Thin film tunnel field effect transistors having relatively increased width

    公开(公告)号:US11735595B2

    公开(公告)日:2023-08-22

    申请号:US17721236

    申请日:2022-04-14

    申请人: Intel Corporation

    摘要: Thin film tunnel field effect transistors having relatively increased width are described. In an example, integrated circuit structure includes an insulator structure above a substrate. The insulator structure has a topography that varies along a plane parallel with a global plane of the substrate. A channel material layer is on the insulator structure. The channel material layer is conformal with the topography of the insulator structure. A gate electrode is over a channel portion of the channel material layer on the insulator structure. A first conductive contact is over a source portion of the channel material layer on the insulator structure, the source portion having a first conductivity type. A second conductive contact is over a drain portion of the channel material layer on the insulator structure, the drain portion having a second conductivity type opposite the first conductivity type.

    Stacked-substrate DRAM semiconductor devices

    公开(公告)号:US11569243B2

    公开(公告)日:2023-01-31

    申请号:US16140890

    申请日:2018-09-25

    申请人: INTEL CORPORATION

    IPC分类号: H01L27/108 H01L23/48

    摘要: A DRAM integrated circuit device is described in which at least some of the peripheral circuits associated with the memory arrays are provided on a first substrate. The memory arrays are provided on a second substrate stacked on the first substrate, thus forming a DRAM integrated circuit device on a stacked-substrate assembly. Vias that electrically connect the memory arrays on the second substrate to the peripheral circuits on the first substrate are fabricated using high aspect ratio via fabrication techniques.