公开(公告)号：US11634317B2

公开(公告)日：2023-04-25

申请号：US16392224

申请日：2019-04-23

Applicant: Kionix, Inc.

Inventor： Andrew Hocking ,  Martin Heller ,  Wenting Gu

IPC: B81B3/00 ,  H01L41/113 ,  B81C1/00 ,  H01L41/187

Abstract: A micro-electromechanical system (MEMS) device comprises a fixed portion and a proofmass suspended by at least one composite beam. The composite beam is cantilevered relative to the fixed portion and extends between a first end that is integrally formed with the fixed portion and a second distal end. The composite beam comprises an insulator having a top surface and at least two side surfaces; a conductor extending away from the fixed portion and surrounding at least a portion of the insulator; and a second conductor positioned adjacent to the top surface of the conductor and extending parallel with the insulator away from the fixed portion. The second conductor is separated from the first conductor to provide a low parasitic conductance of the composite beam.

公开(公告)号：US11527376B2

公开(公告)日：2022-12-13

申请号：US16521682

申请日：2019-07-25

Applicant: Kionix, Inc.

Inventor： Scott A. Miller ,  Nicole Kerness ,  Randy Phillips ,  Sangtae Park ,  Martin Heller ,  Mizuho Okada ,  Andrew Hocking ,  Wenting Gu

IPC: B81B3/00 ,  H01H59/00

Abstract: A micro-electromechanical system (MEMS) device includes a substrate and a beam suspended relative to a surface of the substrate. The substrate includes a buried insulator layer and a cavity. The beam includes a first portion and a second portion that are separated by an isolation joint. The cavity separates the surface of the substrate from the beam.

公开(公告)号：US20190322522A1

公开(公告)日：2019-10-24

申请号：US16392224

申请日：2019-04-23

Applicant: Kionix, Inc.

Inventor： Andrew Hocking ,  Martin Heller ,  Wenting Gu

IPC: B81B3/00 ,  H01L41/113 ,  H01L41/187 ,  B81C1/00

Abstract: A micro-electromechanical system (MEMS) device comprises a fixed portion and a proofmass suspended by at least one composite beam. The composite beam is cantilevered relative to the fixed portion and extends between a first end that is integrally formed with the fixed portion and a second distal end. The composite beam comprises an insulator having a top surface and at least two side surfaces; a conductor extending away from the fixed portion and surrounding at least a portion of the insulator; and a second conductor positioned adjacent to the top surface of the conductor and extending parallel with the insulator away from the fixed portion. The second conductor is separated from the first conductor to provide a low parasitic conductance of the composite beam.