Band-engineered multi-gated non-volatile memory device with enhanced attributes
    2.
    发明授权
    Band-engineered multi-gated non-volatile memory device with enhanced attributes 有权
    带改进的多门控非易失性存储器件具有增强的属性

    公开(公告)号:US07279740B2

    公开(公告)日:2007-10-09

    申请号:US11127618

    申请日:2005-05-12

    Abstract: Non-volatile memory devices and arrays are described that facilitate the use of band-gap engineered gate stacks with asymmetric tunnel barriers in floating gate memory cells in NOR or NAND memory architectures that allow for direct tunneling programming and erase with electrons and holes, while maintaining high charge blocking barriers and deep carrier trapping sites for good charge retention. The direct tunneling program and erase capability reduces damage to the gate stack and the crystal lattice from high energy carriers, reducing write fatigue and leakage issues and enhancing device lifespan. Memory cells of the present invention also allow multiple bit storage in a single memory cell, and allow for programming and erase with reduced voltages. A positive voltage erase process via hole tunneling is also provided.

    Abstract translation: 描述了非易失性存储器件和阵列,其有助于在NOR或NAND存储器架构中的浮动栅极存储器单元中使用具有非对称隧道势垒的带隙工程化栅极堆叠,这允许直接隧道编程和用电子和空穴擦除,同时保持 高电荷阻挡屏障和深载体捕获位点,具有良好的电荷保留性。 直接隧道编程和擦除功能可以减少高能量载体对栅极堆叠和晶格的损害,减少写入疲劳和泄漏问题,并增强器件寿命。 本发明的存储器单元还允许在单个存储器单元中进行多位存储,并允许以降低的电压进行编程和擦除。 还提供了正电压擦除处理通孔隧穿。

    Band-engineered multi-gated non-volatile memory device with enhanced attributes
    4.
    发明授权
    Band-engineered multi-gated non-volatile memory device with enhanced attributes 有权
    带改进的多门控非易失性存储器件具有增强的属性

    公开(公告)号:US07749848B2

    公开(公告)日:2010-07-06

    申请号:US11900595

    申请日:2007-09-12

    Abstract: Non-volatile memory devices and arrays are described that facilitate the use of band-gap engineered gate stacks with asymmetric tunnel barriers in floating gate memory cells in NOR or NAND memory architectures that allow for direct tunneling programming and erase with electrons and holes, while maintaining high charge blocking barriers and deep carrier trapping sites for good charge retention. The direct tunneling program and erase capability reduces damage to the gate stack and the crystal lattice from high energy carriers, reducing write fatigue and leakage issues and enhancing device lifespan. Memory cells of the present invention also allow multiple bit storage in a single memory cell, and allow for programming and erase with reduced voltages. A positive voltage erase process via hole tunneling is also provided.

    Abstract translation: 描述了非易失性存储器件和阵列,其有助于在NOR或NAND存储器架构中的浮动栅极存储器单元中使用具有非对称隧道势垒的带隙工程化栅极堆叠,这允许直接隧道编程和用电子和空穴擦除,同时保持 高电荷阻挡屏障和深载体捕获位点,具有良好的电荷保留性。 直接隧道编程和擦除功能可以减少高能量载体对栅极堆叠和晶格的损害,减少写入疲劳和泄漏问题,并增强器件寿命。 本发明的存储器单元还允许在单个存储器单元中进行多位存储,并允许以降低的电压进行编程和擦除。 还提供了正电压擦除处理通孔隧穿。

    NROM memory cell, memory array, related devices and methods

    公开(公告)号:US08441056B2

    公开(公告)日:2013-05-14

    申请号:US12795906

    申请日:2010-06-08

    CPC classification number: H01L27/11568 G11C11/5692 G11C16/0475 H01L27/115

    Abstract: An array of memory cells configured to store at least one bit per one F2 includes substantially vertical structures providing an electronic memory function spaced apart a distance equal to one half of a minimum pitch of the array. The structures providing the electronic memory function are configured to store more than one bit per gate. The array also includes electrical contacts to the memory cells including the substantially vertical structures. The cells can be programmed to have one of a number of charge levels trapped in the gate insulator adjacent to the first source/drain region such that the channel region has a first voltage threshold region (Vt1) and a second voltage threshold region (Vt2) and such that the programmed cell operates at reduced drain source current.

    Non-volatile memory cell devices and methods
    9.
    发明授权
    Non-volatile memory cell devices and methods 有权
    非易失性存储单元器件及方法

    公开(公告)号:US08268692B2

    公开(公告)日:2012-09-18

    申请号:US13154618

    申请日:2011-06-07

    CPC classification number: H01L21/28273 B82Y10/00 H01L29/42332

    Abstract: A method of fabricating a memory cell including forming nanodots over a first dielectric layer and forming an intergate dielectric layer over the nanodots, where the intergate dielectric layer encases the nanodots. To form sidewalls of the memory cell, a portion of the intergate dielectric layer is removed with a dry etch, where the sidewalls include a location where a nanodot has been deposited. A spacing layer is formed over the sidewalls to cover the location where a nanodot has been deposited and the remaining portion of the intergate dielectric layer and the nanodots can be removed with an etch selective to the intergate dielectric layer.

    Abstract translation: 一种制造存储单元的方法,包括在第一介电层上形成纳米点并在纳米点上形成隔间电介质层,其中隔间电介质层封装在纳米点上。 为了形成存储器单元的侧壁,隔离介电层的一部分用干蚀刻去除,其中侧壁包括已经沉积纳米点的位置。 在侧壁上形成间隔层以覆盖已经沉积纳米点的位置,并且可以用对栅极间电介质层选择性的蚀刻来去除间隔栅电介质层和纳米点的剩余部分。

    NON-VOLATILE MEMORY CELL DEVICES AND METHODS
    10.
    发明申请
    NON-VOLATILE MEMORY CELL DEVICES AND METHODS 有权
    非易失性存储器单元和方法

    公开(公告)号:US20110233641A1

    公开(公告)日:2011-09-29

    申请号:US13154618

    申请日:2011-06-07

    CPC classification number: H01L21/28273 B82Y10/00 H01L29/42332

    Abstract: A method of fabricating a memory cell including forming nanodots over a first dielectric layer and forming an intergate dielectric layer over the nanodots, where the intergate dielectric layer encases the nanodots. To form sidewalls of the memory cell, a portion of the intergate dielectric layer is removed with a dry etch, where the sidewalls include a location where a nanodot has been deposited. A spacing layer is formed over the sidewalls to cover the location where a nanodot has been deposited and the remaining portion of the intergate dielectric layer and the nanodots can be removed with an etch selective to the intergate dielectric layer.

    Abstract translation: 一种制造存储单元的方法,包括在第一介电层上形成纳米点并在纳米点上形成隔间电介质层,其中隔间电介质层封装在纳米点上。 为了形成存储器单元的侧壁,隔离介电层的一部分用干蚀刻去除,其中侧壁包括已经沉积纳米点的位置。 在侧壁上形成间隔层以覆盖已经沉积纳米点的位置,并且可以用对栅极间电介质层选择性的蚀刻来去除间隔栅电介质层和纳米点的剩余部分。

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