公开(公告)号：US08679967B2

公开(公告)日：2014-03-25

申请号：US12911887

申请日：2010-10-26

申请人： Roy E. Scheuerlein ,  Yoichiro Tanaka

发明人： Roy E. Scheuerlein ,  Yoichiro Tanaka

IPC分类号： H01L21/4763

CPC分类号： G11C5/06 ,  H01L21/0337 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/101 ,  H01L27/2481 ,  H01L2924/0002 ,  Y10S257/909 ,  H01L2924/00

摘要： The present invention provides apparatus, methods, and systems for fabricating memory lines and structures using double sidewall patterning for four times half pitch relief patterning. The invention includes forming features from a first template layer disposed above a substrate, forming half-pitch sidewall spacers adjacent the features, forming smaller features in a second template layer by using the half-pitch sidewall spacers as a hardmask, forming quarter-pitch sidewall spacers adjacent the smaller features, and forming conductor features from a conductor layer by using the quarter-pitch sidewall spacers as a hardmask. Numerous additional aspects are disclosed.

摘要翻译： 本发明提供用于制造使用双重侧壁图案化四次半间距浮雕图案化的存储器线和结构的装置，方法和系统。 本发明包括从设置在基板上方的第一模板层形成特征，形成邻近特征的半间距侧壁间隔，通过使用半间距侧壁间隔物作为硬掩模在第二模板层中形成更小的特征，形成四分之一间距侧壁 靠近较小特征的间隔物，并且通过使用四分之一间距侧壁间隔物作为硬掩模，从导体层形成导体特征。 公开了许多附加方面。

公开(公告)号：US08124971B2

公开(公告)日：2012-02-28

申请号：US11731676

申请日：2007-03-30

申请人： Yoichiro Tanaka

发明人： Yoichiro Tanaka

IPC分类号： H01L29/04 ,  H01L29/10 ,  H01L31/036

CPC分类号： H01L27/101 ,  H01L23/5252 ,  H01L2924/0002 ,  H01L2924/00

摘要： One or more diffusion barriers are formed around one or more conductors in a three dimensional or 3D memory cell. The diffusion barriers allow the conductors to comprise very low resistivity materials, such as copper, that may otherwise out diffuse into surrounding areas, particularly at elevated processing temperatures. Utilizing lower resistivity materials allows device dimension to be reduced by mitigating increases in resistance that occur when the size of the conductors is reduced. As such, more cells can be produced over a given area, thus increasing the density and storage capacity of a resulting memory array.

摘要翻译： 在三维或三维存储单元中的一个或多个导体周围形成一个或多个扩散屏障。 扩散阻挡层允许导体包括非常低电阻率的材料，例如铜，其可能会散布到周围区域，特别是在升高的处理温度下。 利用较低电阻率的材料允许通过减少当导体尺寸减小时发生的电阻增加来减小器件尺寸。 因此，可以在给定区域上产生更多的单元，从而增加所得到的存储器阵列的密度和存储容量。

公开(公告)号：US20110095434A1

公开(公告)日：2011-04-28

申请号：US12911887

申请日：2010-10-26

申请人： Roy E. Scheuerlein ,  Yoichiro Tanaka

发明人： Roy E. Scheuerlein ,  Yoichiro Tanaka

IPC分类号： H01L23/48 ,  H01L21/28

CPC分类号： G11C5/06 ,  H01L21/0337 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/101 ,  H01L27/2481 ,  H01L2924/0002 ,  Y10S257/909 ,  H01L2924/00

摘要： The present invention provides apparatus, methods, and systems for fabricating memory lines and structures using double sidewall patterning for four times half pitch relief patterning. The invention includes forming features from a first template layer disposed above a substrate, forming half-pitch sidewall spacers adjacent the features, forming smaller features in a second template layer by using the half-pitch sidewall spacers as a hardmask, forming quarter-pitch sidewall spacers adjacent the smaller features, and forming conductor features from a conductor layer by using the quarter-pitch sidewall spacers as a hardmask. Numerous additional aspects are disclosed.

