公开(公告)号：US20190032194A2

公开(公告)日：2019-01-31

申请号：US15039397

申请日：2014-08-19

申请人： Jose Manuel DIEGUEZ-CAMPO ,  Stefan BANGERT ,  Uwe SCHÜβLER ,  Dieter HAAS

发明人： Jose Manuel DIEGUEZ-CAMPO ,  Stefan BANGERT ,  Uwe SCHÜβLER ,  Dieter HAAS

IPC分类号： C23C14/24 ,  C23C14/04 ,  C23C14/12 ,  H01L51/56

CPC分类号： C23C14/243 ,  C23C14/042 ,  C23C14/12 ,  C23C14/246 ,  C23C14/50 ,  C23C14/56 ,  C23C14/562 ,  C23C14/564 ,  C23C14/566 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： A processing apparatus for processing devices, particularly devices including organic materials therein, is described. The processing apparatus includes a processing vacuum chamber; at least one evaporation source for organic material, wherein the at least one evaporation source includes at least one evaporation crucible, wherein the at least one evaporation crucible is configured to evaporate the organic material, and at least one distribution pipe with one or more outlets, wherein the at least one distribution pipe is in fluid communication with the at least one evaporation crucible; and a maintenance vacuum chamber connected with the processing vacuum chamber, wherein the at least one evaporation source can be transferred from the processing vacuum chamber to the maintenance vacuum chamber and from the maintenance vacuum chamber to the processing vacuum chamber.

公开(公告)号：US20180171466A1

公开(公告)日：2018-06-21

申请号：US15737442

申请日：2015-07-06

申请人： Stefan KELLER ,  Andre BRÜNING ,  Uwe SCHÜßLER ,  Thomas Werner ZILBAUER ,  Stefan BANGERT ,  Applied Materials, Inc.

发明人： Stefan KELLER ,  Andre BRÜNING ,  Uwe SCHÜßLER ,  Thomas Werner ZILBAUER ,  Stefan BANGERT

IPC分类号： C23C14/50 ,  C23C14/34 ,  H01J37/32 ,  H01J37/34 ,  H01M10/052

CPC分类号： C23C14/50 ,  C23C14/34 ,  C23C14/562 ,  C23C14/564 ,  H01J37/32715 ,  H01J37/34 ,  H01M10/052 ,  H01M10/0562

摘要： A carrier for supporting at least one substrate during a sputter deposition process is provided. The carrier includes a carrier body and an insulating portion provided at the carrier body. The insulating portion provides a surface of an electrically insulating material, wherein the surface is configured to face one or more sputter deposition sources during the sputter deposition process.

公开(公告)号：US20170081755A1

公开(公告)日：2017-03-23

申请号：US15126568

申请日：2014-03-21

申请人： Jose Manuel DIEGUEZ-CAMPO ,  Stefan BANGERT ,  Andreas LOPP ,  Uwe SCHÜSSLER ,  Applied Materials, Inc.

发明人： Jose Manuel DIEGUEZ-CAMPO ,  Stefan BANGERT ,  Andreas LOPP ,  Uwe SCHÜSSLER

IPC分类号： C23C14/24 ,  H01L51/00 ,  H01L51/56 ,  C23C14/04 ,  C23C14/56

CPC分类号： C23C14/243 ,  C23C14/042 ,  C23C14/56 ,  H01L51/001 ,  H01L51/0011 ,  H01L51/56

摘要： An evaporation source array for depositing two or more organic materials on a substrate is described. The evaporation source array includes two or more evaporation crucibles, wherein the two or more evaporation crucibles are configured to evaporate the two or more organic materials, two or more distribution pipes with outlets provided along the length of the two or more distribution pipes, wherein a first distribution pipe of the two or more distribution pipes is in fluid communication with a first evaporation crucible of the two or more evaporation crucibles, two or more heat shields, which surround the first distribution pipe, a cooling shield arrangement provided at at least one side of the two or more distribution pipes, wherein the at least one side is the side at which the outlets are provided, and a cooling element provided at or in the cooling shield arrangement for active cooling of the cooling shield arrangement.

公开(公告)号：US20140050865A1

公开(公告)日：2014-02-20

申请号：US14005115

申请日：2011-03-22

申请人： Stefan Bangert ,  Werner Guhr ,  Stefan Keller ,  Michael König

发明人： Stefan Bangert ,  Werner Guhr ,  Stefan Keller ,  Michael König

IPC分类号： C23C16/448

CPC分类号： C23C16/448 ,  C23C16/44

摘要： A coating apparatus (700) is provided including: (i) a vacuum chamber (16) for coating a substrate (12) with coating material heated by a wire (14); and (ii) an actuator system (18) including a motorised drive (20). The actuator system is configured for tensioning the wire (14) during the coating. Furthermore, a method of manufacturing a coated substrate (12) is provided including: (i) tensioning a wire (14) by an actuator system (18) including a motorised drive; and (ii) coating the substrate (12) with a coating material (28), the coating being under vacuum conditions. The coating includes heating at least a portion (14a) of the wire (14) to an operating temperature for inducing a temperature increase in the coating material before the coating material is deposited over substrate (12).

