公开(公告)号：US20230113276A1

公开(公告)日：2023-04-13

申请号：US17946716

申请日：2022-09-16

Applicant: Applied Materials, Inc.

Inventor： Wei-Sheng LEI ,  Girish Kumar GOPALAKRISHNAN NAIR ,  Kent Qiujing ZHAO ,  Daniel STOCK ,  Tobias STOLLEY ,  Thomas DEPPISCH ,  Jean DELMAS ,  Kenneth S. LEDFORD ,  Subramanya P. HERLE ,  Kiran VACHHANI ,  Mahendran CHIDAMBARAM ,  Roland TRASSL ,  Neil MORRISON ,  Frank SCHNAPPENBERGER ,  Kevin Laughton CUNNINGHAM ,  Stefan BANGERT ,  James CUSHING ,  Visweswaren SIVARAMAKRISHNAN

IPC: H01M50/102

Abstract: Methods and apparatuses for processing lithium batteries with a laser source having a wide process window, high efficiency, and low cost are provided. The laser source is adapted to achieve high average power and a high frequency of picosecond pulses. The laser source can produce a line-shaped beam either in a fixed position or in scanning mode. The system can be operated in a dry room or vacuum environment. The system can include a debris removal mechanism, for example, inert gas flow, to the processing site to remove debris produced during the patterning process.

公开(公告)号：US20150107885A1

公开(公告)日：2015-04-23

申请号：US14142036

申请日：2013-12-27

Applicant: Applied Materials, Inc.

Inventor： Neil MORRISON ,  Thomas DEPPISCH ,  Hans-Georg LOTZ

IPC: G06F3/0354 ,  H05K1/02 ,  H05K1/03 ,  G06F3/044

CPC classification number: G06F3/03547 ,  G06F3/041 ,  G06F3/044 ,  G06F2203/04103 ,  H05K1/0274 ,  H05K1/0306 ,  H05K2201/0137 ,  H05K2201/0145

Abstract: A layer stack for a touch panel is described. The layer stack includes a substrate including a polymer for depositing one or more layers on the substrate; a patterned transparent conductive oxide (TCO) layer provided over the substrate, which comprises areas of TCO and gaps between the areas of TCO; a first dielectric material provided in the gaps of the patterned TCO layer and a dielectric layer being deposited directly on the TCO areas of the TCO layer and directly on the first dielectric material. Further, a touch panel including a layer stack and a method for forming a layer stack for a touch panel is described.

Abstract translation: 描述了用于触摸面板的层叠体。 所述层叠层包括基板，所述基板包括用于在所述基板上沉积一层或多层的聚合物; 设置在衬底上的图案化透明导电氧化物（TCO）层，其包括TCO区域和TCO区域之间的间隙; 设置在图案化TCO层的间隙中的第一电介质材料和直接沉积在TCO层的TCO区上且直接沉积在第一介电材料上的电介质层。 此外，描述了包括层堆叠的触摸面板和用于形成用于触摸面板的层叠体的方法。

公开(公告)号：US20210222288A1

公开(公告)日：2021-07-22

申请号：US16308365

申请日：2017-11-28

Applicant: Applied Materials, Inc.

Inventor： Christof KURTHEN ,  Stefan HEIN ,  Reiner KUKLA ,  Neil MORRISON ,  Thomas DEPPISCH ,  Stefan LORENZ ,  Edgar HABERKORN

IPC: C23C14/34 ,  C23C14/06 ,  C23C14/50 ,  C23C14/58 ,  C23C14/56

Abstract: A deposition apparatus for coating a flexible substrate is described. The deposition apparatus comprises a first spool chamber housing a storage spool for providing the flexible substrate, a deposition chamber arranged downstream from the first spool chamber, and a second spool chamber arranged downstream from the deposition chamber and housing a wind-up spool for winding the flexible substrate thereon after deposition. The deposition chamber comprises a coating drum for guiding the flexible substrate past a plurality of deposition units including at least one deposition unit having a graphite target. The coating drum is connected to a device for applying an electrical potential to the coating drum.

