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公开(公告)号:US20240430623A1
公开(公告)日:2024-12-26
申请号:US18754629
申请日:2024-06-26
Inventor: Weili Cui , Ronald Miles , Jaron Cui
Abstract: A microstructure that detects the acoustic velocity of a fluid by employing microfabricated thin sensing elements that are primarily driven by viscous forces due to the fluctuating motion of a fluid, such as air in a sound field. The microstructures can be fabricated in an array to create a diaphragmless microphone. The microstructure and its components can be fabricated on a single or multilayer substrate with the use of masks.
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公开(公告)号:US11792566B2
公开(公告)日:2023-10-17
申请号:US16960673
申请日:2019-01-04
Inventor: Sahil Kumar Gupta , Stephane Leahy , Iman Moazzen , Ronald Miles , Jian Zhou
CPC classification number: H04R1/406 , H04R17/02 , B06B1/0292 , G01N29/2425 , G01N29/34 , G01N2291/021 , H04R1/44 , H04R17/005 , H04R17/025 , H04R2201/401 , H04R2430/20
Abstract: Microphones, microphone systems, and methods for capturing and processing sound are described. The microphones and microphone systems may adaptively change the direction from which sound is captured. The microphones and microphone systems avoid the need to provide arrays of microphones, while providing adaptive beamforming without a time delay between each channel of information, and multi-directional sound capture. A dependency between the frequency response and system size is also avoided.
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公开(公告)号:US20210061648A1
公开(公告)日:2021-03-04
申请号:US17000634
申请日:2020-08-24
Inventor: Shahrzad Towfighian , Mark Pallay , Meysam Daeichin , Ronald Miles
Abstract: A microelectromechanical actuator, comprising: a substrate, having a surface; a conductive beam suspended parallel to the substrate, displaceable along an axis normal to the surface of the substrate; a center electrode on the substrate under the beam; a pair of side electrodes on the substrate configured, when charged, to exert an electrostatic force normal to the surface of the substrate on the beam that repulses the beam from the substrate, and exerts a balanced electrostatic force on the beam in a plane of the surface of the substrate, the center conductive electrode being configured to shield the beam from electrostatic forces induced by the side electrodes from beneath the beam, and the center electrode being configured to have a voltage different from a voltage on the beam, to thereby induce an attractive electrostatic force on the beam.
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公开(公告)号:US12091313B2
公开(公告)日:2024-09-17
申请号:US17000634
申请日:2020-08-24
Inventor: Shahrzad Towfighian , Mark Pallay , Meysam Daeichin , Ronald Miles
CPC classification number: B81B7/02 , B81B3/0021 , B81B7/0022 , B81B7/008 , H02N2/181 , H02N2/186 , H01H59/0009
Abstract: A microelectromechanical actuator, comprising: a substrate, having a surface; a conductive beam suspended parallel to the substrate, displaceable along an axis normal to the surface of the substrate; a center electrode on the substrate under the beam; a pair of side electrodes on the substrate configured, when charged, to exert an electrostatic force normal to the surface of the substrate on the beam that repulses the beam from the substrate, and exerts a balanced electrostatic force on the beam in a plane of the surface of the substrate, the center conductive electrode being configured to shield the beam from electrostatic forces induced by the side electrodes from beneath the beam, and the center electrode being configured to have a voltage different from a voltage on the beam, to thereby induce an attractive electrostatic force on the beam.
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公开(公告)号:US20240284122A1
公开(公告)日:2024-08-22
申请号:US18570564
申请日:2022-06-14
Inventor: Stephane Leahy , Sahil Gupta , Wan-Thai Hsu , Mohsin Nawaz , Carly Stalder , Ravi Patel , Mohamed El Badawe , Ronald Miles
CPC classification number: H04R19/04 , B81B3/0021 , B81B2201/0257 , B81B2203/0118 , B81B2203/0307 , B81B2203/04 , B81B2207/03 , H04R2201/003
Abstract: A microelectromechanical (MEMS) transducer includes a substrate, a moveable electrode supported by the substrate, and a pair of fixed electrodes supported by the substrate, each fixed electrode of the pair of fixed electrodes being configured as a bias or sense electrode. The pair of fixed electrodes are disposed in a stacked arrangement. An end of the moveable electrode is configured for vibrational movement along the stacked arrangement during excitation of the moveable electrode. The pair of fixed electrodes are laterally spaced apart from the end of the moveable electrode to establish a capacitance indicative of the vibrational movement.
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