MEMS relay architecture with frequency isolation

    公开(公告)号:US11728116B2

    公开(公告)日:2023-08-15

    申请号:US16907161

    申请日:2020-06-19

    Applicant: Qorvo US, Inc.

    CPC classification number: H01H59/0009 H01P1/12

    Abstract: An electrical arrangement for performing radio frequency isolation for microelectromechanical relay switches. A microelectromechanical relay switch comprises a beam configured to switch from a first position connected to an upper voltage source to a second position connected to a lower voltage source. The microelectromechanical relay switch further comprises at least one frequency isolation circuit or resistor disposed adjacent to the beam. The at least one frequency isolation circuit or resistor biases a direct current potential to allow for electrostatic actuation and further provides a path for transient electrical currents during switching.

    MEMS relay architecture with frequency isolation

    公开(公告)号:US12112909B2

    公开(公告)日:2024-10-08

    申请号:US18344186

    申请日:2023-06-29

    Applicant: Qorvo US, Inc.

    CPC classification number: H01H59/0009 H01P1/12

    Abstract: An electrical arrangement for performing radio frequency isolation for microelectromechanical relay switches. A microelectromechanical relay switch comprises a beam configured to switch from a first position connected to an upper voltage source to a second position connected to a lower voltage source. The microelectromechanical relay switch further comprises at least one frequency isolation circuit or resistor disposed adjacent to the beam. The at least one frequency isolation circuit or resistor biases a direct current potential to allow for electrostatic actuation and further provides a path for transient electrical currents during switching.

    MEMS switch with multiple pull-down electrodes between terminal electrodes

    公开(公告)号:US12051554B2

    公开(公告)日:2024-07-30

    申请号:US18310243

    申请日:2023-05-01

    Applicant: Qorvo US, Inc.

    Inventor: Roberto Gaddi

    CPC classification number: H01H59/0009 H01H2059/0027 H01H2059/0072

    Abstract: The disclosure is directed to microelectromechanical system (MEMS) switches with multiple pull-down electrodes between terminal electrodes to limit off-state capacitance. In exemplary aspects disclosed herein, a plurality of pull-down electrodes are positioned between the input terminal electrode and the output terminal electrode. The plurality of pull-down electrodes are offset from each other to limit off-state capacitance between the input terminal electrode and the output terminal electrode. The separation between the pull-down electrodes disrupts the off-state capacitive path between the input terminal electrode and the output terminal electrode, thereby further insulating the contacts from each other. Limiting off-state capacitance reduces on-state electrical loss and increases off-state electrical isolation for improved performance.

    TWO-STAGE ACTUATION IN MEMS OHMIC RELAYS

    公开(公告)号:US20230140449A1

    公开(公告)日:2023-05-04

    申请号:US17957856

    申请日:2022-09-30

    Applicant: Qorvo US, Inc.

    Abstract: A microelectromechanical system (MEMS) switch includes a movable beam suspended over a first set of conductive contacts and a second set of conductive contacts. Actuation of the MEMS switch occurs in two stages. During actuation of the MEMS switch, the movable beam is brought into contact with the first set of conductive contacts in a first stage of actuation. A first conduction path is created when the movable beam contacts the first set of conductive contacts. Continued actuation of the MEMS switch causes the movable beam to contact the second set of conductive contacts in a second stage of actuation. A second conduction path is created when the movable beam contacts the second set of conductive contacts.

    MEMS RELAY ARCHITECTURE WITH FREQUENCY ISOLATION

    公开(公告)号:US20230395348A1

    公开(公告)日:2023-12-07

    申请号:US18344186

    申请日:2023-06-29

    Applicant: Qorvo US, Inc.

    CPC classification number: H01H59/0009 H01P1/12

    Abstract: An electrical arrangement for performing radio frequency isolation for microelectromechanical relay switches. A microelectromechanical relay switch comprises a beam configured to switch from a first position connected to an upper voltage source to a second position connected to a lower voltage source. The microelectromechanical relay switch further comprises at least one frequency isolation circuit or resistor disposed adjacent to the beam. The at least one frequency isolation circuit or resistor biases a direct current potential to allow for electrostatic actuation and further provides a path for transient electrical currents during switching.

    MEMS SWITCH WITH MULTIPLE PULL-DOWN ELECTRODES BETWEEN TERMINAL ELECTRODES

    公开(公告)号:US20230268154A1

    公开(公告)日:2023-08-24

    申请号:US18310243

    申请日:2023-05-01

    Applicant: Qorvo US, Inc.

    Inventor: Roberto Gaddi

    CPC classification number: H01H59/0009 H01H2059/0072 H01H2059/0027

    Abstract: The disclosure is directed to microelectromechanical system (MEMS) switches with multiple pull-down electrodes between terminal electrodes to limit off-state capacitance. In exemplary aspects disclosed herein, a plurality of pull-down electrodes are positioned between the input terminal electrode and the output terminal electrode. The plurality of pull-down electrodes are offset from each other to limit off-state capacitance between the input terminal electrode and the output terminal electrode. The separation between the pull-down electrodes disrupts the off-state capacitive path between the input terminal electrode and the output terminal electrode, thereby further insulating the contacts from each other. Limiting off-state capacitance reduces on-state electrical loss and increases off-state electrical isolation for improved performance.

    Mems switch with multiple pull-down electrodes between terminal electrodes

    公开(公告)号:US11640891B2

    公开(公告)日:2023-05-02

    申请号:US17084555

    申请日:2020-10-29

    Applicant: Qorvo US, Inc.

    Inventor: Roberto Gaddi

    Abstract: The disclosure is directed to microelectromechanical system (MEMS) switches with multiple pull-down electrodes between terminal electrodes to limit off-state capacitance. In exemplary aspects disclosed herein, a plurality of pull-down electrodes are positioned between the input terminal electrode and the output terminal electrode. The plurality of pull-down electrodes are offset from each other to limit off-state capacitance between the input terminal electrode and the output terminal electrode. The separation between the pull-down electrodes disrupts the off-state capacitive path between the input terminal electrode and the output terminal electrode, thereby further insulating the contacts from each other. Limiting off-state capacitance reduces on-state electrical loss and increases off-state electrical isolation for improved performance.

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