显示来自多个代理组件的聚合状态事件以突显来自大量一般状态事件中的最严重和关键的事件,允许操作者在有害的结果发生之前快速诊断潜在问题,并且有助于维持一般的有效系统 通过隔离效率较低的领域,以便在失败之前及时采取补救措施来保护健康。 在存储区域网络中传播的各种代理确定并将状态事件报告回中央服务器。 服务器接收,聚合和处理状态事件以显示指示整个系统运行状况的状态数组。

    Compounds for PDT
    9.
    发明授权
    Compounds for PDT 失效
    PDT化合物

    公开(公告)号:US07375215B2

    公开(公告)日:2008-05-20

    申请号:US10221218

    申请日:2001-03-08

    CPC分类号: C07D487/22 A61K41/0071

    摘要: A tetrakis(hydroxyphenyl)chlorin, bacteriochlorin or isobacteriochlorin, derivatised at one or more of the hydroxy groups by addition reaction with a diisocyanate, diisothiocyanate or isocyanate-isothiocyanate at one isocyanate or isothiocyanate group thereof, the other isocyanate or isothiocyanate group being itself derivatised by addition reaction with the hydroxy group of an w-alkylated or acylated poly(alkylene oxide) or to a hydroxy group of a link residue itself carrying a residue of such poly(alkylene oxide).

    摘要翻译: 通过与二异氰酸酯,二异硫氰酸酯或异氰酸酯 - 异硫氰酸酯在一个异氰酸酯或异硫氰酸酯基团的加成反应,在一个或多个羟基衍生的四(羟基苯基)二氢卟酚,细菌二氢卟酚或异细菌素,其它异氰酸酯或异硫氰酸酯基团本身由 与w-烷基化或酰化的聚(环氧烷)的羟基或本身携带这种聚(环氧烷)的残基的连接残基的羟基的加成反应。

    General matching network for acoustic wave filters and acoustic resonators
    10.
    发明申请
    General matching network for acoustic wave filters and acoustic resonators 有权
    声波滤波器和声谐振器的通用匹配网络

    公开(公告)号:US20080042778A1

    公开(公告)日:2008-02-21

    申请号:US11505453

    申请日:2006-08-17

    IPC分类号: H03H9/70

    CPC分类号: H03H9/706 H03H9/0004

    摘要: A method and circuit matches a device to n filters, wherein each filter is a SAW filter, BAW filter, or FBAR filter. The method and system: (a) provide an inductor or transmission line connected between a common terminal and ground; (b) provide a plurality of capacitance values (C1m, C2m, . . . , Cnm) each corresponding to one of the n filters; and (c) for each of the n filters, directly connect a first terminal of the filter to either: (1) the common terminal, or (2) a first terminal of a corresponding capacitor having the correspondence capacitance value calculated in step (b), where a second terminal of the corresponding capacitor is directly connected to the common terminal.

    摘要翻译: 方法和电路将器件与n个滤波器相匹配,其中每个滤波器是SAW滤波器,BAW滤波器或FBAR滤波器。 方法和系统:(a)提供连接在公共端子和地之间的电感器或传输线; (b)提供多个电容值(C 1m 2,C 2 m,...,C nm),每个对应于 n过滤器 和(c)对于n个滤波器中的每一个,直接将滤波器的第一端连接到:(1)公共端子,或者(2)具有在步骤(b)中计算的对应电容值的相应电容器的第一端子 ),其中相应电容器的第二端子直接连接到公共端子。