Invention Grant
- Patent Title: Method of fabricating optical devices using laser treatment of contact regions of gallium and nitrogen containing material
- Patent Title (中): 使用激光处理含镓和氮的材料的接触区域制造光学器件的方法
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Application No.: US13291922Application Date: 2011-11-08
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Publication No.: US08975615B2Publication Date: 2015-03-10
- Inventor: Andrew Felker , Nicholas A. Vickers , Rafael Aldaz , David Press , Nicholas J. Pfister , James W. Raring , Mathew C. Schmidt , Kenneth John Thomson
- Applicant: Andrew Felker , Nicholas A. Vickers , Rafael Aldaz , David Press , Nicholas J. Pfister , James W. Raring , Mathew C. Schmidt , Kenneth John Thomson
- Applicant Address: US CA Goleta
- Assignee: Soraa Laser Diode, Inc.
- Current Assignee: Soraa Laser Diode, Inc.
- Current Assignee Address: US CA Goleta
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L33/06
- IPC: H01L33/06 ; H01L33/20 ; B82Y20/00 ; H01S5/042 ; H01S5/22 ; H01S5/32 ; H01L33/00 ; H01S5/02 ; H01S5/028 ; H01S5/343
Abstract:
A method for forming optical devices includes providing a gallium nitride substrate having a crystalline surface region and a backside region. The backside is subjected to a laser scribing process to form scribe regions. Metal contacts overly the scribe regions.
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