Optical sensor by using tunneling diode
    2.
    发明授权
    Optical sensor by using tunneling diode 有权
    光传感器采用隧道二极管

    公开(公告)号:US06284557B1

    公开(公告)日:2001-09-04

    申请号:US09414928

    申请日:1999-10-12

    CPC classification number: H01L31/0352 H01L31/102 Y10S438/979

    Abstract: A method of fabricating a tunneling photodiode is presented comprised of the following steps: forming a p-well in an n-type substrate, forming a thin insulating layer over the surface of the p-type material, and then forming a thin n-type layer over the insulating layer. Preferably, the n and p type semiconductor material could be silicon and the insulating layer could be between about 30 to 40 angstroms of gate quality silicon dioxide. In other embodiments of the invention the materials of either electrode are either n or p-type semiconductors or metals.

    Abstract translation: 提出一种制造隧道光电二极管的方法,包括以下步骤:在n型衬底中形成p阱,在p型材料的表面上形成薄的绝缘层,然后形成薄的n型 层在绝缘层上。 优选地,n型和p型半导体材料可以是硅,并且绝缘层可以在约30至40埃的栅极质量的二氧化硅之间。 在本发明的其它实施方案中,任一电极的材料是n型或p型半导体或金属。

    Optical sensor by using tunneling diode
    3.
    发明授权
    Optical sensor by using tunneling diode 有权
    光传感器采用隧道二极管

    公开(公告)号:US06693317B2

    公开(公告)日:2004-02-17

    申请号:US10437147

    申请日:2003-05-13

    CPC classification number: H01L31/101 H01L31/18

    Abstract: A method of fabricating a tunneling photodiode is presented comprised of the following steps: forming a p-well in an n-type substrate, forming a thin insulating layer over the surface of the p-type material, and then forming a thin n-type layer over the insulating layer. Preferably, the n and p type semiconductor material could be silicon and the insulating layer could be between about 30 to 40 angstroms of gate quality silicon dioxide. In other embodiments of the invention the materials of either electrode are either n or p-type semiconductors or metals.

    Abstract translation: 提出一种制造隧道光电二极管的方法,包括以下步骤:在n型衬底中形成p阱,在p型材料的表面上形成薄的绝缘层,然后形成薄的n型 层在绝缘层上。 优选地,n型和p型半导体材料可以是硅,并且绝缘层可以在约30至40埃的栅极质量的二氧化硅之间。 在本发明的其它实施方案中,任一电极的材料是n型或p型半导体或金属。

    Method of using a tunneling diode in optical sensing devices
    4.
    发明授权
    Method of using a tunneling diode in optical sensing devices 有权
    在光学传感器件中使用隧道二极管的方法

    公开(公告)号:US06582981B2

    公开(公告)日:2003-06-24

    申请号:US09904138

    申请日:2001-07-13

    CPC classification number: H01L31/0352 H01L31/102 Y10S438/979

    Abstract: A method of fabricating a tunneling photodiode is presented comprised of the following steps: forming a p-well in an n-type substrate, forming a thin insulating layer over the surface of the p-type material, and then forming a thin n-type layer over the insulating layer. Preferably, the n and p type semiconductor material could be silicon and the insulating layer could be between about 30 to 40 angstroms of gate quality silicon dioxide. In other embodiments of the invention the materials of either electrode are either n or p-type semiconductors or metals.

    Abstract translation: 提出一种制造隧道光电二极管的方法,包括以下步骤:在n型衬底中形成p阱,在p型材料的表面上形成薄的绝缘层,然后形成薄的n型 层在绝缘层上。 优选地,n型和p型半导体材料可以是硅,并且绝缘层可以在约30至40埃的栅极质量的二氧化硅之间。 在本发明的其它实施方案中,任一电极的材料是n型或p型半导体或金属。

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