摘要:
A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes patterning a wiring layer to form at least one fixed plate and forming a sacrificial material on the wiring layer. The method further includes forming an insulator layer of one or more films over the at least one fixed plate and exposed portions of an underlying substrate to prevent formation of a reaction product between the wiring layer and a sacrificial material. The method further includes forming at least one MEMS beam that is moveable over the at least one fixed plate. The method further includes venting or stripping of the sacrificial material to form at least a first cavity.
摘要:
A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes forming a beam structure and an electrode on an insulator layer, remote from the beam structure. The method further includes forming at least one sacrificial layer over the beam structure, and remote from the electrode. The method further includes forming a lid structure over the at least one sacrificial layer and the electrode. The method further includes providing simultaneously a vent hole through the lid structure to expose the sacrificial layer and to form a partial via over the electrode. The method further includes venting the sacrificial layer to form a cavity. The method further includes sealing the vent hole with material. The method further includes forming a final via in the lid structure to the electrode, through the partial via.
摘要:
A method and system for an acoustic wave band reject filter are disclosed. According to one aspect, an acoustic wave band reject filter includes a substrate and a plurality of acoustic wave band reject filter blocks. The substrate includes bonding pads formed on the substrate. Each one of the plurality of acoustic wave band reject filter blocks is fixed on a separate die. Each separate die has solder balls on a side of the die facing the substrate. The solder balls are positioned to electrically connect the bonding pads formed on the substrate to positions on each of the die.
摘要:
A portable device for treating the bites or stings of insects and harmful creatures, comprising a monolithic containing body made in a single piece and defining an internal housing space, a piezoelectric element configured for producing a predetermined difference in electrical potential, and an actuating element operable by a user and associated with said piezoelectric element to impart to the piezoelectric element a predetermined state of stress/deformation; the actuating element, the piezoelectric element and the discharge area are aligned along the operating axis. The monolithic containing body presenting a bottom part developing along the operating axis below a guide and housing portion, the bottom part defining part of the internal housing space with an overall span orthogonal to the operating axis which is constantly smaller than an overall span of the internal housing space defined by the guide and housing portion.
摘要:
Methods of manufacturing a haptic device having a compliant suspension element. Segments of piezo material are coupled to at least one surface of at least one compliant suspension element, and the at least one suspension element is coupled to a touch screen component. The at least one suspension element is also coupled to a housing component. The segments of piezo material are configured to produce a force that moves the touch screen component relative to the housing component and thereby provide a haptic effect to a user of the touch screen component. In reaction to the force produced by the segments of piezo material, the at least one suspension element is configured to allow movement of the touch screen component relative to the housing component in a first direction and to limit movement between the touch screen component and the housing component in at least a second direction.
摘要:
A piezoelectric actuator includes one piezoelectric layer, a common electrode disposed on the lower surface of the piezoelectric layer and individual electrodes disposed on the upper surface of the piezoelectric layer. In the piezoelectric layer, a plurality of metal patterns arranged at regular intervals in the conveyance direction and in a direction orthogonal to the conveyance direction and overlapping with pressure chambers are provided substantially at the central part in the direction of the thickness. The metal patterns are not electrically continuous with each other and not electrically continuous with other parts. The metal patterns situated outermost in the conveyance direction are disposed so as to cross the edge of the pressure chamber. Some metal patterns overlap with the individual electrode and the other metal patterns do not overlap with the individual electrode.
摘要:
Provided are a piezoelectric thin film having good piezoelectricity in which a rhombohedral structure and a tetragonal structure are mixed, and a piezoelectric element using the piezoelectric thin film. The piezoelectric thin film includes a perovskite type metal oxide, in which the perovskite type metal oxide is a mixed crystal system of at least a rhombohedral structure and a tetragonal structure, and a ratio between an a-axis lattice parameter and a c-axis lattice parameter of the tetragonal structure satisfies 1.15≦c/a≦1.30. The piezoelectric element includes on a substrate: the above-mentioned piezoelectric thin film; and a pair of electrodes provided in contact with the piezoelectric thin film.
摘要:
An elastic wave device includes a supporting substrate, a high-acoustic-velocity film stacked on the supporting substrate and in which an acoustic velocity of a bulk wave propagating therein is higher than an acoustic velocity of an elastic wave propagating in a piezoelectric film, a low-acoustic-velocity film stacked on the high-acoustic-velocity film and in which an acoustic velocity of a bulk wave propagating therein is lower than an acoustic velocity of a bulk wave propagating in the piezoelectric film, the piezoelectric film is stacked on the low-acoustic-velocity film, and an IDT electrode stacked on a surface of the piezoelectric film.
摘要:
A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.
摘要:
Disclosed herein is an active roughness actuator and a method of forming an active roughness actuator. The active roughness actuator includes a surface having at least one aperture; a compliant layer disposed on the surface such that the compliant layer covers the at least one aperture; a chamber having a fluid therein and a piezoelectric surface mechanically coupled to the chamber. The chamber is in fluid communication with the compliant layer via the at least one aperture. The piezoelectric surface is configured to displace the fluid in the chamber to control production of at least one dimple in the compliant layer proximate to the at least one aperture.