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公开(公告)号：US11032440B2
公开(公告)日：2021-06-08
申请号：US16735483
申请日：2020-01-06
发明人： Kazuya Yoshikaie , Kazuhiko Arimori
摘要： An image reading apparatus includes a medium mounting portion configured to mount a medium; a feeding means configured to feed a medium from the medium mounting portion; at least one edge guide each configured to regulate a corresponding one of at least one medium width direction edge of the medium having been mounted on the medium mounting portion; a reading means configured to read the medium and disposed on a further downstream side than the at least one edge guide in the medium feeding direction; and at least one medium detection means configured to detect the medium and disposed on a further downstream side than the at least one edge guide in the medium feeding direction and further outside in the medium width direction than at least one edge regulation position for the edge regulation by the at least one edge guide.
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公开(公告)号：US10884332B2
公开(公告)日：2021-01-05
申请号：US16452697
申请日：2019-06-26
摘要： A film positioning device can include a housing, a feed mechanism, and a controller. The housing defines a film receptacle. The feed mechanism is positioned at the film receptacle and configured to move film along the film receptacle. The controller is coupled to the feed mechanism. The controller is configured to control the feed mechanism to move film along the film receptacle. And, based on control of the feed mechanism, the controller is configured to output a camera actuation signal to cause a camera to capture an image of the film.
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公开(公告)号：US10578980B2
公开(公告)日：2020-03-03
申请号：US16465161
申请日：2017-11-23
发明人： Ralph Timotheus Huijgen , Marc Jurian Kea , Marcel Theodorus Maria Van Kessel , Masashi Ishibashi , Chi-Hsiang Fan , Hakki Ergün Cekli , Youping Zhang , Maurits Van Der Schaar , Liping Ren
IPC分类号： G03B27/32 , G03F7/20 , G01N21/956 , G03F9/00
摘要： A method, system and program for determining a position of a feature referenced to a substrate. The method includes measuring a position of the feature, receiving an intended placement of the feature and determining an estimate of a placement error based on knowledge of a relative position of a first reference feature referenced to a first layer on a substrate with respect to a second reference feature referenced to a second layer on a substrate. The updated position may be used to position the layer of the substrate having the feature, or another layer of the substrate, or another layer of another substrate.
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公开(公告)号：US10567606B2
公开(公告)日：2020-02-18
申请号：US15873529
申请日：2018-01-17
发明人： Kazuya Yoshikaie , Kazuhiko Arimori
摘要： An image reading apparatus includes a medium mounting portion configured to mount a medium; a feeding means configured to feed a medium from the medium mounting portion; at least one edge guide each configured to regulate a corresponding one of at least one medium width direction edge of the medium having been mounted on the medium mounting portion; a reading means configured to read the medium and disposed on a further downstream side than the at least one edge guide in the medium feeding direction; and at least one medium detection means configured to detect the medium and disposed on a further downstream side than the at least one edge guide in the medium feeding direction and further outside in the medium width direction than at least one edge regulation position for the edge regulation by the at least one edge guide.
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公开(公告)号：US10437157B2
公开(公告)日：2019-10-08
申请号：US15533309
申请日：2015-11-13
发明人： Scott Anderson Middlebrooks , Markus Gerardus Martinus Maria Van Kraaij , Adrianus Cornelis Matheus Koopman , Stefan Hunsche , Willem Marie Julia Marcel Coene
摘要： A method and apparatus of detection, registration and quantification of an image. The method may include obtaining an image of a lithographically created structure, and applying a level set method to an object, representing the structure, of the image to create a mathematical representation of the structure. The method may include obtaining a first dataset representative of a reference image object of a structure at a nominal condition of a parameter, and obtaining second dataset representative of a template image object of the structure at a non-nominal condition of the parameter. The method may further include obtaining a deformation field representative of changes between the first dataset and the second dataset. The deformation field may be generated by transforming the second dataset to project the template image object onto the reference image object. A dependence relationship between the deformation field and change in the parameter may be obtained.
