APPARATUS FOR REMOVING DISSOLVED WATER FROM WATER-CONTAINING FLUID AND CHAMBER FOR THE APPARATUS
    5.
    发明申请
    APPARATUS FOR REMOVING DISSOLVED WATER FROM WATER-CONTAINING FLUID AND CHAMBER FOR THE APPARATUS 审中-公开
    用于从装置的含水流体和室中除去溶解的水的装置

    公开(公告)号:US20150343325A1

    公开(公告)日:2015-12-03

    申请号:US14420486

    申请日:2014-05-27

    发明人: Kyung Hoe Koo

    IPC分类号: B01D3/10 C10M175/00 B01D3/42

    摘要: An apparatus for removing dissolved water from a water-containing fluid and a chamber for the same apparatus. The apparatus sprays a water-containing fluid which is a hydrophobic fluid, such as industrial oil in which water is dissolved, into a chamber that maintains a high vacuum pressure of 70 Torr (abs) or lower. The apparatus can effectively remove the dissolved water using a difference in saturated vapor pressure even in a state where a to-be-recycled hydrophobic fluid is heated to a moderate temperature, at which the hydrophobic fluid does not undergo a chemical change. Specifically, the chamber has a dual structure made up of an upper chamber and a lower chamber, thereby maximizing effects of fluid discharge and water removal.

    摘要翻译: 一种用于从含水流体和相同装置的室中除去溶解水的装置。 该装置将作为其中溶解水的疏水性流体(例如工业油)的含水流体喷射到保持70Torr(abs)以下的高真空压力的室内。 即使在被再循环的疏水性流体被加热至中等温度的状态下,即使疏水性流体不发生化学变化,该装置也可以使用饱和蒸气压的差异有效地除去溶解的水。 具体地说,该腔室具有由上部腔室和下部腔室构成的双重结构,从而最大限度地提高流体排放和除水效果。

    SYSTEM AND METHOD FOR RECYCLING HIGH-BOILING-POINT WASTE PHOTORESIST STRIPPER
    7.
    发明申请
    SYSTEM AND METHOD FOR RECYCLING HIGH-BOILING-POINT WASTE PHOTORESIST STRIPPER 有权
    回收高沸点废物光电剥离器的系统和方法

    公开(公告)号:US20140238840A1

    公开(公告)日:2014-08-28

    申请号:US14184159

    申请日:2014-02-19

    申请人: KOREX CORPORATION

    IPC分类号: B01D3/34 B01D3/10

    摘要: This invention relates to a system and method for recycling a high-boiling-point waste photoresist stripper generated in processes of manufacturing LCDs or semiconductor devices, wherein an expensive high-boiling-point stripper solvent can be easily recycled at high yield and high-purity electronic grade. This system includes a first distillation device for removing low-boiling-point impurities, a second distillation device for recycling a stripper solvent composition while removing high-boiling-point impurities, and a third distillation device for removing trace water, thus recovering the stripper solvent composition, and further includes a fourth distillation device for additionally recycling a stripper solvent, thus additionally recovering a high-boiling-point stripper solvent, and this method includes removing low-boiling-point impurities, recycling a stripper solvent composition while removing high-boiling-point impurities, and removing trace water, thus recovering the stripper solvent composition, and further includes additionally recycling a stripper solvent.

    摘要翻译: 本发明涉及一种用于回收在制造LCD或半导体器件的工艺中产生的高沸点废光致抗蚀剂剥离器的系统和方法,其中昂贵的高沸点剥离剂溶剂可以容易地以高产率和高纯度再循环 电子级。 该系统包括用于除去低沸点杂质的第一蒸馏装置,用于再循环剥离剂溶剂组合物同时除去高沸点杂质的第二蒸馏装置和用于除去痕量水的第三蒸馏装置,从而回收汽提溶剂 并且还包括用于另外再循环剥离剂溶剂的第四蒸馏装置,从而另外回收高沸点汽提溶剂,并且该方法包括除去低沸点杂质,循环脱汽剂溶剂组合物同时除去高沸点 - 杂质,并除去痕量水,从而回收汽提剂溶剂组合物,并进一步包括再循环剥离剂溶剂。