公开(公告)号：US20200332413A1

公开(公告)日：2020-10-22

申请号：US16759696

申请日：2017-11-16

Applicant: Applied Materials, Inc.

Inventor： Claire ARMSTRONG ,  Frank SCHNAPPENBERGER ,  Thomas DEPPISCH

IPC: C23C14/54 ,  C23C14/24

Abstract: A method (100) of cooling a deposition source (200) is described. The method includes stopping (110) depositing material from the deposition source, the deposition source being arranged in a deposition chamber (250), and introducing (120) a cooling gas into the deposition chamber (250), the cooling gas comprising a thermal conductivity λ of λ≥0.05 [W/(m*K)]. Further, a chamber for cooling a deposition source is described. The chamber includes a deposition source being arranged in the chamber. Further, the chamber includes a cooling gas supply system configured for providing a cooling gas into the chamber, the cooling gas comprising a thermal conductivity λ of λ≥0.05 [W/(m*K)].

公开(公告)号：US20180135160A1

公开(公告)日：2018-05-17

申请号：US15852820

申请日：2017-12-22

Applicant: Applied Materials, Inc.

Inventor： Frank SCHNAPPENBERGER ,  Anke HELLMICH ,  Thomas KOCH ,  Thomas DEPPISCH

IPC: C23C14/00 ,  C23C14/54 ,  H01J37/32

CPC classification number: C23C14/0042 ,  C23C14/544 ,  H01J37/32449 ,  H01J37/32981 ,  H01J37/3299

Abstract: A method for controlling a gas supply to a process chamber is provided. The method includes: measuring a gas parameter by each of two or more sensors provided in the process chamber; determining a combined gas parameter from the measured gas parameters; and controlling the gas supply to the process chamber based on the determined combined gas parameter.

公开(公告)号：US20150109234A1

公开(公告)日：2015-04-23

申请号：US14101032

申请日：2013-12-09

Applicant: APPLIED MATERIALS, INC.

Inventor： Hans-Georg LOTZ ,  Neil MORRISON ,  Thomas DEPPISCH

IPC: G06F3/044 ,  C23C14/35 ,  H05K1/02 ,  H05K3/00

CPC classification number: C23C14/562 ,  C23C14/086 ,  C23C14/14 ,  C23C14/3464 ,  C23C14/35 ,  C23C14/5873 ,  G03F9/7042 ,  G06F3/041 ,  G06F3/044 ,  G06F2203/04103 ,  H01J37/3405 ,  H05K1/028 ,  H05K1/0393 ,  H05K3/00 ,  H05K2201/0108 ,  H05K2201/0145 ,  H05K2201/0326 ,  H05K2201/10128

Abstract: A process for manufacturing a transparent body for a touch screen panel is described. The process includes: depositing a first transparent layer stack over a flexible transparent substrate, wherein said first transparent layer stack includes at least a first dielectric film with a first refractive index, and a second dielectric film with a second refractive index different from the first refractive index; providing a transparent conductive film over the first transparent layer stack; depositing a layer of a conductive material over the transparent conductive film; providing a polymer layer over the layer of a conductive material; imprinting a pattern, e.g. a 3D pattern, on the polymer layer; etching the layer of the conductive material based upon the pattern to form conductive paths for the touch screen panel; and etching the transparent conductive film based upon the pattern to form a structured transparent conductive pattern for touch detection.

Abstract translation: 描述了用于制造用于触摸屏面板的透明体的方法。 该方法包括：在柔性透明衬底上沉积第一透明层堆叠，其中所述第一透明层堆叠至少包括具有第一折射率的第一介电膜和具有与第一折射率不同的第二折射率的第二介电膜 指数; 在所述第一透明层堆叠上提供透明导电膜; 在透明导电膜上沉积导电材料层; 在导电材料层上提供聚合物层; 印刷图案，例如 聚合物层上的3D图案; 基于图案蚀刻导电材料层，以形成用于触摸屏面板的导电路径; 并基于图案蚀刻透明导电膜，以形成用于触摸检测的结构化透明导电图案。

公开(公告)号：US20220356028A1

公开(公告)日：2022-11-10

申请号：US17307216

申请日：2021-05-04

Applicant: Applied Materials, Inc.

