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1.发明授权公开(公告)号：US08980451B2
公开(公告)日：2015-03-17
申请号：US13185880
申请日：2011-07-19
申请人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
发明人： Yoshiyuki Kamata , Kaori Kimura , Takeshi Iwasaki
摘要： According to one embodiment, in a method of manufacturing a magnetic recording medium which is configured such that a ferromagnetic recording part is formed on a substrate in a desired track pattern or a desired bit pattern, a ferromagnetic film is formed on the substrate, and then a mask is formed on the ferromagnetic film, the mask having an opening above a region for isolating the ferromagnetic film between tracks or bits. Subsequently, a B-based gas is radiated on the region of the ferromagnetic film through the opening of the mask, thereby increasing a B content of the region to nonmagnetize the region.
摘要翻译： 根据一个实施例，在制造磁记录介质的方法中，磁记录介质被构造为使得铁磁记录部分以期望的轨迹图案或期望的位图形式形成在基板上，在基板上形成铁磁性膜，然后 在铁磁膜上形成掩模，该掩模在磁道或位之间隔离铁磁膜的区域之上具有开口。 随后，通过打开掩模，在铁磁膜的区域上辐射B基气体，从而增加该区域的B含量以使该区域不磁化。
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公开(公告)号：US08956560B2
公开(公告)日：2015-02-17
申请号：US13423543
申请日：2012-03-19
申请人： Yasuaki Ootera , Yoshiyuki Kamata , Naoko Kihara , Yoshiaki Kawamonzen , Takeshi Okino , Ryosuke Yamamoto , Tomoyuki Maeda , Norikatsu Sasao , Akiko Yuzawa , Takuya Shimada , Hiroyuki Hieda
发明人： Yasuaki Ootera , Yoshiyuki Kamata , Naoko Kihara , Yoshiaki Kawamonzen , Takeshi Okino , Ryosuke Yamamoto , Tomoyuki Maeda , Norikatsu Sasao , Akiko Yuzawa , Takuya Shimada , Hiroyuki Hieda
CPC分类号： B29C33/3857 , G11B5/855
摘要： In one embodiment, a method of manufacturing a mold includes: forming a first layer having an affinity to a second polymer on a substrate having an affinity to a first polymer; forming first and second openings in the first layer; filling a resist in the second openings and hardening the resist to obtain a hardened resist; and forming a second layer containing a block copolymer and causing it to self-assemble.
摘要翻译： 在一个实施方案中，制造模具的方法包括：在对第一聚合物具有亲和性的基材上形成对第二聚合物具有亲和性的第一层; 在第一层中形成第一和第二开口; 在第二开口中填充抗蚀剂并使抗蚀剂硬化以获得硬化抗蚀剂; 并形成含有嵌段共聚物并使其自组装的第二层。
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公开(公告)号：US08916053B2
公开(公告)日：2014-12-23
申请号：US13528348
申请日：2012-06-20
申请人： Yoshiaki Kawamonzen , Yasuaki Ootera , Akiko Yuzawa , Naoko Kihara , Yoshiyuki Kamata , Hiroyuki Hieda , Norikatsu Sasao , Ryosuke Yamamoto , Takeshi Okino , Tomoyuki Maeda , Takuya Shimada
发明人： Yoshiaki Kawamonzen , Yasuaki Ootera , Akiko Yuzawa , Naoko Kihara , Yoshiyuki Kamata , Hiroyuki Hieda , Norikatsu Sasao , Ryosuke Yamamoto , Takeshi Okino , Tomoyuki Maeda , Takuya Shimada
IPC分类号： C03C15/00 , C03C25/68 , C23F1/00 , B44C3/08 , B44C5/04 , B81C1/00 , B44C1/22 , H01L21/033 , G03F7/00 , B41M5/00
CPC分类号： B44C1/227 , B41M5/00 , B81C1/0046 , B81C2201/0153 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/0337 , Y10T156/1041
摘要： A pattern forming method according to an embodiment includes: forming a pattern film on a first substrate, the pattern film having a concave-convex pattern, the pattern film being made of a material containing a first to-be-imprinted agent; forming a material film on a second substrate, the material film containing a second to-be-imprinted agent having a higher etching rate than an etching rate of the first to-be-imprinted agent; transferring the concave-convex pattern of the pattern film onto the material film by applying pressure between the first substrate and the second substrate, with the pattern film being positioned to face the material film, and by curing the second to-be-imprinted agent; detaching the first substrate from the pattern film; and removing the material film by etching, to leave the pattern film on the second substrate.