摘要翻译： 提供一种涂覆设备（700），包括：（i）用于通过由导线（14）加热的涂层材料涂覆基底（12）的真空室（16）; 和（ii）包括电动驱动器（20）的致动器系统（18）。 致动器系统构造成在涂覆期间张紧线（14）。 此外，提供一种制造涂覆基板（12）的方法，包括：（i）通过包括电动驱动器的致动器系统（18）张紧导线（14）; 和（ii）用涂料（28）涂覆基材（12），该涂层处于真空条件下。 所述涂层包括将所述金属丝（14）的至少一部分（14a）加热到在所述涂层材料沉积在基底（12）上之前引起涂层材料升温的操作温度。

公开(公告)号：US20110306216A1

公开(公告)日：2011-12-15

申请号：US12817389

申请日：2010-06-17

申请人： Uwe SCHUESSLER ,  Stefan BANGERT ,  Heike LANDGRAF

发明人： Uwe SCHUESSLER ,  Stefan BANGERT ,  Heike LANDGRAF

IPC分类号： H01L21/687 ,  H01L21/02 ,  B05D1/32

CPC分类号： G03F7/707 ,  C23C14/042

摘要： A holding device adapted for holding a mask and a substrate during processing of the substrate is provided. The holding device includes a mask frame adapted for supporting the mask and a substrate carrier adapted for carrying the substrate to be processed. The substrate carrier has at least one recess adapted for receiving the mask frame which holds the mask.

摘要翻译： 提供一种用于在基板的处理期间保持掩模和基板的保持装置。 保持装置包括适于支撑掩模的掩模框架和适于承载待处理基板的基板载体。 衬底载体具有适于接收保持掩模的掩模框架的至少一个凹部。

公开(公告)号：US20110304899A1

公开(公告)日：2011-12-15

申请号：US13139508

申请日：2009-12-01

申请人： Byung-Sung Leo Kwak ,  Dieter Haas ,  Stefan Bangert ,  Nety M. Krishna

发明人： Byung-Sung Leo Kwak ,  Dieter Haas ,  Stefan Bangert ,  Nety M. Krishna

IPC分类号： G02F1/153 ,  B32B37/14 ,  B32B38/10

CPC分类号： B32B17/10981 ,  B32B17/10045 ,  B32B17/10055 ,  B32B17/10513 ,  B32B17/10761 ,  B32B17/10788 ,  E06B3/6722 ,  E06B9/24 ,  E06B2009/2464 ,  G02F1/1533 ,  Y10S359/90 ,  Y10T156/1075 ,  Y10T156/12

摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.

摘要翻译： 描述了制造具有各种尺寸和功能性的可着色的窗玻璃的方法。 该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个电致可着色件中的每一个与所述多个窗玻璃件中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。 层压可能导致可着色的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。 电致色装置是电致变色装置。

公开(公告)号：US20110185561A1

公开(公告)日：2011-08-04

申请号：US12988499

申请日：2008-12-01

申请人： Heike Landgraf ,  Uwe Schüssler ,  Stefan Bangert

发明人： Heike Landgraf ,  Uwe Schüssler ,  Stefan Bangert

IPC分类号： B05C11/00 ,  B23P11/02

CPC分类号： C23C14/042 ,  B05C21/005 ,  C23C14/04 ,  G03F7/12 ,  H05B33/10 ,  Y10T29/49826 ,  Y10T29/49863

摘要： A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.

摘要翻译： 面罩支撑件10包括框架元件20和弹性元件30.弹性元件30固定到框架元件20.弹性元件30是由柔性材料整体形成的部件。 它包括杠杆或臂部分37，其具有从臂部分37的自由端以大约90°的角度延伸的第一接合突出部38。 由薄金属箔制成，以及连接元件42.连接元件42包括用于与弹性元件30的接合突起38接合的接合部分43.掩模41可以附着/拉伸到掩模支撑件10以及 以便从面罩支撑件10舒适地脱离。

公开(公告)号：US07710671B1

公开(公告)日：2010-05-04

申请号：US12333676

申请日：2008-12-12

申请人： Byung-Sung Leo Kwak ,  Dieter Haas ,  Stefan Bangert ,  Nety M. Krishna ,  Winfried Hoffmann

发明人： Byung-Sung Leo Kwak ,  Dieter Haas ,  Stefan Bangert ,  Nety M. Krishna ,  Winfried Hoffmann