摘要翻译： 本发明提供用于制造使用双重侧壁图案化四次半间距浮雕图案化的存储器线和结构的装置，方法和系统。 本发明包括从设置在基板上方的第一模板层形成特征，形成邻近特征的半间距侧壁间隔，通过使用半间距侧壁间隔物作为硬掩模在第二模板层中形成更小的特征，形成四分之一间距侧壁 靠近较小特征的间隔物，并且通过使用四分之一间距侧壁间隔物作为硬掩模，从导体层形成导体特征。 公开了许多附加方面。

公开(公告)号：US20070059502A1

公开(公告)日：2007-03-15

申请号：US11511869

申请日：2006-08-29

申请人： Rongjun Wang ,  Hua Chung ,  Xianmin Tang ,  Jenn Wang ,  Wei Wang ,  Yoichiro Tanaka ,  Jick Yu ,  Praburam Gopalraja

发明人： Rongjun Wang ,  Hua Chung ,  Xianmin Tang ,  Jenn Wang ,  Wei Wang ,  Yoichiro Tanaka ,  Jick Yu ,  Praburam Gopalraja

IPC分类号： B32B7/00 ,  B32B3/00 ,  C23C16/00 ,  B05D5/12 ,  C23C14/00

CPC分类号： C23C14/046 ,  C23C14/0641 ,  C23C14/165 ,  H01L21/2855 ,  H01L21/76844 ,  H01L21/76846 ,  H01L21/76873 ,  H01L23/485 ,  H01L23/53238 ,  H01L2924/0002 ,  Y10T428/24917 ,  Y10T428/24926 ,  H01L2924/00

摘要： A fabrication method and a product for the deposition of a conductive barrier or other liner layer in a vertical electrical interconnect structure. One embodiment includes within a a hole through a dielectric layer a barrier layer of RuTaN, an adhesion layer of RuTa, and a copper seed layer forming a liner for electroplating of copper. The ruthenium content is preferably greater than 50 at % and more preferably at least 80 at % but less than 95 at %. The barrier and adhesion layers may both be sputter deposited. Other platinum-group elements substitute for the ruthenium and other refractory metals substitute for the tantalum. Aluminum alloying into RuTa when annealed presents a moisture barrier. Copper contacts include different alloying fractions of RuTa to shift the work function to the doping type.

摘要翻译： 用于在垂直电互连结构中沉积导电屏障或其它衬垫层的制造方法和产品。 一个实施方案包括通过电介质层的孔，RuTaN的阻挡层，RuTa的粘附层和形成铜电镀衬垫的铜籽晶层。 钌含量优选大于50原子％，更优选至少80原子％但小于95原子％。 阻挡层和粘附层可以被溅射沉积。 其他铂族元素代替钌和其他难熔金属代替钽。 当退火时铝合金化成RuTa呈现防潮层。 铜触点包括RuTa的不同合金分数，以将功函数转移到掺杂类型。

公开(公告)号：US20060251872A1

公开(公告)日：2006-11-09

申请号：US11124611

申请日：2005-05-05

申请人： Jenn Wang ,  Wei Wang ,  Ronjun Wang ,  Yoichiro Tanaka ,  Hua Chung ,  Hong Zhang ,  Jick Yu ,  Praburam Gopalraja ,  Jianming Fu

发明人： Jenn Wang ,  Wei Wang ,  Ronjun Wang ,  Yoichiro Tanaka ,  Hua Chung ,  Hong Zhang ,  Jick Yu ,  Praburam Gopalraja ,  Jianming Fu

IPC分类号： B32B3/00

CPC分类号： B32B15/018 ,  C23C14/3414 ,  H01L21/2855 ,  H01L21/76844 ,  H01L23/53238 ,  H01L2924/0002 ,  Y10T428/24917 ,  H01L2924/00

摘要： A fabrication method, a product structure, a fabrication method, and a sputtering target for the deposition of a conductive barrier or other liner layer in an interconnect structure. The barrier layer comprises a conductive metal of a refractory noble metal alloy, such as a ruthenium/tantalum alloy, which may be amorphous though it is not required to be so. The barrier layer may be sputtered from a target of similar composition. The barrier and target composition may be chosen from a combination of the refractory metals and the platinum-group metals as well as RuTa. A copper noble seed layer may be formed of an alloy of copper and ruthenium in contact to a barrier layer over the dielectric.

