公开(公告)号：US20100309448A1

公开(公告)日：2010-12-09

申请号：US12793873

申请日：2010-06-04

申请人： Kazuki Yamamoto ,  Yoshinori Ohsaki

发明人： Kazuki Yamamoto ,  Yoshinori Ohsaki

IPC分类号： G03B27/42 ,  G01B9/02 ,  G03F7/20

CPC分类号： G01B9/02083 ,  G01B9/02039 ,  G01B11/2441 ,  G01J9/02 ,  G03B27/42 ,  G03F7/706

摘要： A measurement apparatus, which measures a wavefront aberration of an optical system to be measured, comprises: a calculation unit configured to calculate the wavefront aberration based on an interference fringe generated by light which passed through the optical system to be measured; and a determination unit configured to calculate an evaluation value indicating a wavefront state based on the wavefront aberration calculated by the calculation unit, and determine the calculated wavefront aberration as the wavefront aberration of the optical system if the evaluation value falls within an allowable range.

摘要翻译： 测量要测量的光学系统的波前像差的测量装置包括：计算单元，被配置为基于通过待测量的光学系统的光产生的干涉条纹来计算波前像差; 以及确定单元，被配置为基于由所述计算单元计算的所述波前像差来计算指示波前状态的评估值，并且如果所述评估值在允许范围内，则将所计算的波前像差确定为所述光学系统的波面像差。

公开(公告)号：US20090015815A1

公开(公告)日：2009-01-15

申请号：US12169734

申请日：2008-07-09

申请人： Yoshinori Ohsaki

发明人： Yoshinori Ohsaki

IPC分类号： G03B27/72 ,  G03B27/32

CPC分类号： G03F7/7085 ,  G03B27/32 ,  G03B27/72 ,  G03F7/706

摘要： The present invention provides an exposure apparatus comprising a projection optical system configured to project a pattern of a reticle onto a substrate, a stage configured to move the substrate; and a sensor unit which is arranged on the stage and configured to receive light having passed through the projection optical system, the sensor unit including an aperture plate which is configured to be used in measuring different optical performances, and on which a plurality of aperture patterns with different shapes or different sizes are formed, and a photoelectric conversion device configured to photoelectrically convert the light beams from the plurality of aperture patterns.

摘要翻译： 本发明提供一种曝光装置，包括：投影光学系统，被配置为将掩模版的图案投影到基板上;阶段，被配置为移动所述基板; 以及传感器单元，其布置在所述台上并且被配置为接收已经穿过所述投影光学系统的光，所述传感器单元包括孔径板，所述孔板被配置为用于测量不同的光学性能，并且多个孔径图案 形成不同形状或不同尺寸的光电转换装置，以及被配置为对来自多个孔径图案的光束进行光电转换的光电转换装置。

公开(公告)号：US07403263B2

公开(公告)日：2008-07-22

申请号：US11734606

申请日：2007-04-12

申请人： Yoshinori Ohsaki

发明人： Yoshinori Ohsaki

IPC分类号： G03B27/42 ,  G03B27/52 ,  G03B27/74 ,  G03B27/58

CPC分类号： G03F7/7085 ,  G03B27/52 ,  G03F7/70341 ,  G03F9/7096

摘要： An exposure apparatus includes a projection optical system for projecting a pattern on a reticle onto an object to be exposed, a reference mark that serves as a reference for an alignment between the reticle and the object, a first fluid that has a refractive index of 1 or greater, and fills a space between at least part of the projection optical system and the object and a space between at least part of the projection optical system and the reference mark, and an alignment mechanism for aligning the object by using the projection optical system and the first fluid.

摘要翻译： 曝光装置包括：投影光学系统，用于将掩模版上的图案投影到待曝光的物体上;基准标记，其用作参考标号，用于对准所述标线片和所述物体;第一流体，其折射率为1 以上，并且填充投影光学系统的至少一部分与物体之间的空间以及投影光学系统的至少一部分与基准标记之间的空间，以及通过使用投影光学系统对准物体的对准机构 和第一流体。

公开(公告)号：US20080111980A1

公开(公告)日：2008-05-15

申请号：US11956747

申请日：2007-12-14

申请人： Yoshinori OHSAKI

发明人： Yoshinori OHSAKI

IPC分类号： G03B27/52 ,  G01B11/02 ,  G03F1/00

CPC分类号： G03F7/706

摘要： An exposure apparatus includes a projection optical system for projecting an exposure pattern, onto an object to be exposed, and a measuring apparatus for measuring, as an interference fringe, optical performance of the projection optical system, wherein the measuring apparatus includes an optical element having opposing first and second surfaces, wherein the first surface has a first measurement pattern, and the second surface has a second measurement pattern and is closer to the projection optical system than the first measurement pattern, and wherein the measuring apparatus introduces light into the projection optical system via first and second measurement patterns.

