发明申请
US20100095890A1 GAS SUPPLY SYSTEM, PUMPING SYSTEM, COATING SYSTEM, GAS SUPPLY METHOD, AND PUMPING METHOD
审中-公开
气体供应系统，抽水系统，涂装系统，气体供应方法和抽水方法
- 专利标题： GAS SUPPLY SYSTEM, PUMPING SYSTEM, COATING SYSTEM, GAS SUPPLY METHOD, AND PUMPING METHOD
- 专利标题（中）： 气体供应系统，抽水系统，涂装系统，气体供应方法和抽水方法
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申请号： US12256091申请日： 2008-10-22
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公开(公告)号： US20100095890A1公开(公告)日： 2010-04-22
- 发明人: Thomas GEBELE , Juergen HENRICH , Thomas LEIPNITZ , Stefan KLEIN
- 申请人： Thomas GEBELE , Juergen HENRICH , Thomas LEIPNITZ , Stefan KLEIN
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： C23C16/54
- IPC分类号： C23C16/54 ; G05D7/06 ; C23C14/34 ; G05D16/20
摘要：
A gas supply system 20 for supplying a gas into a pumping system 10 is provided, the pumping system including a plurality of pumping means 14, 16, the gas supply system comprising a gas inlet 22 and plurality of gas conduits 24, 25 fluidly connected to the gas inlet and each having a gas outlet 27, 28 fluidly connectable to the pumping system 10, wherein the gas outlets of the plurality of gas conduits are in parallel fluidly connectable to the pumping system and each gas conduit is provided with a gradient adjustment means adapted to provide at least one gradient of gas amount supplied to the pumping system.
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