摘要翻译： 根据实施例的图案形成方法包括：在第一基板上形成图案膜，所述图案膜具有凹凸图案，所述图案膜由包含第一待打印剂的材料制成; 在第二基板上形成材料膜，所述材料膜含有蚀刻速率高于第一待打印剂的蚀刻速率的第二待定印剂; 通过在第一基板和第二基板之间施加压力将图案膜的凹凸图案转印到材料膜上，图案膜定位成面对材料膜，并且通过固化第二待打印剂; 从图案膜分离第一衬底; 并通过蚀刻去除材料膜，以将图案膜留在第二基板上。
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公开(公告)号：US08681454B2
公开(公告)日：2014-03-25
申请号：US13424266
申请日：2012-03-19
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a patterned medium includes depositing a magnetic recording layer and applying an ultraviolet curable resin on both surfaces of a medium substrate, pressing a first resin stamper and a second resin stamper each including patterns of recesses and protrusions, corresponding to a patterned medium, against both surfaces of the medium substrate in such a manner that a direction from a center of the medium substrate toward a center of the first resin stamper is off-oriented from a direction from the center of the medium substrate toward a center of the second resin stamper to imprint the patterns of recesses and protrusions on the ultraviolet curable resin, and irradiating the ultraviolet curable resin with an ultraviolet ray through each of the first and second resin stampers to cure the ultraviolet curable resin.
摘要翻译： 根据一个实施例，一种制造图案化介质的方法包括沉积磁记录层并在介质基板的两个表面上施加紫外线固化树脂，压制每个包括凹凸图案的第一树脂压模和第二树脂压模， 对应于图案化的介质，以介质基板的中心朝向第一树脂压模的中心的方向从介质基板的中心朝向 所述第二树脂压模的中心在所述紫外线固化树脂上印刷凹凸图案，并且通过所述第一和第二树脂印模机中的每一个照射所述紫外线固化树脂以固化所述紫外线固化树脂。
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5.发明授权Method for manufacturing magnetic recording medium and magnetic recording medium 失效磁记录介质和磁记录介质的制造方法公开(公告)号：US08475949B2
公开(公告)日：2013-07-02
申请号：US13236726
申请日：2011-09-20
IPC分类号： G11B5/66
摘要： A magnetic recording medium is presented that includes protruded magnetic patterns formed on a substrate, and a nonmagnetic material filled in recesses between the magnetic patterns in which an oxygen concentration thereof is higher at a surface side than at a substrate side. The nonmagnetic material is at least one selected from the group consisting of Si, SiC, SiC—C, SiOC, SiON, Si3N4, Al, AlxOy, Ti and TiOx.
摘要翻译： 提出了一种磁记录介质，其包括形成在基板上的突出的磁图案，以及填充在表面侧的氧浓度高于基板侧的磁性图案之间的凹部中的非磁性材料。 非磁性材料是选自Si，SiC，SiC-C，SiOC，SiON，Si 3 N 4，Al，Al x O y，Ti和TiO x中的至少一种。
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公开(公告)号：US20130077191A1
公开(公告)日：2013-03-28
申请号：US13537859
申请日：2012-06-29
申请人： TAKESHI OKINO , NAOKO KIHARA , YOSHIYUKI KAMATA
发明人： TAKESHI OKINO , NAOKO KIHARA , YOSHIYUKI KAMATA
IPC分类号： G11B5/82
摘要： A magnetic disk according to an embodiment includes: a plurality of data regions each including a plurality of tracks, each of the tracks being arranged to extend in a circumferential direction; a servo region provided between the data regions, the servo region extending in a radial direction, the servo region including: a plurality of guide patterns each extending in the radial direction; and at least one line of dots arranged by post patterns in the radial direction at least on a side of one of adjacent guide patterns, the post patterns being arranged in the radial direction between the adjacent guide patterns.
