Invention Grant
- Patent Title: Exposure apparatus
- Patent Title (中): 曝光装置
-
Application No.: US11734606Application Date: 2007-04-12
-
Publication No.: US07403263B2Publication Date: 2008-07-22
- Inventor: Yoshinori Ohsaki
- Applicant: Yoshinori Ohsaki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Morgan & Finnegan, LLP
- Priority: JP2003-409881 20031209
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/52 ; G03B27/74 ; G03B27/58

Abstract:
An exposure apparatus includes a projection optical system for projecting a pattern on a reticle onto an object to be exposed, a reference mark that serves as a reference for an alignment between the reticle and the object, a first fluid that has a refractive index of 1 or greater, and fills a space between at least part of the projection optical system and the object and a space between at least part of the projection optical system and the reference mark, and an alignment mechanism for aligning the object by using the projection optical system and the first fluid.
Public/Granted literature
- US20070188728A1 EXPOSURE APPARATUS Public/Granted day:2007-08-16
Information query