Alignment correction method for substrate to be exposed, and exposure apparatus
    3.
    发明授权
    Alignment correction method for substrate to be exposed, and exposure apparatus 有权
    要曝光的基板的对准校正方法和曝光装置

    公开(公告)号:US09360776B2

    公开(公告)日:2016-06-07

    申请号:US14168212

    申请日:2014-01-30

    Abstract: An alignment correction method includes: the step of detecting coordinates of a first observation point 14 and a second observation point 15 set in advance on a substrate to be exposed 1 that is being scanned in a scanning direction A, in order to observe an alignment deviation of the substrate to be exposed 1; the step of computing a correction amount based on a deviation between the detected coordinates and a reference line set in advance according to the first observation point 14 and the second observation point 15; and the step of correcting alignment of a subsequent substrate to be exposed 1 based on the computed correction amount.

    Abstract translation: 对准校正方法包括:检测在扫描方向A上被扫描的待曝光基板1上预先设定的第一观察点14和第二观察点15的坐标的步骤,以观察取向偏差 要暴露的基材1; 基于检测到的坐标与根据第一观察点14和第二观察点15预先设定的参考线之间的偏差来计算校正量的步骤; 以及基于所计算的校正量来校正待曝光的衬底1的对准的步骤。

    Defocus calibration module for light-sensing system and method thereof
    6.
    发明授权
    Defocus calibration module for light-sensing system and method thereof 有权
    用于光感测系统的散焦校准模块及其方法

    公开(公告)号:US08538187B2

    公开(公告)日:2013-09-17

    申请号:US12818112

    申请日:2010-06-17

    CPC classification number: G03B3/00 G03B13/00 H04N17/002

    Abstract: A defocus calibration module is applied in a light-sensing system for sensing a measured object to generate a sensed image. The light-sensing system contains a light-emitting component, a focusing component, and an image sensor. The light-emitting component emits a detecting light to the measured object so that the measured object generates a reflecting light. The focusing component focuses the reflecting light to the image sensor, and the image sensor generates the sensed image according to the reflecting light. The defocus calibration module has a calibrating object for blocking a part of the detecting light and the reflecting light for forming images at a first and a second calibration imaging locations in the sensed image. In this way, the defocus calibration module calculates a defocus parameter representing the defocus level of the light-sensing system according to the first and the second calibration imaging locations, and accordingly calibrates the sensed image.

    Abstract translation: 散焦校准模块被应用于光感测系统中,用于感测被测物体以产生感测图像。 光感测系统包含发光部件,聚焦部件和图像传感器。 发光部件向测量对象发射检测光,使得被测物体产生反射光。 聚焦组件将反射光聚焦到图像传感器,并且图像传感器根据反射光产生感测图像。 散焦校准模块具有用于阻挡检测光的一部分的校准对象和用于在感测图像中的第一和第二校准成像位置处形成图像的反射光。 以这种方式,散焦校准模块根据第一和第二校准成像位置计算表示光感测系统的散焦水平的散焦参数,并因此校准感测图像。

    Exposure apparatus and device manufacturing method
    10.
    发明授权
    Exposure apparatus and device manufacturing method 有权
    曝光装置和装置制造方法

    公开(公告)号:US07936446B2

    公开(公告)日:2011-05-03

    申请号:US11935814

    申请日:2007-11-06

    Inventor: Shinichi Hirano

    CPC classification number: G03B27/72 G03F7/70558

    Abstract: An exposure apparatus which illuminates a reticle with illumination light from a light source and projects light from the reticle onto a substrate to expose the substrate to light is disclosed. The apparatus comprises a shutter located on a path of the illumination light, a detector configured to detect a dose to the substrate, and a controller configured to control operation of the shutter. In a first exposure mode which uses illumination light with a first light intensity, the controller controls an open time of the shutter based on an output from the detector, and to store the open time. In a second exposure mode which uses illumination light with a second light intensity higher than the first light intensity, the controller controls a speed of the shutter based on the stored open time.

    Abstract translation: 公开了一种曝光装置,其利用来自光源的照明光照亮标线板,并将来自光掩模的光投射到基板上以将基板曝光。 该装置包括位于照明光路径上的快门,被配置为检测对基板的剂量的检测器以及被配置为控制快门的操作的控制器。 在使用具有第一光强度的照明光的第一曝光模式中,控制器基于来自检测器的输出来控制快门的打开时间并存储打开时间。 在使用具有比第一光强度高的第二光强度的照明光的第二曝光模式下,控制器基于所存储的打开时间来控制快门的速度。

Patent Agency Ranking