摘要翻译： 根据实施例的磁盘包括：多个数据区域，每个数据区域包括多个轨道，每个轨道布置成沿圆周方向延伸; 所述伺服区域设置在所述数据区域之间，所述伺服区域在径向方向上延伸，所述伺服区域包括：多个引导图案，每个引导图案沿径向方向延伸; 以及至少一排点，其至少在相邻引导图案之一的至少一侧的径向上由柱状图案排列，所述柱形图案沿径向布置在相邻的引导图案之间。
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公开(公告)号：US20130075358A1
公开(公告)日：2013-03-28
申请号：US13678303
申请日：2012-11-15
IPC分类号： G11B5/851
摘要： A magnetic recording medium a magnetic recording medium includes a soft magnetic layer formed on a substrate, magnetic patterns made of a protruded ferromagnetic layer separated from each other on the soft magnetic layer, and a nonmagnetic layer formed between the magnetic patterns, a nitrogen concentration therein being higher on a surface side than on a substrate side.
摘要翻译： 一种磁记录介质，磁记录介质包括形成在基板上的软磁性层，在软磁层上彼此分离的突出的铁磁层形成的磁性图案和形成在磁性图案之间的非磁性层，其中的氮浓度 在表面侧比在基板侧高。
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公开(公告)号：US20120177948A1
公开(公告)日：2012-07-12
申请号：US13424266
申请日：2012-03-19
IPC分类号： G11B5/82
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a patterned medium includes depositing a magnetic recording layer and applying an ultraviolet curable resin on both surfaces of a medium substrate, pressing a first resin stamper and a second resin stamper each including patterns of recesses and protrusions, corresponding to a patterned medium, against both surfaces of the medium substrate in such a manner that a direction from a center of the medium substrate toward a center of the first resin stamper is off-oriented from a direction from the center of the medium substrate toward a center of the second resin stamper to imprint the patterns of recesses and protrusions on the ultraviolet curable resin, and irradiating the ultraviolet curable resin with an ultraviolet ray through each of the first and second resin stampers to cure the ultraviolet curable resin.
摘要翻译： 根据一个实施例，一种制造图案化介质的方法包括沉积磁记录层并在介质基板的两个表面上施加紫外线固化树脂，压制每个包括凹凸图案的第一树脂压模和第二树脂压模， 对应于图案化的介质，以介质基板的中心朝向第一树脂压模的中心的方向从介质基板的中心朝向 所述第二树脂压模的中心在所述紫外线固化树脂上印刷凹凸图案，并且通过所述第一和第二树脂印模机中的每一个照射所述紫外线固化树脂以固化所述紫外线固化树脂。
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9.发明申请MANUFACTURING METHOD OF MASTER DISK FOR PATTERNED MEDIUM AND MAGNETIC RECORDING DISK MANUFACTURING METHOD 审中-公开图形磁盘和磁记录磁盘制造方法主磁盘的制造方法公开(公告)号：US20120118853A1
公开(公告)日：2012-05-17
申请号：US13356936
申请日：2012-01-24
CPC分类号： G11B5/855
摘要： According to one embodiment, a method for manufacturing a master disk for discoid patterned medium having a plurality of sectors arranged in a circumferential direction, the plurality of sectors including a recording data portion and a servo data portion that includes a sector identification region having gaps formed in a linear pattern is provided. An imprint master disk having a linear pattern which is common to the sectors before the gaps are formed in the sector identification region and including at least one pattern of the sector is prepared, imprinting is repeated in the circumferential direction by using the imprint master disk to form patterns of a discoid patterned medium on a substrate, and a sector identification pattern is formed in each sector by forming gaps in the linear pattern of each sector identification region among the patterns formed on the substrate.
摘要翻译： 根据一个实施例，一种用于制造具有沿圆周方向布置的多个扇区的盘状图案化介质的母盘的方法，所述多个扇区包括记录数据部分和伺服数据部分，所述伺服数据部分包括形成有间隙的扇区识别区域 提供了线性图案。 准备在扇区识别区域中形成间隙之前的区段共同的线性图案的压印母盘，并且包括扇区的至少一个图案，通过使用压印母盘向周向重复记录 在基板上形成盘状图案化介质的形状图案，并且通过在形成在基板上的图案中的每个扇区识别区域的线性图案中形成间隙，在每个扇区中形成扇区识别图案。
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公开(公告)号：US20120067843A1
公开(公告)日：2012-03-22
申请号：US13064301
申请日：2011-03-16
申请人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
发明人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
IPC分类号： C23F1/02
CPC分类号： H01L21/3086 , B82Y10/00 , G03F7/0002 , G03F7/165 , G03F7/168 , G11B5/743 , G11B5/82 , G11B5/855 , H01L21/0332 , H01L21/0337 , H01L21/3081
摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.
摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。
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