Semiconductor wafer with improved crack protection
    1.
    发明授权
    Semiconductor wafer with improved crack protection 有权
    半导体晶圆具有改进的裂纹保护

    公开(公告)号:US07741196B2

    公开(公告)日:2010-06-22

    申请号:US11668453

    申请日:2007-01-29

    IPC分类号: H01L21/30

    摘要: A method of manufacturing a semiconductor wafer for dicing includes providing a semiconductor wafer including a substrate and a plurality of upper layers on the substrate that form a formation of die areas. The formation is arranged so that adjacent die areas are separated by a path for a dicing tool. Within each path, a pair of spaced apart lines is fabricated. Each line defines a dicing edge of a respective path and has at least one trench extending between a top surface of the wafer and the substrate. Each trench is filled with a stress absorbing material for reducing die tool induced stress on the die areas during dicing.

    摘要翻译: 制造用于切割的半导体晶片的方法包括在基板上提供包括基板和多个上层的半导体晶片,形成管芯区域的形成。 该结构布置成使得相邻的模具区域被用于切割工具的路径分开。 在每个路径中,制造一对间隔开的线。 每条线限定相应路径的切割边缘,并且具有在晶片的顶表面和基底之间延伸的至少一个沟槽。 每个沟槽填充有应力吸收材料,用于在切割期间减少模具区域上的模具工具引起的应力。

    SEMICONDUCTOR WAFER WITH IMPROVED CRACK PROTECTION
    2.
    发明申请
    SEMICONDUCTOR WAFER WITH IMPROVED CRACK PROTECTION 有权
    具有改进的裂纹保护的半导体波形

    公开(公告)号:US20080179710A1

    公开(公告)日:2008-07-31

    申请号:US11668453

    申请日:2007-01-29

    IPC分类号: H01L23/544 H01L21/76

    摘要: A method of manufacturing a semiconductor wafer for dicing includes providing a semiconductor wafer including a substrate and a plurality of upper layers on the substrate that form a formation of die areas. The formation is arranged so that adjacent die areas are separated by a path for a dicing tool within each path, a pair of spaced apart lines is fabricated. Each line defines a dicing edge of a respective path and has at least one trench extending between a top surface of the wafer and the substrate. Each trench is filled with a stress absorbing material for reducing die tool induced stress on the die areas during dicing.

    摘要翻译: 制造用于切割的半导体晶片的方法包括在基板上提供包括基板和多个上层的半导体晶片,形成管芯区域的形成。 该组合被布置成使得相邻的模具区域被用于每个路径内的切割工具的路径分开,制造一对间隔开的线。 每条线限定相应路径的切割边缘,并且具有在晶片的顶表面和基底之间延伸的至少一个沟槽。 每个沟槽填充有应力吸收材料,用于在切割期间减少模具区域上的模具工具引起的应力。