Inventor： Andreas SAUER ,  Annemarie HLADIK ,  Bernhard KÖHLER ,  Thomas DEPPISCH ,  Claire ARMSTRONG ,  Wolfgang BUSCHBECK

IPC: B65H27/00 ,  B65H18/14 ,  B65H23/038

Abstract: A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets extending in a radial direction (R) and being provided above the plurality of gas supply slits.

公开(公告)号：US20220356027A1

公开(公告)日：2022-11-10

申请号：US17307195

申请日：2021-05-04

Applicant: Applied Materials, Inc.

Inventor： Thomas DEPPISCH ,  Stefan BANGERT ,  Claire ARMSTRONG ,  Frank SCHNAPPENBERGER

IPC: B65H27/00 ,  C23C14/56 ,  C23C16/54 ,  B23K26/382 ,  B65H20/02

Abstract: A roller for transporting a flexible substrate is described. The roller includes a main body having a plurality of gas supply slits provided in an outer surface of the main body. The plurality of gas supply slits extends in a direction of a central rotation axis of the roller. Further, the roller includes a sleeve provided circumferentially around and in contact with the main body. The sleeve has a plurality of gas outlets being provided above the plurality of gas supply slits. Further, the sleeve includes a metal layer embedded within isolating material.

公开(公告)号：US20220033958A1

公开(公告)日：2022-02-03

申请号：US16944511

申请日：2020-07-31

Applicant: Applied Materials, Inc.

Inventor： Thomas DEPPISCH ,  Stefan BANGERT ,  Annabelle HOFMANN ,  Andreas LOPP ,  Thomas GOIHL

IPC: C23C14/24 ,  C23C14/04 ,  C23C14/50

Abstract: An evaporation source for depositing an evaporated material on a substrate is described. The evaporation source includes an evaporation crucible for evaporating a material; a vapor distributor with a plurality of nozzles for directing the evaporated material toward the substrate; a vapor conduit extending in a conduit length direction (A) from the evaporation crucible to the vapor distributor and providing a fluid connection between the evaporation crucible and the vapor distributor, wherein at least one nozzle of the plurality of nozzles has a nozzle axis extending in, or essentially parallel to, the conduit length direction (A); and a baffle arrangement in the vapor conduit. Further described are a vapor deposition apparatus including such an evaporation source and methods of coating a substrate in a vacuum chamber.

公开(公告)号：US20200318233A1

公开(公告)日：2020-10-08

申请号：US16308695

申请日：2017-11-28

Applicant: Edgar HABERKORN ,  Stefan LORENZ ,  Stefan HEIN ,  Neil MORRISON ,  Reiner KUKLA ,  Christof KURTHEN ,  Thomas DEPPISCH ,  Applied Materials, Inc.

Inventor： Edgar HABERKORN ,  Stefan LORENZ ,  Stefan HEIN ,  Neil MORRISON ,  Reiner KUKLA ,  Christof KURTHEN ,  Thomas DEPPISCH

IPC: C23C14/58 ,  C23C14/06 ,  C23C14/50 ,  C23C14/34

Abstract: A deposition apparatus for coating a flexible substrate is described. The deposition apparatus includes a first spool chamber housing a storage spool for providing the flexible substrate, a deposition chamber arranged downstream from the first spool chamber, and a second spool chamber arranged downstream from the deposition chamber and housing a wind-up spool for winding the flexible substrate thereon after deposition. The deposition chamber includes a coating drum for guiding the flexible substrate past a plurality of deposition units including at least one deposition unit having a graphite target. Further, the deposition chamber includes a coating treatment device configured to densify a layer deposited on the flexible substrate.