IPC分类号： G02F1/15 ,  G02F1/153

CPC分类号： B32B17/10981 ,  B32B17/10045 ,  B32B17/10055 ,  B32B17/10513 ,  B32B17/10761 ,  B32B17/10788 ,  E06B3/6722 ,  E06B9/24 ,  E06B2009/2464 ,  G02F1/1533 ,  Y10S359/90 ,  Y10T156/1075 ,  Y10T156/12

摘要： A method of manufacturing electrically tintable window glass with a variety of sizes and functionalities is described. The method comprises: (a) providing a large format glass substrate; (b) fabricating a plurality of electrically tintable thin film devices on the large format glass substrate; (c) cutting the large format glass substrate into a plurality of electrically tintable pieces, each electrically tintable piece including one of the plurality of electrically tintable thin film devices; (d) providing a plurality of window glass pieces; (e) matching each one of the plurality of electrically tintable pieces with a corresponding one of the plurality of window glass pieces; and (f) laminating each of the matched electrically tintable pieces and window glass pieces. The lamination may result in the electrically tintable device either being sandwiched between the glass substrate and the window glass piece or on the surface of the laminated pieces. The electrically tintable device is an electrochromic device.

摘要翻译： 描述了制造具有各种尺寸和功能性的可着色的窗玻璃的方法。 该方法包括：（a）提供大幅面玻璃基板; （b）在大幅面玻璃基板上制造多个可着色的薄膜装置; （c）将大幅面玻璃基板切割成多个可着色的片，每个可着色的片包括多个可着色的薄膜器件中的一个; （d）提供多个窗玻璃片; （e）将所述多个电致可着色件中的每一个与所述多个窗玻璃件中的相应一个匹配; 和（f）层合每个匹配的可着色件和窗玻璃片。 层压可能导致可着色的装置夹在玻璃基板和窗玻璃片之间或层压片的表面上。 电致色装置是电致变色装置。

公开(公告)号：US20090293909A1

公开(公告)日：2009-12-03

申请号：US12130572

申请日：2008-05-30

申请人： STEFAN BANGERT ,  Jose Manuel Dieguez-Campo ,  Michael Koenig ,  Nety M. Krishna ,  Byung-Sung Leo Kwak

发明人： STEFAN BANGERT ,  Jose Manuel Dieguez-Campo ,  Michael Koenig ,  Nety M. Krishna ,  Byung-Sung Leo Kwak

IPC分类号： B08B7/00 ,  B08B3/12

CPC分类号： C23C14/564

摘要： The invention relates to a cleaning method in which from a vacuum coating chamber (3) of a coating installation (1) for the coating of substrates (2) with alkali- or alkaline earth-metals, residues of alkali- or alkaline earth-metals are removed. For this purpose into the chamber (3) a gas from the group of N2, O2 or air is introduced, which reacts with the alkali- or alkaline earth-metals to form the corresponding solid compounds. Water can additionally be introduced into the vacuum coating chamber (3).After the alkali- or alkaline earth-metals have reacted with the gas, the corresponding solid compound is removed from the vacuum coating chamber.

摘要翻译： 本发明涉及一种清洁方法，其中从用碱性或碱土金属涂覆底物（2）的涂覆装置（1）的真空涂敷室（3），碱金属或碱土金属的残留物 被删除。 为此，在室（3）中，引入来自N2，O2或空气的气体，其与碱金属或碱土金属反应形成相应的固体化合物。 另外可以将水引入真空涂敷室（3）。 碱金属或碱土金属与气体反应后，从真空镀膜室中除去相应的固体化合物。

公开(公告)号：US20090260566A1

公开(公告)日：2009-10-22

申请号：US12244488

申请日：2008-10-02

申请人： Heike Landgraf ,  Uwe Schuessler ,  Stefan Bangert

发明人： Heike Landgraf ,  Uwe Schuessler ,  Stefan Bangert

IPC分类号： B05C11/00

CPC分类号： C23C14/042 ,  B05C21/005 ,  C23C14/04 ,  G03F7/12 ,  H05B33/10 ,  Y10T29/49826 ,  Y10T29/49863

摘要： A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.

摘要翻译： 面罩支撑件10包括框架元件20和弹性元件30.弹性元件30固定到框架元件20.弹性元件30是由柔性材料整体形成的部件。 它包括杠杆或臂部分37，其具有从臂部分37的自由端以大约90°的角度延伸的第一接合突出部38。 由薄金属箔制成，以及连接元件42.连接元件42包括用于与弹性元件30的接合突起38接合的接合部分43.掩模41可以附着/拉伸到掩模支撑件10以及 以便从面罩支撑件10舒适地脱离。