公开(公告)号：US20160126059A1

公开(公告)日：2016-05-05

申请号：US14991507

申请日：2016-01-08

Applicant: FEI Company

Inventor： Marcus Straw ,  Mark Emerson

IPC: H01J37/304 ,  H01J37/305

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

公开(公告)号：US09310596B2

公开(公告)日：2016-04-12

申请号：US13638981

申请日：2011-04-06

Applicant: Kuniaki Nagayama ,  Yoshihiro Arai ,  Hirofumi Iijima ,  Susumu Terakawa

Inventor： Kuniaki Nagayama ,  Yoshihiro Arai ,  Hirofumi Iijima ,  Susumu Terakawa

IPC: G02B21/00 ,  H01J37/28 ,  H01J37/22 ,  H01J37/26 ,  G02B21/36

CPC classification number: G02B21/0076 ,  G02B21/0032 ,  G02B21/365 ,  H01J37/228 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/045 ,  H01J2237/2608

Abstract: A compound microscope device allows simultaneous observation of one specimen by a transmission electron microscope and an optical microscope. The compound microscope device 1 of the present invention has a transmission electron microscope 2 and an optical microscope 4. A specimen 10 and a reflection mirror 41 are disposed on an electron optical axis C of an electron ray. The reflection mirror 41 is inclined from the electron optical axis C toward the optical object lens 43 and the specimen 10. Light from the specimen 10 (fluorescent light, reflection light, and the like) is reflected by the reflection mirror 41 and enters into the optical object lens 43. The electron ray from the electron microscope 2 passes through a mounting center hole 42 of the reflection mirror 41. This makes it possible to observe one specimen simultaneously by the electron microscope 2 and the optical microscope 4.

Abstract translation: 复合显微镜装置允许通过透射电子显微镜和光学显微镜同时观察一个样品。 本发明的复合显微镜装置1具有透射电子显微镜2和光学显微镜4.试样10和反射镜41配置在电子射线的电子光轴C上。 反射镜41从电子光轴C朝向光学物镜43和样本10倾斜。来自样本10的光（荧光，反射光等）被反射镜41反射并进入 光学物镜43.来自电子显微镜2的电子射线通过反射镜41的安装中心孔42.这样可以通过电子显微镜2和光学显微镜4同时观察一个样本。

公开(公告)号：US09277635B2

公开(公告)日：2016-03-01

申请号：US14643782

申请日：2015-03-10

Applicant: GIGAPHOTON INC.

Inventor： Masato Moriya ,  Hideyuki Hayashi ,  Osamu Wakabayashi

IPC: H01G2/00 ,  H05G2/00 ,  H01J37/22 ,  H01J37/304

CPC classification number: H05G2/008 ,  H01J37/228 ,  H01J37/3045 ,  H01J2237/20292 ,  H05G2/005 ,  H05G2/006

Abstract: An extreme ultraviolet light generation device may comprise: a chamber provided with a through-hole; an introduction optical system configured to introduce the pulse laser beam into a first predetermined region inside the chamber through the through-hole; a target supply device configured to output the target toward the first predetermined region; a light source configured to irradiate a second predetermined region with light whose optical path in the second predetermined region has a transverse section that is longer along a direction perpendicular to a direction of movement of the target than along the direction of movement of the target, the second predetermined region including part of a trajectory of the target between the target supply device and the first predetermined region; and an optical sensor configured to detect light incident on the optical sensor from the second predetermined region to detect the target passing through the second predetermined region.

Abstract translation: 极紫外线发生装置可以包括：设置有通孔的室; 导入光学系统，被配置为通过所述通孔将所述脉冲激光束引入所述腔室内的第一预定区域; 目标供给装置，被配置为朝向所述第一预定区域输出所述目标; 光源，被配置为用第二预定区域的光线照射第二预定区域中的光路，沿着与目标的移动方向垂直的方向的垂直于目标的移动方向的横向部分具有横向部分， 所述第二预定区域包括所述目标供给装置和所述第一预定区域之间的所述目标的轨迹的一部分; 以及光学传感器，被配置为从所述第二预定区域检测入射在所述光学传感器上的光，以检测通过所述第二预定区域的目标。

公开(公告)号：US20150279616A1

公开(公告)日：2015-10-01

申请号：US14667292

申请日：2015-03-24

Applicant: TESCAN ORSAY HOLDING, a.s. ,  WITec GmbH

Inventor： Jaroslav Jiruse ,  Olaf Hollricher ,  Martin Hanicinec

IPC: H01J37/28 ,  G01Q30/02 ,  H01J37/18 ,  G01N21/65 ,  H01J37/20

CPC classification number: H01J37/28 ,  G01J3/44 ,  G01N21/65 ,  G01N2201/061 ,  G01N2201/068 ,  G01Q30/025 ,  H01J37/18 ,  H01J37/20 ,  H01J37/226 ,  H01J37/228 ,  H01J37/26 ,  H01J2237/024 ,  H01J2237/063 ,  H01J2237/08 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2583 ,  H01J2237/2801 ,  H01J2237/2802

