Abstract:
A method of manufacturing a semiconductor device includes forming a first plurality of recessed regions in a substrate, the substrate having a protruded active region between the first plurality of recessed regions and the protruded active region having an upper surface and a sidewall, forming a device isolation film in the first plurality of recessed regions, the device isolation film exposing the upper surface and an upper portion of the sidewall of the protruded active region, and performing a first plasma treatment on the exposed surface of the protruded active region, wherein the plasma treatment is performed using a plasma gas containing at least one of an inert gas and a hydrogen gas in a temperature of less than or equal to about 700.
Abstract:
The present invention relates to a dual zone type air conditioner for vehicles, which includes two air volume controlling doors mounted on an air inflow port of an air-conditioning case where the cross section of an air passageway is uniform and a flow of air is relatively uniform, a sealing wall mounted between the air volume controlling doors, and a controlling part mounted for selecting a more air volume side as a level of a blower when an air volume set by a driver and an air volume set by a passenger are different from each other and controlling the air volume controlling doors to supply the set air volumes to a driver's seat side and a passenger's seat side.
Abstract:
The present invention relates to an air conditioner for a vehicle including a front seat air conditioning unit and a rear seat air conditioning unit. The rear seat air conditioning unit has a rear seat air conditioning casing provided with a rear seat evaporator disposed substantially in the horizontal direction to air flow passages therein, with a rear seat heater core disposed on the upper side of the rear seat evaporator, with rear seat vent outlets and rear seat floor outlets disposed on the upper and lower portions of the exit end thereof for discharging the air flowing to the rear seats of the vehicle, with a bypass flow passage formed along the outer side of the rear seat heater core, with an air mixing area portion where the air passed through the rear seat evaporator is mixed with the air passed through the rear seat heater core, with a rear seat partition wall for dividing the air flow passages into two areas, with first rear seat temperature doors disposed between the rear seat evaporator and the rear seat heater core, and second rear seat temperature doors for opening and closing the lower air flow passage of the rear seat heater core.
Abstract:
The present invention relates to an air conditioner for a vehicle including a front seat air conditioning unit and a rear seat air conditioning unit. The rear seat air conditioning unit has a rear seat air conditioning casing provided with a rear seat evaporator disposed substantially in the horizontal direction to air flow passages therein, with a rear seat heater core disposed on the upper side of the rear seat evaporator, with rear seat vent outlets and rear seat floor outlets disposed on the upper and lower portions of the exit end thereof for discharging the air flowing to the rear seats of the vehicle, with a bypass flow passage formed along the outer side of the rear seat heater core, with an air mixing area portion where the air passed through the rear seat evaporator is mixed with the air passed through the rear seat heater core, with a rear seat partition wall for dividing the air flow passages into two areas, with first rear seat temperature doors disposed between the rear seat evaporator and the rear seat heater core, and second rear seat temperature doors for opening and closing the lower air flow passage of the rear seat heater core.
Abstract:
A substrate treating method may be performed by a plasma treating apparatus. The substrate treating method may include: providing a substrate on a platform in a lower portion of an inner space of a process chamber; directing a first process gas upward from a first nozzle formed at an inner wall of the process chamber into an upper portion of the inner space, the first process gas being an inert gas and wherein the first nozzle is an obliquely upward-oriented nozzle structured to direct the first process gas upward; directing a second process gas downward from a second nozzle formed at a inner wall of the process chamber into a lower portion of the inner space, the second process gas being hydrogen gas and wherein the second nozzle is an obliquely downward-oriented nozzle structured to direct the second process gas downward; and applying a microwave to the upper portion of the inner space to excite the first process gas and the second process gas into plasma, and then processing the substrate.
Abstract:
A heat pump system including a water-cooled type heat exchanger, which is a heat supply means, mounted on a first bypass line bypassing a second indoor heat exchanger to collect waste heat of vehicle electric devices to thereby enhance a heating efficiency of the heat pump system. The heat pump system for a vehicle includes: a branch line for connecting a refrigerant circulation line of the second indoor heat exchanger and the first bypass line with each other; a second bypass line, which bypasses an outdoor heat exchanger; and a control part that controls a flow of the indoor air to be introduced into an air-conditioning case, whereby the heat pump system can minimize influences of the outdoor air of low temperature even when the outdoor temperature is below zero, enhance the operation and the heating performance of the heat pump system by collecting waste heat of the vehicle electric devices and heat sources of the indoor air, and increase the mileage of the vehicle by minimizing operation of an electric heater.
Abstract:
The present invention relates to a cooling and heating cabinet device of a rear seat side for a vehicle using a thermoelectric module that is mounted between rear seats of a vehicle, having cooling and heating functions and further having an arm-resting function irrespective of its activation as the cooling and heating device, and that makes the exhaust fan activated by the control of the controller of the air conditioning system, thereby achieving the air-refreshing function as well as the cooling or heating mode function of the cooling and heating cabinet.
Abstract:
A test vector system (157) and method for generating and verifying test vectors for testing integrated circuit speed paths involves accessing a circuit model (160), a list of circuit paths (162) and a test vector verifier (165). A single circuit path, referred to as a selected path, is selected from the paths (162). Once logical constraints are set, hazard-free logical values and logical values for both the second test clock cycle and the first test clock cycle are justified. Test vectors are generated in response to the justified values and the test vectors are used as input to the test vector verifier. The test verifier produces patterns that provide robust delay path fault tests for the given path. The test patterns are serially shifted and double-clocked in an integrated circuit or electrical circuit manufactured in accordance with circuit model (160) to determine time delay path faults.
Abstract:
A substrate treating method may be performed by a plasma treating apparatus. The substrate treating method may include: providing a substrate on a platform in a lower portion of an inner space of a process chamber; directing a first process gas upward from a first nozzle formed at an inner wall of the process chamber into an upper portion of the inner space, the first process gas being an inert gas and wherein the first nozzle is an obliquely upward-oriented nozzle structured to direct the first process gas upward; directing a second process gas downward from a second nozzle formed at a inner wall of the process chamber into a lower portion of the inner space, the second process gas being hydrogen gas and wherein the second nozzle is an obliquely downward-oriented nozzle structured to direct the second process gas downward; and applying a microwave to the upper portion of the inner space to excite the first process gas and the second process gas into plasma, and then processing the substrate.
Abstract:
Disclosed therein are a heat pump system for a vehicle and a method of controlling the heat pump system, which determines that frosting begins on an exterior heat exchanger and carries out a defrosting control if a difference value between outdoor temperature and refrigerant temperature of an outlet side of the exterior heat exchanger is above a frosting decision temperature in a heat pump mode, thereby increasing frost-prevention and defrosting effects and enhancing heating performance and stability of the system because the system recognizes the beginning of frosting on the exterior heat exchanger at a proper time so as to carry out the defrosting control.