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    Vacuum chamber for flat substrates
    3.
    发明授权
    Vacuum chamber for flat substrates 有权
    真空室用于平面基板

    公开(公告)号：US06332525B1

    公开(公告)日：2001-12-25

    申请号：US09549544

    申请日：2000-04-14

    申请人： Thomas Gebele ,  Gert Rödling

    发明人： Thomas Gebele ,  Gert Rödling

    IPC分类号： B65G1300

    CPC分类号： C23C14/56 ,  C03C17/002

    摘要： A vacuum chamber for flat substrates features transport rollers for transport of the substrates. These transport rollers are held from the sides in bearings and are additionally braced between the bearings by at least one middle bearing. These middle bearings are each located on a plunger which is guided hermetically through an opening in the bottom of the vacuum chamber and is braced against a support underneath the bottom.

    摘要翻译： 用于平坦基板的真空室具有用于输送基板的输送辊。 这些传送辊从轴承的侧面保持，并且通过至少一个中间轴承另外支撑在轴承之间。 这些中间轴承各自位于柱塞上，柱塞被气密地引导通过真空室底部的开口并且被支撑在底部下面的支撑件上。

    LOAD LOCK CHAMBER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR VENTING
    4.
    发明申请
    LOAD LOCK CHAMBER, SUBSTRATE PROCESSING SYSTEM AND METHOD FOR VENTING 审中-公开
    负载锁仓，底板加工系统及其施工方法

    公开(公告)号：US20150179486A1

    公开(公告)日：2015-06-25

    申请号：US14642475

    申请日：2015-03-09

    申请人： Thomas GEBELE ,  Thomas LEIPNITZ ,  Wolfgang BUSCHBECK ,  Stefan BANGERT ,  Ralph LINDENBERG

    发明人： Thomas GEBELE ,  Thomas LEIPNITZ ,  Wolfgang BUSCHBECK ,  Stefan BANGERT ,  Ralph LINDENBERG

    IPC分类号： H01L21/67

    CPC分类号： H01L21/67201 ,  Y10T137/0379

    摘要： A lock chamber for a substrate processing system is provided which includes at least a first conduit adapted to provide an inner portion of the lock chamber in fluid communication with atmospheric pressure or overpressure. Additionally, the lock chamber includes at least a first control valve for controlling a flow rate of the fluid communication of the inner portion of the chamber with the atmospheric pressure or the overpressure, wherein the control valve is adapted to continuously control the flow rate. Furthermore, an according method, a computer program and a computer readable medium adapted for performing the method is provided.

    摘要翻译： 提供了一种用于基板处理系统的锁定室，其包括至少第一导管，其适于提供与大气压力或超压力流体连通的锁定室的内部。 此外，锁定室至少包括第一控制阀，用于控制室内部与大气压或超压力的流体连通的流量，其中控制阀适于连续地控制流量。 此外，提供了一种适用于执行该方法的依据方法，计算机程序和计算机可读介质。

    BACKSIDE COATING PREVENTION DEVICE, COATING CHAMBER COMPRISING A BACKSIDE COATING PREVENTION DEVICE, AND METHOD OF COATING
    5.
    发明申请
    BACKSIDE COATING PREVENTION DEVICE, COATING CHAMBER COMPRISING A BACKSIDE COATING PREVENTION DEVICE, AND METHOD OF COATING 审中-公开
    背面涂层防护装置，包括背面涂层防止装置的涂布室和涂布方法

    公开(公告)号：US20090218214A1

    公开(公告)日：2009-09-03

    申请号：US12177632

    申请日：2008-07-22

    申请人： Andreas SAUER ,  Juergen HENRICH ,  Thomas GEBELE

    发明人： Andreas SAUER ,  Juergen HENRICH ,  Thomas GEBELE

    IPC分类号： C23C14/04

    CPC分类号： C23C14/042 ,  C23C14/56 ,  C23C14/564 ,  C23C16/45519 ,  H01J37/32477 ,  H01J37/32623 ,  H01J37/32761

    摘要： A backside coating prevention device adapted for a coating chamber for coating plate-shaped substrates is provided, said coating chamber being adapted for coating continuously or discontinuously transported plate-shaped substrates, comprising a front wall having a substrate feeding opening and a rear wall having a substrate discharge opening, a coating material source adapted for dispensing coating material into the coating chamber, and a transport system, a front side of the transport system facing the coating material source, the transport system being adapted for continuously or discontinuously transporting a plurality of plate-shaped substrates along a transport path on the front side of the transport system, wherein said backside coating prevention device is adapted for providing a gas barrier at the front side of the transport system and adjacent to the backsides of the plurality of plate-shapes substrates for preventing backside coating of the plate-shaped substrates.

