Invention Grant
- Patent Title: Vacuum pump, scroll pump, and manufacturing method for such
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Application No.: US17063912Application Date: 2020-10-06
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Publication No.: US11773849B2Publication Date: 2023-10-03
- Inventor: Michael Willig , Jan Hofmann , Jonas Becker , Gernot Bernhardt , Verena Wangorsch , Stefan Kallenborn , Wolfgang Soehngen , Heiko Schaefer , Erhard Harapat , Lars Pauli
- Applicant: PFEIFFER VACUUM GMBH
- Applicant Address: DE Asslar
- Assignee: PFEIFFER VACUUM GmbH
- Current Assignee: PFEIFFER VACUUM GmbH
- Current Assignee Address: DE Asslar
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: EP 201745 2019.10.07 EP 201749 2019.10.07
- Main IPC: F04C18/02
- IPC: F04C18/02 ; F04C29/04 ; F04C25/02
Abstract:
The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.
Public/Granted literature
- US20210102536A1 VACUUM PUMP, SCROLL PUMP, AND MANUFACTURING METHOD FOR SUCH Public/Granted day:2021-04-08
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