发明申请
- 专利标题： APPARATUS AND METHOD FOR COATING USING A HOT WIRE
- 专利标题（中）： 使用热丝涂装的装置和方法
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申请号： US14005115申请日： 2011-03-22
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公开(公告)号： US20140050865A1公开(公告)日： 2014-02-20
- 发明人: Stefan Bangert , Werner Guhr , Stefan Keller , Michael König
- 申请人： Stefan Bangert , Werner Guhr , Stefan Keller , Michael König
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 国际申请： PCT/EP2011/054365 WO 20110322
- 主分类号： C23C16/448
- IPC分类号： C23C16/448
摘要：
A coating apparatus (700) is provided including: (i) a vacuum chamber (16) for coating a substrate (12) with coating material heated by a wire (14); and (ii) an actuator system (18) including a motorised drive (20). The actuator system is configured for tensioning the wire (14) during the coating. Furthermore, a method of manufacturing a coated substrate (12) is provided including: (i) tensioning a wire (14) by an actuator system (18) including a motorised drive; and (ii) coating the substrate (12) with a coating material (28), the coating being under vacuum conditions. The coating includes heating at least a portion (14a) of the wire (14) to an operating temperature for inducing a temperature increase in the coating material before the coating material is deposited over substrate (12).
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