    摘要翻译： 提供一种适用于涂布板状基板的涂布室的背面涂布防止装置，所述涂布室适用于连续地或不连续地传送的板状基材，包括具有基板供给口的前壁和具有基板供给口的后壁 基材排出口，用于将涂料分配到涂布室中的涂料源和运输系统，运送系统的正面与涂料源相对，运输系统适于连续或不连续运送多个板 沿着运输系统前侧的输送路径形成基板，其中所述背面涂层防止装置适用于在输送系统的前侧提供气体屏障并且邻近多个板状基板的背面 用于防止板状基板的背面涂覆。

    Device for coating hollow bodies, in particular plastic bottles, that has a high vaccum region and sluice
    6.
    发明申请
    Device for coating hollow bodies, in particular plastic bottles, that has a high vaccum region and sluice 审中-公开
    用于涂覆具有高真空区域和闸门的中空体，特别是塑料瓶的装置

    公开(公告)号：US20050207874A1

    公开(公告)日：2005-09-22

    申请号：US10848370

    申请日：2004-05-18

    申请人： Klaus Michael ,  Jurgen Henrich ,  Thomas Gebele ,  Helmut Drimm

    发明人： Klaus Michael ,  Jurgen Henrich ,  Thomas Gebele ,  Helmut Drimm

    IPC分类号： B65G49/00 ,  B01J3/02 ,  B65G1/00 ,  B65G47/84 ,  C23C14/56

    CPC分类号： C23C14/566

    摘要： Plastic bottles as well as other hollow bodies are given thin functional layers by means of high vacuum coating devices. The relevant process takes place in high vacuum. The bottles to be coated as well as the coated bottles are inserted into a high vacuum chamber (20) through a sluice, which consists of carrousel drum unit. Due to the difference of pressure in the atmosphere and the high vacuum chamber, carrousel within the drum suffers a displacement or tipping, which makes the sealing of the carrousel with respect to the drum difficult. Hence the invention proposes a sluice system consisting of two sluices (23, 25) of the mentioned type, which are connected with one another by means of an intermediate vacuum chamber (22). It is thus achieved that the load due to the pressure on each drum (3) decreases, so that each sluice (23, 25) functions with lesser tendency to develop faults.

    摘要翻译： 塑料瓶以及其他中空体通过高真空镀膜装置给予薄的功能层。 相关过程在高真空下进行。 待涂覆的瓶子以及涂覆的瓶子通过由转盘筒单元组成的闸门插入高真空室（20）中。 由于大气压力和高真空室的差异，鼓内的转盘具有位移或倾翻，这使得转盘相对于转鼓的密封变得困难。 因此，本发明提出了一种由上述类型的两个闸门（23,25）组成的闸门系统，它们通过中间真空室（22）相互连接。 因此，由于每个鼓（3）上的压力引起的负载减小，使得每个闸（23,25）以较小的发生故障的倾向起作用。

    Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same
    7.
    发明授权
    Multilayer polymeric/inorganic oxide structure with top coat for enhanced gas or vapor barrier and method for making same 失效
    多层聚合物/无机氧化物结构，具有用于增强气体或蒸汽阻挡层的顶涂层及其制造方法

    公开(公告)号：US06808753B2

    公开(公告)日：2004-10-26

    申请号：US10664292

    申请日：2003-09-17

    申请人： Mark Rule ,  Yu Shi ,  Thomas Gebele ,  Helmut Grimm ,  Elisabeth Budke

    发明人： Mark Rule ,  Yu Shi ,  Thomas Gebele ,  Helmut Grimm ,  Elisabeth Budke

    IPC分类号： B05D136

    CPC分类号： C08J7/045 ,  B65D1/0215 ,  Y10T428/1352 ,  Y10T428/1379 ,  Y10T428/1383 ,  Y10T428/139 ,  Y10T428/1393

    摘要： The coated multilayer structure comprising a polymeric base layer, an inorganic oxide gas barrier layer on a surface of the polymeric base layer, and a top coat on the inorganic oxide gas barrier layer, the top coat comprising a soluble compound capable of reducing the permeability of the multilayer structure to gas or vapor. A method for enhancing the gas or vapor barrier properties of a multilayer polymeric/inorganic oxide structure is also disclosed. According to one embodiment, SiOx coated polyethylene terephthalate containers are coated with a gas or vapor barrier enhancing top coat.

