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    System and method for separation of pump light and collected light in a laser pumped light source
    51.
    发明授权
    System and method for separation of pump light and collected light in a laser pumped light source 有权

    公开(公告)号：US10520741B2

    公开(公告)日：2019-12-31

    申请号：US15651968

    申请日：2017-07-17

    Applicant: KLA-Tencor Corporation

    Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Panzer ,  Eugene Shifrin

    IPC: G02B27/10

    Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

    Neutral Atom Imaging System
    52.
    发明申请
    Neutral Atom Imaging System 审中-公开

    公开(公告)号：US20190378684A1

    公开(公告)日：2019-12-12

    申请号：US16141150

    申请日：2018-09-25

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Eugene Shifrin ,  Gildardo Delgado ,  Rudy F. Garcia

    IPC: H01J37/26 ,  H01J37/08 ,  H01J37/317 ,  H01J37/28 ,  H01J37/304

    Abstract: An imaging system utilizing atomic atoms is provided. The system may include a neutral atom source configured to generate a beam of neutral atoms. The system may also include an ionizer configured to collect neutral atoms scattered from the surface of a sample. The ionizer may also be configured to ionize the collected neutral atoms. The system may also include a selector configured to receive ions from the ionizer and selectively filter received ions. The system may also include one or more optical elements configured to direct selected ions to a detector. The detector may be configured to generate one or more images of the surface of the sample based on the received ions.

    High-Power Short-Pass Total Internal Reflection Filter
    53.
    发明申请
    High-Power Short-Pass Total Internal Reflection Filter 审中-公开

    公开(公告)号：US20190235390A1

    公开(公告)日：2019-08-01

    申请号：US16165799

    申请日：2018-10-19

    Applicant: KLA-Tencor Corporation

    Inventor： Wei Zhao ,  Ilya Bezel

    IPC: G03F7/20 ,  H01J61/02 ,  H01J61/54 ,  H01J65/04 ,  H01J23/033 ,  H05H1/24

    Abstract: An apparatus for generating filtered light may include a broadband illumination source configured to generate broadband illumination and a total internal reflection (TIR) filter formed from a material at least partially transparent to the broadband illumination. The TIR filter may include one or more input faces oriented to receive the broadband illumination. The TIR filter may further be oriented to reflect wavelengths of the broadband illumination beam below a selected cutoff wavelength on one or more filtering faces as filtered broadband illumination and provide the filtered broadband illumination beam through one or more output faces. The cutoff wavelength may further be selected based on total internal reflection on the one or more faces.

    Continuous-wave laser-sustained plasma illumination source
    56.
    发明授权
    Continuous-wave laser-sustained plasma illumination source 有权

    公开(公告)号：US10217625B2

    公开(公告)日：2019-02-26

    申请号：US15064294

    申请日：2016-03-08

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Eugene Shifrin ,  Matthew Panzer

    IPC: H01J65/04 ,  H05G2/00

    Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

    Non-contact thermal measurements of VUV optics
    58.
    发明授权
    Non-contact thermal measurements of VUV optics 有权

    公开(公告)号：US10139283B2

    公开(公告)日：2018-11-27

    申请号：US15360722

    申请日：2016-11-23

    Applicant: KLA-Tencor Corporation

    Inventor： Anatoly Shchemelinin ,  Ilya Bezel ,  Kenneth P. Gross

    IPC: G01J5/00 ,  G01J5/10 ,  G01J5/52

    Abstract: Methods and systems for performing non-contact temperature measurements of optical elements with long wavelength infrared light are described herein. The optical elements under measurement exhibit low emissivity to long wavelength infrared light and are often highly reflective or highly transmissive to long wavelength infrared light. In one aspect, a material coating having high emissivity, low reflectivity, and low transmission at long wavelength IR wavelengths is disposed over selected portions of one or more optical elements of a metrology or inspection system. The locations of the material coating are outside the direct optical path of the primary measurement light employed by the metrology or inspection system to perform measurements of a specimen. Temperature measurements of the front and back surfaces of an IR-transparent optical element are performed with a single IR camera. Temperature measurements are performed through multiple optical elements in an optical path of a primary measurement beam.

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