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公开(公告)号：US10429744B2
公开(公告)日：2019-10-01
申请号：US16016162
申请日：2018-06-22
发明人： Tamer Coskun , Hwan J. Jeong
摘要： Methods and apparatuses are provided that determine an offset between actual feature/mark locations and the designed feature/mark locations in a maskless lithography system. For example, in one embodiment, a method is provided that includes opening a camera shutter in a maskless lithography system. Light is directed from a configuration of non-adjacent mirrors in a mirror array towards a first substrate layer. An image of the first substrate layer on a camera is captured and accumulated. Light is directed and images are captured repeatedly using different configurations of non-adjacent mirrors to cover an entire field-of-view (FOV) of the camera on the first substrate layer. Thereafter, the camera shutter is closed and the accumulated image is stored in memory.
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公开(公告)号：US10401739B2
公开(公告)日：2019-09-03
申请号：US16124492
申请日：2018-09-07
发明人： Niels Geypen
摘要： A method of aligning a pair of complementary diffraction patterns having a first complementary diffraction pattern and a second complementary diffraction pattern, the pair of complementary diffraction patterns obtained from performance of a metrology process on a structure formed by a lithographic process. The method includes performing at least a fine alignment stage to align the pair of complementary diffraction patterns. The alignment stage includes: interpolating measured values of the first complementary diffraction pattern over at least a portion of a detector area; and minimizing a residual between measured values in the second complementary diffraction pattern and corresponding interpolated values from the interpolation of the first complementary diffraction pattern, by one or both of translation and rotation of the second complementary diffraction pattern.
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公开(公告)号：US20190236570A1
公开(公告)日：2019-08-01
申请号：US16381401
申请日：2019-04-11
发明人： Matthew LATTMAN , Greg MCALLISTER
CPC分类号： G06Q20/108 , F16M11/046 , F16M11/18 , F16M13/00 , G03B17/568 , G03B27/323 , G06Q20/042 , G07F19/202 , H04N1/00519 , H04N1/00562 , H04N1/2034 , H04W4/80
摘要： An imaging device provides a mobile device multi-feed scanner, which may utilize remote data capture for multi-sheet feed scanning by using mirrors to form a reflective path allowing the viewing of the reverse side of the check on a platform to capture the check image on a mobile device. A camera on the mobile device may either sequentially or simultaneously capture a picture of both the front and back sides of the check. The platform may include a transparent portion, which may be adjacent to a stage portion. The first and second mirrors may be positioned such as to allow imaging of a reverse side of an object through the transparent portion of the platform while the object rests on the stage portion.
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公开(公告)号：US10325247B2
公开(公告)日：2019-06-18
申请号：US15945189
申请日：2018-04-04
发明人： Matthew Lattman , Greg McAllister
IPC分类号： H04W4/80 , F16M11/18 , G03B27/32 , G06Q20/10 , H04N1/203 , F16M11/04 , G06Q20/04 , G07F19/00 , G03B17/56
摘要： An imaging device provides a mobile device multi-feed scanner, which may utilize remote data capture for multi-sheet feed scanning by using mirrors to form a reflective path allowing the viewing of the reverse side of the check on a platform to capture the check image on a mobile device. A camera on the mobile device may either sequentially or simultaneously capture a picture of both the front and back sides of the check. The platform may include a transparent portion, which may be adjacent to a stage portion. The first and second mirrors may be positioned such as to allow imaging of a reverse side of an object through the transparent portion of the platform while the object rests on the stage portion.
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公开(公告)号：US10175394B2
公开(公告)日：2019-01-08
申请号：US15705304
申请日：2017-09-15
申请人： HOYA CORPORATION
IPC分类号： G03B27/32 , G02B5/08 , G03F1/24 , G02B5/26 , G02B5/28 , G03F1/52 , G03F1/84 , G03F7/20 , G02B1/14 , G02B5/00
摘要： A substrate with multilayer reflective film for discovery of critical defects by inhibiting the detection of pseudo defects attributable to surface roughness of a substrate or film using a highly sensitive defect inspection apparatus. The substrate has a multilayer reflective film obtained by alternately laminating a high refractive index layer and a low refractive index layer on a main surface of a mask blank substrate used in lithography, wherein an integrated value I of the power spectrum density (PSD) at a spatial frequency of 1 μm−1 to 10 μm−1 of the surface of the substrate with a multilayer reflective film, obtained by measuring a region measuring 3 μm×3 μm with an atomic force microscope, is not more than 180×10−3 nm3, and the maximum value of the rower spectrum density (PSD) at a spatial frequency of 1 μm−1 to 10 μm−1 is not more than 50 nm4.
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