    摘要翻译： 该涂覆的多层结构包括聚合物基层，聚合物基层的表面上的无机氧化物气体阻隔层和无机氧化物气体阻隔层上的顶涂层，该顶涂层包含能够降低渗透性的可溶性化合物 多层结构为气体或蒸汽。 还公开了一种用于增强多层聚合物/无机氧化物结构的气体或蒸气阻隔性能的方法。 根据一个实施方案，SiO x涂覆的聚对苯二甲酸乙二醇酯容器涂覆有气体或蒸气阻隔增强顶涂层。

    Lock chamber device for vacuum treatment unit and procedures for its operation
    9.
    发明申请
    Lock chamber device for vacuum treatment unit and procedures for its operation 审中-公开
    用于真空处理单元的锁室装置及其操作程序

    公开(公告)号：US20050217993A1

    公开(公告)日：2005-10-06

    申请号：US11093799

    申请日：2005-03-30

    申请人： Thomas Gebele ,  Jurgen Henrich ,  Manfred Weimann

    发明人： Thomas Gebele ,  Jurgen Henrich ,  Manfred Weimann

    IPC分类号： C03C17/00 ,  C23C14/35 ,  C23C14/54 ,  C23C14/56 ,  C23C16/00

    CPC分类号： C23C14/566 ,  C23C14/56

    摘要： A multistage lock chamber device with at least two lock chambers, a first pump set for evacuating a first lock chamber, and a second pump set for evacuating a second lock chamber. The first pump set (P1) may evacuate both the first and the second lock chamber, or both jointly. The first pump set may also be utilized as a prior pumping stand of the second pump set. Additionally, an integrated third pump set can be utilized as a pre-pumping stand for the second pump set and/or first pump set. Alternately or additionally, the device can include at least one buffer unit, whose buffer volume is being utilized to produce a sudden decline in pressure inside the lock chamber by means of pressure equalization.

    摘要翻译： 一种具有至少两个锁定室的多级锁定室装置，用于抽空第一锁定室的第一泵组和用于抽空第二锁定室的第二泵组。 第一泵组（P1）可以同时排空第一和第二锁定室，或二者共同排空。 第一泵组也可以用作第二泵组的先前泵站。 此外，集成的第三泵组可以用作第二泵组和/或第一泵组的预泵站。 替代地或另外地，装置可以包括至少一个缓冲单元，其缓冲体积被利用以通过压力均衡来产生锁定室内的压力的突然下降。

    Apparatus for the rapid evacuation of a vacuum chamber
    10.
    发明授权
    Apparatus for the rapid evacuation of a vacuum chamber 失效
    用于快速排空真空室的装置

    公开(公告)号：US6004109A

    公开(公告)日：1999-12-21

    申请号：US674535

    申请日：1996-07-02

    申请人： Thomas Gebele ,  Wolfgang Buschbeck

    发明人： Thomas Gebele ,  Wolfgang Buschbeck

    IPC分类号： F04B37/16 ,  B01J3/02 ,  F04B37/14 ,  F04B49/00 ,  F04C28/02 ,  F04B23/08 ,  F04C25/02

    CPC分类号： F04C28/02 ,  F04B37/14 ,  F04B49/007 ,  F04C25/02

    摘要： A first vacuum pump (14) is connected to a vacuum chamber (5) by a primary intake line (13) having a first vacuum valve (4) therein. A second vacuum pump (15) is connected to the output of the first vacuum pump (14) by a connecting line (20) having a second vacuum valve (12) therein. A blowout valve (17) is connected to the connecting line (20) between the first pump (14) and the second valve (12). A secondary intake line (19) having therein a third vacuum valve (13) is connected between the vacuum chamber (5) and the intake of the second vacuum pump (15).

    摘要翻译： 第一真空泵（14）通过其中具有第一真空阀（4）的初级进气管（13）连接到真空室（5）。 第二真空泵（15）通过其中具有第二真空阀（12）的连接管线（20）连接到第一真空泵（14）的输出端。 吹气阀（17）连接到第一泵（14）和第二阀（12）之间的连接管线（20）。 其中具有第三真空阀（13）的次级进气管线（19）连接在真空室（5）和第二真空泵（15）的进气口之间。