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公开(公告)号：US12094675B2
公开(公告)日：2024-09-17
申请号：US17631077
申请日：2020-07-28
CPC分类号： H01H59/0009 , H01H1/0036 , H01H2001/0084
摘要： Various embodiments include an arrangement comprising a plurality of MEMS switches with movable elements. The plurality of MEMS switches are connected to one another in a total-cross-tied configuration.
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公开(公告)号：US12091313B2
公开(公告)日：2024-09-17
申请号：US17000634
申请日：2020-08-24
CPC分类号： B81B7/02 , B81B3/0021 , B81B7/0022 , B81B7/008 , H02N2/181 , H02N2/186 , H01H59/0009
摘要： A microelectromechanical actuator, comprising: a substrate, having a surface; a conductive beam suspended parallel to the substrate, displaceable along an axis normal to the surface of the substrate; a center electrode on the substrate under the beam; a pair of side electrodes on the substrate configured, when charged, to exert an electrostatic force normal to the surface of the substrate on the beam that repulses the beam from the substrate, and exerts a balanced electrostatic force on the beam in a plane of the surface of the substrate, the center conductive electrode being configured to shield the beam from electrostatic forces induced by the side electrodes from beneath the beam, and the center electrode being configured to have a voltage different from a voltage on the beam, to thereby induce an attractive electrostatic force on the beam.
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公开(公告)号：US20240274388A1
公开(公告)日：2024-08-15
申请号：US18168959
申请日：2023-02-14
发明人： Adam Fruehling , Scott Summerfelt
IPC分类号： H01H59/00
CPC分类号： H01H59/0009 , H01H2203/02 , H01H2205/004
摘要： An apparatus includes a semiconductor structure having a cavity. The apparatus also includes a first electrical terminal on a first cavity side, a second electrical terminal on a second cavity side, and the second electrical terminal including an extension that overlaps part of the cavity. The apparatus also includes a bendable beam extending from the first cavity side and overlapping at least part of the extension. The apparatus also includes an actuator in a periphery of the beam, the actuator configured to generate a fringing electric field that causes the second beam side to move towards the extension in a direction different from the fringing electric field and bend the beam.
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公开(公告)号：US20240128032A1
公开(公告)日：2024-04-18
申请号：US18394444
申请日：2023-12-22
发明人： Pallab Midya , Yan-Fei Liu , Chris Giovanniello , Peter Maimone , Mohammed Agamy
CPC分类号： H01H1/0036 , H01H59/0009 , H01H71/08 , H01H2071/008
摘要： A switch device may comprise a micro-relay disposed between a first terminal and a second terminal. The micro-relay may be configured to selectively electrically couple the first terminal to the second terminal. The switch device may further comprise a bypass circuit configured to selectively divert at least a portion of electrical current flowing from the first terminal to the micro-relay, and direct the diverted electrical current to the second terminal. The switch device may further comprise an energy harvesting circuit configured to (i) withdraw a portion of energy flowing into the switch device, (ii) store the portion of energy in an energy storage device, and (iii) supplying the energy stored in the energy storage device to one or more components within the switch device.
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公开(公告)号：US11728116B2
公开(公告)日：2023-08-15
申请号：US16907161
申请日：2020-06-19
申请人： Qorvo US, Inc.
CPC分类号： H01H59/0009 , H01P1/12
摘要： An electrical arrangement for performing radio frequency isolation for microelectromechanical relay switches. A microelectromechanical relay switch comprises a beam configured to switch from a first position connected to an upper voltage source to a second position connected to a lower voltage source. The microelectromechanical relay switch further comprises at least one frequency isolation circuit or resistor disposed adjacent to the beam. The at least one frequency isolation circuit or resistor biases a direct current potential to allow for electrostatic actuation and further provides a path for transient electrical currents during switching.
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公开(公告)号：US20230064520A1
公开(公告)日：2023-03-02
申请号：US18046774
申请日：2022-10-14
发明人： Andrew Minnick , Christopher F. Keimel , Xu Zhu
IPC分类号： H01H1/0237 , H01H49/00 , H01H59/00 , H01L21/00
摘要： A method of fabricating and packaging an ohmic micro-electro-mechanical system (MEMS) switch device may comprise constructing the switch device on an insulating substrate. The switch device may have contacts that consist of a platinum-group metal. The method may further comprise forming an oxidized layer of the platinum-group metal on an outer surface of each of the one or more contacts. The method may further comprise bonding an insulating cap to the insulating substrate, to hermetically seal the switch device. The bonding may occur in an atmosphere that has a proportion of oxygen within a range of 0.5% to 30%, such that, after the switch device has been hermetically sealed within the sealed cavity, an atmosphere within the sealed cavity has a proportion of oxygen within the range of 0.5% to 30%. The platinum-group metal may be ruthenium, and the oxidized layer of the platinum-group metal may be ruthenium dioxide.
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公开(公告)号：US11527376B2
公开(公告)日：2022-12-13
申请号：US16521682
申请日：2019-07-25
申请人： Kionix, Inc.
发明人： Scott A. Miller , Nicole Kerness , Randy Phillips , Sangtae Park , Martin Heller , Mizuho Okada , Andrew Hocking , Wenting Gu
摘要： A micro-electromechanical system (MEMS) device includes a substrate and a beam suspended relative to a surface of the substrate. The substrate includes a buried insulator layer and a cavity. The beam includes a first portion and a second portion that are separated by an isolation joint. The cavity separates the surface of the substrate from the beam.
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公开(公告)号：US11342149B2
公开(公告)日：2022-05-24
申请号：US16131750
申请日：2018-09-14
发明人： Michel Despont
摘要： The present invention provides an integrated electro-mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic actuator gap between actuator electrodes and an electrical contact gap between contact electrodes. An inclination with an inclination angle is provided between the actuator electrodes and the contact electrodes. The thickness of this electrical contact gap is equal to the thickness of a sacrificial layer which is etched away in a manufacturing process.
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公开(公告)号：US20210297011A1
公开(公告)日：2021-09-23
申请号：US17338650
申请日：2021-06-03
申请人： PixArt Imaging Inc.
摘要： An actuator is configured to include a first substrate that has a first conductive surface, which maybe or include a first conductive electrode layer. The actuator also includes a second substrate that has a second conductive surface, which may be or include a second conductive electrode layer. The first and second conductive surfaces face toward each other across a compression space between the first and second substrates. A group of elastic support nodules span the compression space and separate the first and second conductive surfaces. The compression space is less than fully filled with solid elastic material and is configured to be compressed by relative movement of the first and second conductive surfaces toward each other in response to a voltage difference between the first and second conductive surfaces.
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公开(公告)号：US20210175035A1
公开(公告)日：2021-06-10
申请号：US17017253
申请日：2020-09-10
发明人： Hiroaki YAMAZAKI , Kei Masunishi
摘要： According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, a first movable electrode facing the first fixed electrode, a first conductive member electrically connected to the first movable electrode, and a second conductive member electrically connected to the first movable electrode. The first conductive member and the second conductive member support the first movable electrode to be separated from the first fixed electrode in a first state before a first electrical signal is applied between the second conductive member and the first fixed electrode. The first conductive member and the second conductive member are in a broken state in a second state after the first electrical signal is applied between the second conductive member and the first fixed electrode.
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