摘要翻译： 用于在互连结构中沉积导电屏障或其它衬垫层的制造方法，产品结构，制造方法和溅射靶。 阻挡层包括难熔贵金属合金如钌/钽合金的导电金属，其可以是无定形的，尽管不需要这样。 阻挡层可以从类似组成的靶溅射。 阻挡层和靶组成可以选自难熔金属和铂族金属以及RuTa的组合。 铜高贵种子层可以由铜和钌的合金形成，与电介质上的阻挡层接触。

公开(公告)号：US20060012905A1

公开(公告)日：2006-01-19

申请号：US11182065

申请日：2005-07-15

申请人： Takeshi Okino ,  Akira Kikitsu ,  Yoichiro Tanaka ,  Yoshiyuki Kamata

发明人： Takeshi Okino ,  Akira Kikitsu ,  Yoichiro Tanaka ,  Yoshiyuki Kamata

IPC分类号： G11B5/09 ,  G11B5/86

CPC分类号： G11B5/74 ,  B82Y10/00 ,  G11B5/59688 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855 ,  G11B5/865 ,  G11B2005/0029

摘要： A magnetic recording media has a magnetic layer formed on a substrate and includes data regions including a magnetic pattern constituting a recoding track and servo regions including magnetic patterns used as address bits, the data regions and the servo regions being contained in a plane of the magnetic layer. In a case where two magnetic patterns used as address bits on the servo regions corresponding to two adjacent recording tracks are arranged in such a manner that one corner of one of the magnetic patterns is closest to one corner of the other, the corners of the two magnetic patterns are substantially joined together.

摘要翻译： 磁记录介质具有在基板上形成的磁性层，并且包括包括构成记录轨迹的磁图案的数据区域和包括用作地址位的磁图案的伺服区域，数据区域和伺服区域包含在磁性平面中 层。 在与两个相邻的记录磁道对应的伺服区域上用作地址位的两个磁图形被布置成使得一个磁性图案的一个角最靠近另一个的角部的情况下， 磁性图案基本上连接在一起。

公开(公告)号：US06296747B1

公开(公告)日：2001-10-02

申请号：US09602580

申请日：2000-06-22

申请人： Yoichiro Tanaka

发明人： Yoichiro Tanaka

IPC分类号： C23C1434

CPC分类号： C23C14/345 ,  C23C14/35 ,  C23C14/564 ,  H01J37/32633 ,  H01J37/3405 ,  H01J37/3441

摘要： A shield assembly for protecting the walls of a plasma sputter reactor from deposition while allowing high flow of processing gas into the processing space of the reactor without the plasma leaking out of the processing space. The shield assembly is particularly useful for reactive sputtering, for example, of TiN or TaN, in which large amounts of nitrogen need to flow into the chamber. The shield assembly includes a primary shield positioned inside of the chamber sidewalls and protecting the sidewalls and preferably also the bottom wall and sides of the pedestal. Multiple holes are formed in the primary shield to pass gas input through a gas inlet in the chamber walls outside of the primary shield. A baffle shield in positioned inside of the primary shield and covers the holes in the primary shield with a gap between the two shields. The baffle shield extends only partway along the primary shield so that gap communicates with the processing space of the reactor. Preferably, both the primary and baffle shield are grounded to no electric field exists in the gap. The shield assembly is particularly useful for magnetron sputter reactors in which an axial magnetic field is generated parallel to the side portions of the primary shield.

摘要翻译： 一种屏蔽组件，用于保护等离子体溅射反应器的壁免于沉积，同时允许高流量的处理气体进入反应器的处理空间，而不会使等离子体从处理空间泄漏出来。 屏蔽组件对于例如TiN或TaN的反应溅射特别有用，其中大量的氮需要流入室中。 屏蔽组件包括位于室侧壁内侧的主屏蔽件，并且保护底座的侧壁以及优选的底壁和侧壁。 在主屏蔽件中形成多个孔，以使气体输入通过主屏蔽外部的室壁中的气体入口。 挡板屏蔽位于主屏蔽内部，并且覆盖主屏蔽件中的两个屏蔽之间的间隙。 挡板护罩仅沿着主屏蔽部分延伸，使得间隙与反应器的处理空间连通。 优选地，主挡板和挡板两者均接地，而不存在间隙中的电场。 屏蔽组件对于其中平行于主屏蔽的侧部产生轴向磁场的磁控溅射反应器特别有用。

