Large-area bulk gallium nitride wafer and method of manufacture
    2.
    发明授权
    Large-area bulk gallium nitride wafer and method of manufacture 有权
    大面积块状氮化镓晶圆及其制造方法

    公开(公告)号:US08048225B2

    公开(公告)日:2011-11-01

    申请号:US12556562

    申请日:2009-09-09

    IPC分类号: C30B21/04

    摘要: The present invention includes a high-quality, large-area bulk GaN seed crystal for ammonothermal GaN growth and method for fabricating. The seed crystal is of ultra-low defect density, has flat surfaces free of bowing, and is free of foreign substrate material. The seed crystal is useful for producing large-volume, high-quality bulk GaN crystals by ammonothermal growth methods for eventual wafering into large-area GaN substrates for device fabrication.

    摘要翻译: 本发明包括用于氨热GaN生长的高质量,大面积体积GaN晶种及其制造方法。 晶种具有超低缺陷密度,具有无弯曲的平坦表面,并且不含异物基材。 晶种可用于通过氨热生长方法生产大容量,高质量的体GaN晶体,用于最终晶片化成用于器件制造的大面积GaN衬底。