Abstract: A system uses number of analytical devices such as an electron microscope a Raman microscope, an ion beam column and a scanning probe microscope for sample analysis concurrent, consecutive or with the mutual correlation of the analysis performed by the different devices in the same sample area using the connection of the Raman microscope optical objective lens and objective manipulator, that significantly reduces time needed for analyzing by Raman microscope together with other devices and maintains high quality of the sensed signals comparable to stand alone analytical devices.

Abstract translation: 系统使用电子显微镜，拉曼显微镜，离子束柱和扫描探针显微镜等分析装置的数量，并行，连续或与相同样品区域中的不同装置进行的分析的相互关联，使用 拉曼显微镜光学物镜和物镜操纵器的连接，显着缩短了拉曼显微镜与其他设备一起分析所需的时间，并保持与独立分析设备相当的感测信号的高质量。

公开(公告)号：US08766213B2

公开(公告)日：2014-07-01

申请号：US13607329

申请日：2012-09-07

Applicant: Marcus Straw ,  Mark Emerson

Inventor： Marcus Straw ,  Mark Emerson

IPC: H01J37/00

CPC classification number: H01J37/3045 ,  G21K5/00 ,  G21K5/08 ,  H01J37/226 ,  H01J37/228 ,  H01J37/3056 ,  H01J2237/1501 ,  H01J2237/28

Abstract: A method and apparatus for aligning a laser beam coincident with a charged particle beam. The invention described provides a method for aligning the laser beam through the center of an objective lens and ultimately targeting the eucentric point of a multi-beam system. The apparatus takes advantage of components of the laser beam alignment system being positioned within and outside of the vacuum chamber of the charged particle system.

Abstract translation: 用于对准与带电粒子束一致的激光束的方法和装置。 所描述的本发明提供了一种通过物镜的中心对准激光束并最终瞄准多光束系统的中心点的方法。 该装置利用激光束对准系统的部件位于带电粒子系统的真空室内和外部。

公开(公告)号：US08648301B2

公开(公告)日：2014-02-11

申请号：US13623829

申请日：2012-09-20

Applicant: Carl Zeiss Microscopy Ltd.

Inventor： Stewart Bean ,  Michael Robert Astley

IPC: H01J37/28

CPC classification number: H01J37/226 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.

Abstract translation: 一种系统包括粒子光学系统和光敏检测器。 粒子光学系统包括带电粒子束源和物镜。 带电粒子束源被配置为产生沿着粒子束路径行进的带电粒子束，并且物镜被配置为将粒子束聚焦到粒子光学系统的物平面上。 该系统被配置为使得系统的光束路径从物平面延伸到光敏检测器。

公开(公告)号：US08618479B2

公开(公告)日：2013-12-31

申请号：US13152331

申请日：2011-06-03

Applicant: Mitsuhiro Kashihara

Inventor： Mitsuhiro Kashihara

IPC: G01N23/00

CPC classification number: H01J37/28 ,  G02B21/0004 ,  G02B21/26 ,  H01J37/023 ,  H01J37/16 ,  H01J37/226 ,  H01J37/228 ,  H01J2237/20235

Abstract: Observation fields of an electron microscope image and an optical magnifying observation image are smoothly switched. A magnifying observation apparatus includes: a pair of end-face plates closes end faces of a body portion; an electron beam imaging device mounted on a first position of a cylindrical shaped outer surface of the body portion; an optical imaging device mounted on a second position being different from the first position in the outer surface; a rotating device that rotates the both imaging devices along the outer surface such that a distance from each of the both imaging devices to a common rotation axis of the both imaging devices is kept constant and optical axes of the both imaging devices are oriented toward the rotation axis; a specimen stage that is disposed in the chamber, and arranged to a position that is substantially the same to a height of the rotation axis.

