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公开(公告)号:US12221961B2
公开(公告)日:2025-02-11
申请号:US18545789
申请日:2023-12-19
Applicant: Pfeiffer Vacuum Technology AG
Inventor: Jonas Becker , Jan Hofmann , Sebastian Latta , Heiko Schaefer , Maik Schaefer , Wolfgang Soehngen
Abstract: A vacuum pump in accordance with the invention, in particular a scroll vacuum pump, comprises a first spiral element that has a first wall that extends spirally about a first axis, that extends in an axial direction from a first support, and that has a first free end face facing away from the first support, and a second spiral element that has a second wall that extends spirally about a second axis, that extends in the axial direction from a second support, and that has a second free end face facing away from the second support, wherein the first spiral element and the second spiral element are movable relative to one another and are arranged such that the first wall and the second wall sealingly engage into one another while forming pumping spaces, wherein the free end face of at least one of the walls has a recess, in particular a groove, which extends in a longitudinal direction of the wall and in which at least one seal is movably arranged, and wherein the recess is laterally bounded by at least one inner wall that extends at least sectionally, preferably continuously, obliquely to the axial direction and that is configured to cooperate with a side wall of the seal extending at least sectionally, preferably continuously, obliquely to the axial direction.
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公开(公告)号:US12140146B2
公开(公告)日:2024-11-12
申请号:US17672536
申请日:2022-02-15
Applicant: Leybold GmbH
Inventor: Max Pelikan , Raffaello Ghislotti , Dirk Schiller , Daniel Reinhard
IPC: F04C25/02 , F04B37/14 , F04B41/06 , F04C23/00 , F04C27/02 , F04C28/02 , F04C28/08 , F04B49/06 , F04D17/16 , F04D19/04
Abstract: A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.
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公开(公告)号:US12104597B2
公开(公告)日:2024-10-01
申请号:US17906001
申请日:2021-03-10
Applicant: Atlas Copco Airpower N.V.
Inventor: Andries Desiron , Glenn Vinck
CPC classification number: F04C25/02 , F04C27/02 , F04C29/02 , F04C29/021 , F04C29/026
Abstract: A lubricant recovery system for vacuum pump comprising a reservoir to store lubricant. Supply lines connected to the reservoir wherein the supply line can be connected to the vacuum pump to supply the lubricant to the vacuum pump. Further, a return line is connected to the reservoir to return a lubricant-air mixture from the vacuum pump to the reservoir by the return line. An air filter is disposed inside the reservoir to separate lubricant from the air wherein the filter is connected to a scavenge line which is connectable to a low-pressure region of the vacuum pump such that lubricant separated from the lubricant-air mixture by the air filter is drawn via the scavenge line into the vacuum pump. In accordance to the present invention a valve is disposed in the scavenge line to selectively separate the air filter from the vacuum pump.
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公开(公告)号:US11988211B2
公开(公告)日:2024-05-21
申请号:US17263957
申请日:2019-08-01
Applicant: Leybold GmbH
Inventor: Joeri Coeckelbergs , Vicente Paul Guerrero Lule
CPC classification number: F04C28/08 , F04C25/02 , F04C28/28 , F04C2240/81
Abstract: A vacuum pump includes a housing having an inlet and an outlet, at least one rotor arranged in the housing configured to convey a gaseous medium from the inlet to the outlet, a motor configured to rotate the rotor, a control device connected to the motor configured to control the motor, and at least one sensor connected to the control device. The at least one sensor is configured to sense at least one operating parameter of the vacuum pump. The control device comprises a correlation module. The correlation module is configured to correlate the sensed at least one operating parameter with at least one critical parameter. The motor is controlled on the basis of the at least one critical parameter.
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公开(公告)号:US20240068474A1
公开(公告)日:2024-02-29
申请号:US18552809
申请日:2022-03-29
Applicant: Leybold GmbH
Inventor: Dirk Schiller , Freddy Schoenwald
CPC classification number: F04C28/28 , F04C18/16 , F04C25/02 , F04C29/005 , F04C2240/81 , F04C2270/13 , F04C2270/16
Abstract: A pair of intermeshing gears for multi-shaft vacuum pumps, comprising a first running gear and a second running gear is provided, wherein at least the first running gear comprises a first and a second gearwheel, respectively. The first and the second gearwheel are axially arranged in direct contact, wherein the first gearwheel comprises a predetermined number of first cogs of same dimension and the second gearwheel comprises a predetermined number of second cogs, wherein the predetermined number of second cogs is at least one. All of the predetermined number of first cogs have a dimension larger than the dimension of the predetermined number of second cogs to a predetermined amount. The first gearwheel is made of a material with a first elastic modulus. The second gearwheel is made of a material with a second elastic modulus, wherein the first and the second elastic modulus are different.
