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公开(公告)号：US20240347688A1
公开(公告)日：2024-10-17
申请号：US18751967
申请日：2024-06-24
Applicant: Applied Materials, Inc.
Inventor： Subramanya P. HERLE , Girish Kumar GOPALAKRISHNAN NAIR , Daniel STOCK , Sambhu Nath KUNDU , Ezhiylmurugan RANGASAMY
CPC classification number: H01M4/0492 , H01M4/0404 , H01M4/1395 , H01M4/382 , B05D3/044 , B05D3/142 , B05D5/12
Abstract: A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.
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2.发明申请公开(公告)号：US20190140267A1
公开(公告)日：2019-05-09
申请号：US16150111
申请日：2018-10-02
Applicant: Applied Materials, Inc.
Abstract: Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same. In one implementation, an anode electrode structure is provided. The anode electrode structure comprises a current collector comprising copper. The anode electrode structure further comprises a lithium metal film formed on the current collector. The anode electrode structure further comprises a solid electrolyte interface (SEI) film stack formed on the lithium metal film. The SEI film stack comprises a chalcogenide film formed on the lithium metal film. In one implementation, the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film. In one implementation, the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.
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公开(公告)号：US20240387792A1
公开(公告)日：2024-11-21
申请号：US18785521
申请日：2024-07-26
Applicant: Applied Materials, Inc.
Inventor： David Masayuki ISHIKAWA , Girish Kumar GOPALAKRISHNAN NAIR , Ezhiylmurugan RANGASAMY , David ALVAREZ , Kent Qiujing ZHAO
Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.
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Patent Agency Ranking
公开(公告)号：US20230113276A1
公开(公告)日：2023-04-13
申请号：US17946716
申请日：2022-09-16
Applicant: Applied Materials, Inc.
Inventor： Wei-Sheng LEI , Girish Kumar GOPALAKRISHNAN NAIR , Kent Qiujing ZHAO , Daniel STOCK , Tobias STOLLEY , Thomas DEPPISCH , Jean DELMAS , Kenneth S. LEDFORD , Subramanya P. HERLE , Kiran VACHHANI , Mahendran CHIDAMBARAM , Roland TRASSL , Neil MORRISON , Frank SCHNAPPENBERGER , Kevin Laughton CUNNINGHAM , Stefan BANGERT , James CUSHING , Visweswaren SIVARAMAKRISHNAN
IPC: H01M50/102
Abstract: Methods and apparatuses for processing lithium batteries with a laser source having a wide process window, high efficiency, and low cost are provided. The laser source is adapted to achieve high average power and a high frequency of picosecond pulses. The laser source can produce a line-shaped beam either in a fixed position or in scanning mode. The system can be operated in a dry room or vacuum environment. The system can include a debris removal mechanism, for example, inert gas flow, to the processing site to remove debris produced during the patterning process.
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公开(公告)号：US20220158159A1
公开(公告)日：2022-05-19
申请号：US17455113
申请日：2021-11-16
Applicant: Applied Materials, Inc.
Inventor： David Masayuki ISHIKAWA , Ezhiylmurugan RANGASAMY , Kiran VACHHANI , Subramanya P. HERLE , Girish Kumar GOPALAKRISHNAN NAIR
IPC: H01M4/04 , H01M4/1393 , H01M4/1395 , H01M4/62 , H01M4/36 , C23C14/58 , C23C14/34 , C23C14/56 , C23C16/54 , C23C16/56 , H01M4/38 , H01M4/587 , C23C14/08 , C23C14/06 , C23C14/14 , C23C14/12 , C23C14/10 , C23C14/30
Abstract: Methods, systems, and apparatuses for coating flexible substrates are provided. A coating system includes an unwinding module housing a feed reel capable of providing a continuous sheet of flexible material, a winding module housing a take-up reel capable of storing the continuous sheet of flexible material, and a processing module arranged downstream from the unwinding module. The processing module includes a plurality of sub-chambers arranged in sequence, each configured to perform one or more processing operations to the continuous sheet of flexible material. The processing module includes a coating drum capable of guiding the continuous sheet of flexible material past the plurality of sub-chambers along a travel direction. The sub-chambers are radially disposed about the coating drum and at least one of the sub-chambers includes a deposition module. The deposition module includes a pair of electron beam sources positioned side-by-side along a transverse direction perpendicular to the travel direction.
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6.发明申请公开(公告)号：US20230006197A1
公开(公告)日：2023-01-05
申请号：US17939121
申请日：2022-09-07
Applicant: Applied Materials, Inc.
Abstract: Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same. In one implementation, an anode electrode structure is provided. The anode electrode structure comprises a current collector comprising copper. The anode electrode structure further comprises a lithium metal film formed on the current collector. The anode electrode structure further comprises a solid electrolyte interface (SEI) film stack formed on the lithium metal film. The SEI film stack comprises a chalcogenide film formed on the lithium metal film. In one implementation, the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film. In one implementation, the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.
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公开(公告)号：US20220190306A1
公开(公告)日：2022-06-16
申请号：US17543360
申请日：2021-12-06
Applicant: Applied Materials, Inc.
Inventor： David Masayuki ISHIKAWA , Girish Kumar GOPALAKRISHNAN NAIR , Ezhiylmurugan RANGASAMY , David ALVAREZ , Kent Qiujing ZHAO
Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.
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8.发明申请公开(公告)号：US20210210752A1
公开(公告)日：2021-07-08
申请号：US17194899
申请日：2021-03-08
Applicant: Applied Materials, Inc.
Abstract: Implementations described herein generally relate to metal electrodes, more specifically lithium-containing anodes, high performance electrochemical devices, such as secondary batteries, including the aforementioned lithium-containing electrodes, and methods for fabricating the same. In one implementation, an anode electrode structure is provided. The anode electrode structure comprises a current collector comprising copper. The anode electrode structure further comprises a lithium metal film formed on the current collector. The anode electrode structure further comprises a solid electrolyte interface (SEI) film stack formed on the lithium metal film. The SEI film stack comprises a chalcogenide film formed on the lithium metal film. In one implementation, the SEI film stack further comprises a lithium oxide film formed on the chalcogenide film. In one implementation, the SEI film stack further comprises a lithium carbonate film formed on the lithium oxide film.
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