SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    6.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD 有权
    基板处理装置和基板处理方法

    公开(公告)号:US20140363587A1

    公开(公告)日:2014-12-11

    申请号:US14366231

    申请日:2012-12-21

    Abstract: Disclosed is a substrate processing apparatus and method which facilitate to improve uniformity of thin film material and also facilitate to control quality of thin film by the use of plasma forming space and source gas distributing space separately provided from each other, wherein the substrate processing apparatus includes a process chamber; a substrate support for supporting a plurality of substrates, the substrate support rotatably provided inside the process chamber; and a electrode unit arranged above the substrate support and provided with the plasma forming space and the source gas distributing space, wherein the plasma forming space is spatially separated from the source gas distributing space.

    Abstract translation: 公开了一种有利于提高薄膜材料的均匀性的基板处理装置和方法,并且还通过使用彼此分开设置的等离子体形成空间和源气体分配空间来有助于控制薄膜的质量,其中基板处理装置包括 处理室; 用于支撑多个基板的基板支撑件,可旋转地设置在处理室内的基板支撑件; 以及电极单元,其布置在所述基板支撑件上方,并设置有所述等离子体形成空间和所述源气体分配空间,其中所述等离子体形成空间与所述源气体分配空间在空间上分离。

    Method of manufaturing a colored metallic sheet
    8.
    发明授权
    Method of manufaturing a colored metallic sheet 失效
    制作彩色金属片的方法

    公开(公告)号:US5208073A

    公开(公告)日:1993-05-04

    申请号:US769703

    申请日:1991-10-02

    Applicant: Akira Yoshino

    Inventor: Akira Yoshino

    CPC classification number: C23C8/80 B05D3/044 B05D2202/00

    Abstract: In this invention, a method of manufacturing a colored metallic sheet comprises steps of holding a surface to be painted of metallic plates 10 in a fluorine- or fluoride-containing atmosphere in a heated condition to form a fluorided layer on the surface to be painted, removing the formed fluorided layer on the surface just before painting the surface to expose a metallic base, and painting the exposed metallic base surface.

    Method for providing adhesion to a metal surface
    9.
    发明授权
    Method for providing adhesion to a metal surface 失效
    提供对金属表面的附着力的方法

    公开(公告)号:US5089063A

    公开(公告)日:1992-02-18

    申请号:US461922

    申请日:1990-01-08

    Abstract: A process for treating metal surfaces to obtain improved susceptibility to bonding with adhesive compositions is disclosed. A metal surface is oxidized with a halogen to form a monolayer of halide ions on the surface. The halide ions are then exchanged with azide ions to form an azide monolayer on the metal surface. Upon contact of the treated surface with an adhesive composition, the azide layer may be thermally or photochemically decomposed to form active nitrene species, which react to bond the adhesive composition to the metal surface.

    Abstract translation: 公开了一种用于处理金属表面以获得改善的粘合剂组合物敏感性的方法。 金属表面被卤素氧化以在表面上形成单层的卤离子。 然后将卤离子与叠氮化物离子交换以在金属表面上形成叠氮化物单层。 当处理过的表面与粘合剂组合物接触时,叠氮化物层可以被热或光化学分解形成活性的腈类物质,它们将粘合剂组合物与金属表面反应。

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