SURFACE CHEMICAL TREATMENT APPARATUS FOR FINE PATTERNING
    46.
    发明申请
    SURFACE CHEMICAL TREATMENT APPARATUS FOR FINE PATTERNING 有权
    表面化学处理装置精细图案

    公开(公告)号:US20150376796A1

    公开(公告)日:2015-12-31

    申请号:US14766494

    申请日:2013-02-14

    Abstract: A surface chemical treatment apparatus provided with: a first conduit having an opening at one end and communicating with a liquid supply means at the other end; a second conduit having at one end an opening that surrounds the opening of the first conduit and communicating with a liquid suction means at the other end; and a moving mechanism for moving the openings of the first and second conduits relative to the solid phase surface, so as to make a surface chemical treatment possible in a fine pattern by allowing the patterning solution to be dispensed through the opening of the first conduit while allowing the solution to be suctioned up together with the surrounding liquid phase or gas phase medium through the opening of the second conduit that surrounds the opening of the first conduit and, thus, preventing seepage of the solution in all directions.

    Abstract translation: 一种表面化学处理设备,具有:第一导管,其一端具有开口,并在另一端与液体供应装置连通; 第二导管,其一端具有围绕第一导管的开口并与另一端的液体抽吸装置连通的开口; 以及用于相对于固相表面移动第一和第二导管的开口的移动机构,以便通过允许通过第一导管的开口分配图案化溶液,使细微图案的表面化学处理成为可能,同时 允许溶液与周围的液相或气相介质一起通过围绕第一导管的开口的第二导管的开口被吸入,从而防止溶液在所有方向上渗出。

    Conformal oxide dry etch
    47.
    发明授权
    Conformal oxide dry etch 有权
    保形氧化物干蚀刻

    公开(公告)号:US09093390B2

    公开(公告)日:2015-07-28

    申请号:US14314889

    申请日:2014-06-25

    Abstract: A method of etching silicon oxide from a trench is described which allows more homogeneous etch rates up and down the sides of the trench. One disclosed method includes a sequential introduction of (1) a hydrogen-containing precursor and then (2) a fluorine-containing precursor into a substrate processing region. The temperature of the substrate is low during each of the two steps in order to allow the reaction to proceed and form solid residue by-product. A second disclosed method reverses the order of steps (1) and (2) but still forms solid residue by-product. The solid residue by-product is removed by raising the temperature in a subsequent sublimation step regardless of the order of the two steps.

    Abstract translation: 描述了从沟槽蚀刻二氧化硅的方法,其允许沟槽侧面上下的更均匀的蚀刻速率。 一种公开的方法包括将(1)含氢前体和(2)含氟前体顺序地引入基板处理区域中。 为了使反应进行并形成固体残余物副产物,底物的温度在两个步骤中都是低的。 第二个公开的方法逆转步骤(1)和(2)的顺序,但仍然形成固体残余物副产物。 通过在随后的升华步骤中升高温度来去除固体残余副产物,而不管两个步骤的顺序如何。

    METHOD FOR PRODUCING OPTICAL FIBER PREFORM, OPTICAL FIBER PREFORM, AND OPTICAL FIBER
    48.
    发明申请
    METHOD FOR PRODUCING OPTICAL FIBER PREFORM, OPTICAL FIBER PREFORM, AND OPTICAL FIBER 审中-公开
    用于制造光纤预制件,光纤预制件和光纤的方法

    公开(公告)号:US20140370287A1

    公开(公告)日:2014-12-18

    申请号:US14370303

    申请日:2012-12-13

    Abstract: An optical fiber preform producing method is a method for producing an optical fiber preform including a core part and a cladding part and being composed of silica-based glass, which has: an alkali metal adding step of adding an alkali metal in a maximum concentration of not less than 500 ppm in the vicinity of an inner surface of a glass pipe composed of silica glass; an etching step of etching the inner surface of the glass pipe by vapor phase etching under flow of SF6 gas and chlorine gas through an inner hollow of the glass pipe, after the alkali metal adding step; and a collapsing step of eliminating the hollow of the glass pipe to produce a glass rod, after the etching step, wherein the optical fiber preform is produced using the glass rod produced by the collapsing step.

    Abstract translation: 光纤预制棒的制造方法是一种光纤预制体的制造方法,其包括芯部和包层部,由二氧化硅系玻璃构成,所述玻璃具有:碱金属添加工序,以最大浓度添加碱金属 在由石英玻璃构成的玻璃管的内表面附近不小于500ppm; 蚀刻步骤,在所述碱金属添加步骤之后,通过SF6气体和氯气的流动通过玻璃管的内部中空部分的气相蚀刻来蚀刻所述玻璃管的内表面; 以及在蚀刻步骤之后消除玻璃管的中空以产生玻璃棒的折叠步骤,其中使用通过折叠步骤制造的玻璃棒制造光纤预制棒。

    Methods and devices for electronic sensing
    49.
    发明授权
    Methods and devices for electronic sensing 有权
    电子感应的方法和装置

    公开(公告)号:US08845914B2

    公开(公告)日:2014-09-30

    申请号:US13894296

    申请日:2013-05-14

    Abstract: The presence of a detectable entity within a detection volume of a microfabricated elastomeric structure is sensed through a change in the electrical or magnetic environment of the detection volume. In embodiments utilizing electronic detection, an electric field is applied to the detection volume and a change in impedance, current, or combined impedance and current due to the presence of the detectable entity is measured. In embodiments utilizing magnetic detection, the magnetic properties of a magnetized detected entity alter the magnetic field of the detection volume. This changed magnetic field induces a current which can reveal the detectable entity. The change in resistance of a magnetoresistive element may also reveal the passage of a magnetized detectable entity.

    Abstract translation: 通过检测体积的电气或磁环境的变化来检测在微制造弹性体结构的检测体积内的可检测实体的存在。 在利用电子检测的实施例中,对检测体积施加电场,并且测量由于可检测实体的存在引起的阻抗,电流或组合阻抗和电流的变化。 在利用磁检测的实施例中,磁化检测实体的磁性改变了检测体积的磁场。 这种改变的磁场诱发可以揭示可检测实体的电流。 磁阻元件的电阻变化也可以揭示磁化的可检测实体的通过。

    OPTICAL DEVICE, METHOD OF FORMING AN OPTICAL DEVICE, AND METHOD FOR DETERMINING A PARAMETER OF A FLUID
    50.
    发明申请
    OPTICAL DEVICE, METHOD OF FORMING AN OPTICAL DEVICE, AND METHOD FOR DETERMINING A PARAMETER OF A FLUID 审中-公开
    光学装置,形成光学装置的方法和用于确定流体参数的方法

    公开(公告)号:US20140078505A1

    公开(公告)日:2014-03-20

    申请号:US14030296

    申请日:2013-09-18

    Abstract: According to embodiments of the present invention, an optical device is provided. The optical device includes an optical fiber comprising a core for propagation of light and a cladding surrounding the core, and at least one microchannel defined in the optical fiber extending at least partially through the cladding, wherein the at least one microchannel has a concave-shaped surface arranged to interact with an optical field of the light. According to further embodiments of the present invention, a method of forming an optical device and a method for determining a parameter of a fluid are also provided.

    Abstract translation: 根据本发明的实施例,提供一种光学装置。 该光学装置包括光纤,该光纤包括用于光的传播的核和围绕该芯的包层,以及限定在至少部分地穿过该包层的该光纤中的至少一个微通道,其中该至少一个微通道具有凹形 表面布置成与光的光场相互作用。 根据本发明的另外的实施例,还提供了一种形成光学装置的方法和用于确定流体参数的方法。

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