公开(公告)号：US06170323B2

公开(公告)日：2001-01-09

申请号：US08902253

申请日：1997-07-29

申请人： Akihiro Enomoto ,  Masakazu Kobayashi ,  Yoichiro Tanaka

发明人： Akihiro Enomoto ,  Masakazu Kobayashi ,  Yoichiro Tanaka

IPC分类号： G01M1500

CPC分类号： G01R31/007 ,  F02D41/222

摘要： A vehicle meter self-diagnosis apparatus includes cross coil movements 11, 13, 15, and 17, drivers 10, 12, 14, 16, and 18, a driver control circuit 20, a ROM 22 into which indication adjustment information of the cross coil movements 11, 13, 15, and 17 is written, a CPU 8, and a self-diagnosis control circuit section 30 being started by a reset switch 32 for driving the drivers 10, 12, 14, 16, and 18 and diagnosing the cross coil movements 11, 13, 15, and 17.

摘要翻译： 车辆仪表自诊断装置包括交叉线圈移动11,13,15和17，驱动器10,12,14,16和18，驱动器控制电路20，ROM 22，交叉线圈的指示调整信息 写入动作11,13,15和17，由用于驱动驾驶员10,12,14,16和18的复位开关32启动的CPU8和自诊断控制电路部分30，并诊断十字 线圈运动11,13,15和17。

公开(公告)号：US06088181A

公开(公告)日：2000-07-11

申请号：US865184

申请日：1997-05-29

申请人： Yoichiro Tanaka

发明人： Yoichiro Tanaka

IPC分类号： G11B5/00 ,  G11B5/012 ,  G11B5/48 ,  G11B5/49

CPC分类号： B82Y10/00 ,  G11B5/00 ,  G11B5/012 ,  G11B5/4886 ,  G11B2005/0018 ,  G11B5/4907 ,  G11B5/4969

摘要： A magnetic recording/reproducing device comprises a recording head for magnetically recording a signal on a magnetic recording medium along a predetermined track, and a reproducing head member including a spin valve typed magnetoresistive element and bias magnetic applying means, associated with the spin valve typed magnetoresistive element, for applying a bias magnetic field to the spin valve typed magnetoresistive element, the reproducing head member for changing a sensitivity distribution in a track width direction based on a distance between the reproducing head and the recording head, and an angle difference between the direction of the reproducing head and the extending direction of the track.

公开(公告)号：US5995341A

公开(公告)日：1999-11-30

申请号：US170088

申请日：1998-10-13

申请人： Tsutomu Tanaka ,  Tomoko Taguchi ,  Yoichiro Tanaka

发明人： Tsutomu Tanaka ,  Tomoko Taguchi ,  Yoichiro Tanaka

IPC分类号： G11B5/00 ,  G11B5/012 ,  G11B5/10 ,  G11B5/127 ,  G11B5/187 ,  G11B5/48 ,  G11B5/60

CPC分类号： G11B5/012 ,  G11B5/10 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/4886 ,  G11B2005/0029 ,  G11B5/6011

摘要： A magnetic disk drive has a magnetic head for recording or reproducing information on or from a magnetic recording medium. The magnetic recording medium includes a magnetic recording layer for information recording which has magnetic anisotropy in a direction perpendicular to a surface of the recording medium, a soft magnetic under layer under the magnetic recording layer and having soft magnetic properties, and a non-magnetic substrate. The magnetic disk drive records a signal with a skew angle on at least some tracks. A main pole has a size satisfying pL

摘要翻译： 磁盘驱动器具有用于在磁记录介质上记录或再现信息的磁头。 磁记录介质包括用于信息记录的磁记录层，它在与记录介质的表面垂直的方向上具有磁各向异性，在磁记录层下面具有软磁性层，具有软磁特性，以及非磁性基板 。 磁盘驱动器在至少一些轨道上记录具有歪斜角度的信号。 主极具有满足pL <（tP-tWcosθ）/sinθ的尺寸，其中pL是主极在行进方向上的端面的宽度，tW是主极的端面的轨道宽度 极，tP是轨道间距，θ是主极的后缘的倾斜角。