摘要翻译： 曝光装置包括：投影光学系统，用于将曝光图案投影到待曝光的物体上;以及测量装置，用于测量投影光学系统的光学性能作为干涉条纹，其中测量装置包括具有 相对的第一和第二表面，其中第一表面具有第一测量图案，并且第二表面具有第二测量图案，并且比第一测量图案更靠近投影光学系统，并且其中测量设备将光引入投影光学 系统经由第一和第二测量模式。

公开(公告)号：US06989885B2

公开(公告)日：2006-01-24

申请号：US10726541

申请日：2003-12-04

申请人： Yuichi Osakabe ,  Yoshinori Ohsaki

发明人： Yuichi Osakabe ,  Yoshinori Ohsaki

IPC分类号： G03B27/42 ,  G03B27/58 ,  G03B27/62 ,  G01B11/00

CPC分类号： G03F9/7011 ,  G03B27/42

摘要： A scanning exposure apparatus for exposing a substrate (8) to a pattern with an original (1) through a projection optical system (5), while scanning the original and the substrate, includes a first detection system (14c) which detects a first substrate reference mark (18c1, 18c3) corresponding to the substrate through the projection optical system on/at at least one of an optical axis of the projection optical and an off-axis position shifted from the optical axis in a scanning direction, and an alignment system (2, 9) which aligns the original and the substrate on the basis of a detection result of the first detection system.

摘要翻译： 一种用于通过投影光学系统（5）将基板（8）暴露于具有原稿（1）的图案的扫描曝光装置，在扫描原件和基板的同时，包括第一检测系统（14c），其检测第一 通过投影光学系统对应于基板的基板参照标记（18c1,18c3），在投影光学的光轴和离开光轴的扫描方向上偏离的离轴位置 以及基于第一检测系统的检测结果对准原件和基板的对准系统（2,9）。

公开(公告)号：US20050219487A1

公开(公告)日：2005-10-06

申请号：US11130174

申请日：2005-05-17

申请人： Yuichi Osakabe ,  Yoshinori Ohsaki

发明人： Yuichi Osakabe ,  Yoshinori Ohsaki

IPC分类号： G03F7/22 ,  G03B27/42 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027

CPC分类号： G03F9/7011 ,  G03B27/42

摘要： A scanning exposure apparatus for exposing a substrate (8) to a pattern with an original (1) through a projection optical system (5), while scanning the original and the substrate, includes a first detection system (14c) which detects a first substrate reference mark (18c1, 18c3) corresponding to the substrate through the projection optical system on/at at least one of an optical axis of the projection optical and an off-axis position shifted from the optical axis in a scanning direction, and an alignment system (2, 9) which aligns the original and the substrate on the basis of a detection result of the first detection system.

摘要翻译： 一种用于通过投影光学系统（5）将基板（8）暴露于具有原稿（1）的图案的扫描曝光装置，在扫描原件和基板的同时，包括第一检测系统（14c），其检测第一 通过投影光学系统对应于基板的基板参照标记（18c1,18c3），在投影光学的光轴和离开光轴的扫描方向上偏离的离轴位置 以及基于第一检测系统的检测结果对准原件和基板的对准系统（2,9）。

公开(公告)号：US6088115A

公开(公告)日：2000-07-11

申请号：US866216

申请日：1997-05-30

申请人： Yoshinori Ohsaki ,  Takashi Suzuki

发明人： Yoshinori Ohsaki ,  Takashi Suzuki

IPC分类号： G01N21/21 ,  G01N21/55

CPC分类号： G01N21/21 ,  G01N2021/212 ,  G01N2021/218

摘要： In an optical anisotropy measurement apparatus for emitting a light flux from a He-Ne laser to be incident to an object to be examined, such as a liquid crystal in a liquid crystal cell, and detecting a light flux totally reflected from the object to be examined to measure an optical anisotropy of the object, a portion of the incident light flux is designed to be incident at an angle smaller than a critical angle of total reflection to and transmitted through the object to be examined. As a result, a light flux-incident region causing total reflection at the boundary is allowed to have a shape closer to a circle and have a smaller size, thus allowing detection of a local alignment change in optical anisotropy as caused by, e.g., a minute alignment defect in a liquid crystal device. Further by detecting the transmitted portion of the incident light flux, an optical anisotropy of the object to be examined at a position other than a boundary thereof can be measured simultaneously.