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公开(公告)号:US11873814B2
公开(公告)日:2024-01-16
申请号:US17624388
申请日:2020-07-01
Applicant: Gebr. Becker GmbH
Inventor: Stefan Beierlein , Sven Hilfert
IPC: F04C18/344 , F04C28/28 , F04C25/02
CPC classification number: F04C18/3441 , F04C28/28 , F04C25/02 , F04C2240/81 , F04C2270/165 , F04C2270/80
Abstract: The invention relates to a rotary slide assembly and to a method for monitoring the wear of one or more slides in a rotary slide assembly, comprising a rotary slide rotor and one or more slide receiving areas for the slide(s) in the rotary slide rotor. The wear state of the one or more slides is detected during the operation or during a standstill of the rotary slide assembly. For this purpose, the slide(s) or one or more corresponding slide receiving areas in interaction with the one or more slides are used to generate or request an electric or electronic signal.
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公开(公告)号:US20230323878A1
公开(公告)日:2023-10-12
申请号:US17768071
申请日:2020-09-24
Applicant: PFEIFFER VACUUM
Inventor: Laetitia POPIN , Philippe D'HARBOULLE , Igor FORESTIER , Sebastien BARDEL , Emmanuel BEAUJON
CPC classification number: F04C25/02 , F04C18/126 , F04C2220/12 , F04C2230/91 , F04C2230/41
Abstract: A dry vacuum pump has a stator (2) and two rotors (5) that are accommodated in at least one compression chamber (3) of the stator (2), the rotors (5) being configured to rotate synchronously in opposite directions so as to drive a gas to be pumped between an intake and a delivery of the vacuum pump. The rotors (5) and the compression chamber (3) of the stator (2) are coated with a nickel-phosphorus coating (11) comprising between 9% and 14% phosphorus and having a thickness greater than 20 μm, the nickel-phosphorus coating (11) having undergone a hardening heat treatment comprising a step of heating to a treatment temperature greater than 250° C. for a treatment duration greater than one hour, so as to have a hardness greater than 700 HV.
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公开(公告)号:US11773849B2
公开(公告)日:2023-10-03
申请号:US17063912
申请日:2020-10-06
Applicant: PFEIFFER VACUUM GMBH
Inventor: Michael Willig , Jan Hofmann , Jonas Becker , Gernot Bernhardt , Verena Wangorsch , Stefan Kallenborn , Wolfgang Soehngen , Heiko Schaefer , Erhard Harapat , Lars Pauli
CPC classification number: F04C18/0215 , F04C25/02 , F04C29/04 , F04C2220/10 , F04C2270/18
Abstract: The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.
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公开(公告)号:US11746785B2
公开(公告)日:2023-09-05
申请号:US16979852
申请日:2019-03-14
Inventor: Andries Daniel Jozef De Bock
CPC classification number: F04C25/02 , F04C19/004 , F04D17/10 , F04D27/00 , F04D29/083
Abstract: A control system comprising: a suction line; an exhaust line; an operating liquid line; a liquid ring pump comprising a suction input coupled to the suction line, an exhaust output coupled to the exhaust line, and a liquid input coupled to the operating liquid line; a pump configured to pump operating liquid into the liquid ring pump via the operating liquid line and the liquid input; a motor configured to drive the pump; a first sensor configured to measure a first parameter, the first parameter being a parameter of an exhaust fluid of the liquid ring pump; a second sensor configured to measure a second parameter, the second parameter being a parameter of a fluid received by the liquid ring pump; and a controller operatively coupled to the first sensor, the second sensor, and the motor, and configured to control the motor based on sensor measurements of the first sensor and the second sensor. The control system advantageously tends to reduce or eliminate the wear caused by cavitations.
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公开(公告)号:US11668305B2
公开(公告)日:2023-06-06
申请号:US16922062
申请日:2020-07-07
Applicant: PFEIFFER VACUUM GMBH
Inventor: Steffen Herrmann
CPC classification number: F04C25/02 , B01D3/106 , F04B39/16 , F04B53/04 , F04C29/026 , F04C27/001
Abstract: A vacuum device, in particular to a vacuum pump, includes a reservoir for an operating medium; an outlet connector arranged at or in the reservoir; and a selection device that selectively closes or opens the outlet connector or an outlet line, which is connected via the outlet connector to the reservoir, in dependence on whether the operating medium or water is present at the outlet connector.
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