发明授权
- 专利标题: Vacuum chamber for flat substrates
- 专利标题(中): 真空室用于平面基板
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申请号: US09549544申请日: 2000-04-14
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公开(公告)号: US06332525B1公开(公告)日: 2001-12-25
- 发明人: Thomas Gebele , Gert Rödling
- 申请人: Thomas Gebele , Gert Rödling
- 优先权: DE19916666 19990414
- 主分类号: B65G1300
- IPC分类号: B65G1300
摘要:
A vacuum chamber for flat substrates features transport rollers for transport of the substrates. These transport rollers are held from the sides in bearings and are additionally braced between the bearings by at least one middle bearing. These middle bearings are each located on a plunger which is guided hermetically through an opening in the bottom of the vacuum chamber and is braced against a support underneath the bottom.
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