Abstract translation: 平滑地切换电子显微镜图像和光学放大观察图像的观察场。 放大观察装置包括：一对端面板封闭主体部分的端面; 安装在所述主体部分的圆柱形外表面的第一位置上的电子束成像装置; 安装在与外表面中的第一位置不同的第二位置的光学成像装置; 旋转装置，其使两个成像装置沿着外表面旋转，使得从两个成像装置中的每一个到两个成像装置的公共旋转轴线的距离保持恒定，并且两个成像装置的光轴朝向旋转 轴; 所述试样台设置在所述室内，并配置在与所述旋转轴的高度大致相同的位置。

公开(公告)号：US08513604B2

公开(公告)日：2013-08-20

申请号：US12925704

申请日：2010-10-27

Applicant: Christian Thomas ,  Lucian Stefan

Inventor： Christian Thomas ,  Lucian Stefan

IPC: G01J1/00

CPC classification number: H01J37/244 ,  G01N23/2254 ,  G01N2223/612 ,  H01J37/20 ,  H01J37/226 ,  H01J37/228 ,  H01J2237/2445 ,  H01J2237/2808

Abstract: A detection device and a particle beam device having a detection device ensure a good efficiency in detecting interaction particles and electromagnetic radiation. The detection device has a detector for detecting electromagnetic radiation and/or interaction particles and a filter element through which the electromagnetic radiation is transmitted. The filter element prevents the interaction particles from striking the detector such that the filter element is situated to move between a first position and a second position, the filter element in the first position being situated in relation to the detector in such a way that the filter element prevents the interaction particles from striking the detector. The filter element in the second position is situated in relation to the detector in such a way that the filter element allows the interaction particles to strike the detector. As an alternative, the filter element may be an object holder.

Abstract translation: 具有检测装置的检测装置和粒子束装置确保检测相互作用粒子和电磁辐射的良好效率。 检测装置具有用于检测电磁辐射和/或相互作用颗粒的检测器和通过其传送电磁辐射的过滤元件。 过滤器元件防止相互作用的颗粒撞击检测器，使得过滤元件位于第一位置和第二位置之间，第一位置中的过滤元件相对于检测器位于与检测器相关的位置，使得过滤器 元件防止相互作用的颗粒撞击检测器。 处于第二位置的过滤元件以与检测器相关的方式定位，使得过滤元件允许相互作用的颗粒撞击检测器。 作为替代，过滤元件可以是物体保持器。

公开(公告)号：US08481932B2

公开(公告)日：2013-07-09

申请号：US13433362

申请日：2012-03-29

Applicant: Yoshihiro Anan ,  Masanari Koguchi

Inventor： Yoshihiro Anan ,  Masanari Koguchi

IPC: H01J37/26

CPC classification number: H01J37/228 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/2445 ,  H01J2237/24485

Abstract: In a charged particle beam analyzer irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample, two or more X-ray lenses configured in different manners are provided in the vacuum container. This no longer requires air opening in the vacuum container following X-ray lens replacement and also no longer requires vacuuming, making it possible to perform analysis with high efficiency and high sensitivity.

Abstract translation: 在带电粒子束分析仪中将带电粒子束照射到真空容器中的样品并检测从样品产生的X射线以分析样品，在真空容器中设置两个或更多个以不同方式配置的X射线透镜 。 这不再需要X射线透镜更换后的​​真空容器中的开口，也不再需要抽真空，可以以高效率和高灵敏度进行分析。

公开(公告)号：US08440969B2

公开(公告)日：2013-05-14

申请号：US13196240

申请日：2011-08-02

Applicant: Thomas M. Moore ,  Cheryl Hartfield ,  Gregory A. Magel

Inventor： Thomas M. Moore ,  Cheryl Hartfield ,  Gregory A. Magel

IPC: H01J37/22 ,  H01J37/26

CPC classification number: H01J37/28 ,  G01N23/2251 ,  G01N2223/10 ,  G01N2223/418 ,  G02B21/002 ,  G02B21/367 ,  H01J37/228 ,  H01J2237/2445

Abstract: This disclosure relates to a method and apparatus for producing multiple pixel-by-pixel simultaneous and overlapping images of a sample in a microscope with multiple imaging beams. A scanning electron microscope, a focused ion-beam microscope, or a microscope having both beams, also has an optical microscope. A region of interest on a sample is scanned by both charged-particle and optical beams, either by moving the sample beneath the beams by use of a mechanical stage, or by synchronized scanning of the stationary sample by the imaging beams, or by independently scanning the sample with the imaging beams and recording imaging signals so as to form pixel-by-pixel simultaneous and overlapping images.

Abstract translation: 本公开涉及一种用于在具有多个成像光束的显微镜中产生样品的多个逐像素同时和重叠图像的方法和装置。 扫描电子显微镜，聚焦离子束显微镜或具有两个光束的显微镜也具有光学显微镜。 通过使用机械平台将样品移动到光束下方，或者通过成像光束对静止样品进行同步扫描，或者通过独立扫描，通过带电粒子和光束两者来扫描样品上的感兴趣区域 具有成像光束的样本和记录成像信号，以便形成逐像素同时和重叠的图像。