摘要翻译： 在用于从He-Ne激光器入射到待检测对象的光通量的光学各向异性测量装置中，例如液晶单元中的液晶，并且检测从物体全反射的光通量 检查以测量物体的光学各向异性，入射光束的一部分被设计成以小于全反射的临界角并且透过被检测物体的角度入射。 结果，允许在边界处引起全反射的光通量入射区域具有更接近圆形且具有较小尺寸的形状，从而允许检测由例如a的引起的光学各向异性的局部取向变化 在液晶装置中存在微小的取向缺陷。 此外，通过检测入射光束的透射部分，可以同时测量在其边界以外的位置处的被检查物体的光学各向异性。

公开(公告)号：US20080259349A1

公开(公告)日：2008-10-23

申请号：US12059444

申请日：2008-03-31

申请人： Miwako Ando ,  Yoshinori Ohsaki

发明人： Miwako Ando ,  Yoshinori Ohsaki

IPC分类号： G01B11/02

CPC分类号： G03F7/7085 ,  G03F7/706

摘要： An exposure apparatus, which equipped with a projection optical system that is configured to project a pattern of an original onto a substrate, includes an interferometer configured to measure a wavefront in a first direction and a wavefront in a second direction of light passed through the projection optical system; a focus detecting unit configured to detect focus positions in the first and second directions of the projection optical system; and a calculating unit configured to calculate wavefront aberration of the projection optical system on the basis of the measurement result of the interferometer and the detection result of the focus detecting unit.

摘要翻译： 配备有投影光学系统的投影光学系统的曝光装置，其配置为将原稿的图案投影到基板上，包括：干涉仪，被配置为测量第一方向上的波前和沿着第二方向的波前方， 光学系统; 焦点检测单元，被配置为检测投影光学系统的第一和第二方向上的焦点位置; 以及计算单元，被配置为基于干涉仪的测量结果和焦点检测单元的检测结果来计算投影光学系统的波前像差。

公开(公告)号：US20080094597A1

公开(公告)日：2008-04-24

申请号：US11873724

申请日：2007-10-17

申请人： Shinichiro Hirai ,  Yoshinori Ohsaki ,  Yoshiyuki Kuramoto

发明人： Shinichiro Hirai ,  Yoshinori Ohsaki ,  Yoshiyuki Kuramoto

IPC分类号： G03B27/54 ,  G01B11/02

CPC分类号： G03B27/54 ,  G03F7/706 ,  G03F7/7085

摘要： A projection exposure apparatus 100 projects the pattern of an original 6 onto a substrate 7 via a projection optical system PL. The projection exposure apparatus 100 includes an original stage 5 which holds the original 6, a substrate stage 8 which holds the substrate 7, and a measurement unit. The measurement unit includes a Fizeau interferometer IF including an optical unit 17 and mirror 22. The optical unit 17 includes a Fizeau surface which splits a light beam into a reference light beam and a test light beam. The mirror 22 reflects the test light beam having passed through the projection optical system PL. The optical unit 17 is mounted on the original stage 5. The mirror 22 is mounted on the substrate stage 8.

摘要翻译： 投影曝光装置100通过投影光学系统PL将原稿6的图案投影到基板7上。 投影曝光装置100包括保持原稿6的原稿台5，保持基板7的基板台8和测量单元。 测量单元包括包括光学单元17和反射镜22的Fizeau干涉仪IF。 光学单元17包括将光束分成参考光束和测试光束的Fizeau表面。 反射镜22反射穿过投影光学系统PL的测试光束。 光学单元17安装在原始台5上。 反射镜22安装在基板台8上。

公开(公告)号：US07330237B2

公开(公告)日：2008-02-12

申请号：US11219508

申请日：2005-09-01

申请人： Yoshinori Ohsaki

发明人： Yoshinori Ohsaki

IPC分类号： G03B27/68

CPC分类号： G03F7/706

摘要： An exposure apparatus includes a projection optical system for projecting an exposure pattern, onto an object to be exposed, and a measuring apparatus for measuring, as an interference fringe, optical performance of the projection optical system, wherein the measuring apparatus includes an optical element having opposing first and second surfaces, wherein the first surface has a first measurement pattern, and the second surface has a second measurement pattern and is closer to the projection optical system than the first measurement pattern, and wherein the measuring apparatus introduces light into the projection optical system via first and second measurement patterns.

摘要翻译： 曝光装置包括：投影光学系统，用于将曝光图案投影到待曝光的物体上;以及测量装置，用于测量投影光学系统的光学性能作为干涉条纹，其中测量装置包括具有 相对的第一和第二表面，其中第一表面具有第一测量图案，并且第二表面具有第二测量图案，并且比第一测量图案更靠近投影光学系统，并且其中测量设备将光引入投影光学 系统经由第一和第二测量模式。