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    CHARGED PARTICLE MICROSCOPE
    43.
    发明申请
    CHARGED PARTICLE MICROSCOPE 审中-公开
    充电颗粒显微镜

    公开(公告)号：US20120217391A1

    公开(公告)日：2012-08-30

    申请号：US13508040

    申请日：2010-11-01

    申请人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Noriaki Arai ,  Tohru Ishitani ,  Yoichi Ose ,  Yoshimi Kawanami

    发明人： Hiroyasu Shichi ,  Shinichi Matsubara ,  Noriaki Arai ,  Tohru Ishitani ,  Yoichi Ose ,  Yoshimi Kawanami

    IPC分类号： H01J37/28

    CPC分类号： H01J37/08 ,  H01J27/26 ,  H01J37/09 ,  H01J37/28 ,  H01J2237/062 ,  H01J2237/0807

    摘要： The charged particle beam microscope is configured of: a gas field ionization ion source (1); a focusing lens (5) which accelerates and focuses ions that have been discharged from the ion source; a movable first aperture (6) which limits the ion beam that has passed through the focusing lens; a first deflector (35) which scans or aligns the ion beam that has passed through the first aperture; a second deflector (7) which deflects the ion beam that has passed through the first aperture; a second aperture (36) which limits the ion beam that has passed through the first aperture; an objective lens (8) which focuses, on a sample, the ion beam that has passed through the first aperture; and a means for measuring the signal, which is substantially proportional to the current of the ion beam that has passed through the second aperture.

    摘要翻译： 带电粒子束显微镜由气体离子源（1）构成; 聚焦透镜（5），其加速并聚焦已经从离子源放出的离子; 限制已经通过聚焦透镜的离子束的可移动的第一孔（6）; 第一偏转器（35），其扫描或对准已经穿过第一孔的离子束; 第二偏转器（7），其使已经穿过第一孔的离子束偏转; 限制已经通过第一孔的离子束的第二孔（36）; 物镜（8），其在样品上聚焦已经穿过第一孔的离子束; 以及用于测量与已经通过第二孔的离子束的电流基本成比例的信号的装置。

    Sample electrification measurement method and charged particle beam apparatus
    44.
    发明申请
    Sample electrification measurement method and charged particle beam apparatus 有权
    样品充电测量方法和带电粒子束装置

    公开(公告)号：US20080201091A1

    公开(公告)日：2008-08-21

    申请号：US12076355

    申请日：2008-03-17

    申请人： Makoto Ezumi ,  Yoichi Ose ,  Akira Ikegami ,  Hideo Todokoro ,  Tatsuaki Ishijima ,  Takahiro Sato ,  Ritsuo Fukaya ,  Kazunari Asao

    发明人： Makoto Ezumi ,  Yoichi Ose ,  Akira Ikegami ,  Hideo Todokoro ,  Tatsuaki Ishijima ,  Takahiro Sato ,  Ritsuo Fukaya ,  Kazunari Asao

    IPC分类号： G01R19/00 ,  G01N23/00

    CPC分类号： H01J37/265 ,  G01N23/2251 ,  H01J37/21 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0041 ,  H01J2237/216 ,  H01J2237/244 ,  H01J2237/24564 ,  H01J2237/24592 ,  H01J2237/2594 ,  H01J2237/2817

    摘要： The present invention has the object of providing a charged particle beam irradiation method ideal for reducing the focus offset, magnification fluctuation and measurement length error in charged particle beam devices.To achieve these objects, a method is disclosed in the invention for measuring the electrical potential distribution on the sample with a static electrometer while loaded by a loader mechanism. Another method is disclosed for measuring the local electrical charge at specified points on the sample, and isolating and measuring the wide area electrostatic charge quantity from those local electrostatic charges. Yet another method is disclosed for correcting the measurement length value or magnification based on fluctuations found by measuring the amount of electrostatic charge at the specified points under at least two charged particle optical conditions, and then using a charged particle beam to measure fluctuations in measurement dimensions occurring due to fluctuations in the electrostatic charge at the specified locations.

    摘要翻译： 本发明的目的是提供一种理想的用于减少带电粒子束装置中的聚焦偏移，放大波动和测量长度误差的带电粒子束照射方法。 为了实现这些目的，在本发明中公开了一种用于在由装载机构加载的情况下用静电静电计测量样品上的电位分布的方法。 公开了另一种测量样品上特定点的局部电荷的方法，并且从这些局部静电电荷中分离和测量广域静电电荷量。 公开了另一种用于基于通过测量至少两个带电粒子光学条件下的指定点处的静电电荷量而发现的波动来校正测量长度值或放大倍率的方法，然后使用带电粒子束来测量测量尺寸的波动 由于在指定位置处的静电电荷的波动而发生。

    Monochromator and scanning electron microscope using the same
    46.
    发明授权
    Monochromator and scanning electron microscope using the same 有权
    单色器和扫描电子显微镜使用相同

    公开(公告)号：US07315024B2

    公开(公告)日：2008-01-01

    申请号：US11344529

    申请日：2006-02-01

    申请人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    发明人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    IPC分类号： G21K7/00 ,  G01N23/00

    CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/28

    摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

    摘要翻译： 本发明提供一种扫描电子显微镜，该扫描电子显微镜由能够高分辨率，单色化能量和降低色差的单色仪组成，而不会显着降低一次电子束的电流强度。 扫描电子显微镜安装有一对具有相反偏转方向的扇形磁场和电场，以聚焦电子束，然后通过狭缝限制能量宽度，并且安装相同形状的另一对扇形磁场和电场 在与包含狭缝的表面形成对称镜的位置处。 该结构用于抵消物点和对称镜位置的能量分散，并通过会聚透镜系统空间收缩点聚光点光束，提高扫描电子显微镜的图像分辨率。

    Scanning electron microscope
    50.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US06872944B2

    公开(公告)日：2005-03-29

    申请号：US10699793

    申请日：2003-11-04

    申请人： Hideo Todokoro ,  Shou Takami ,  Makoto Ezumi ,  Osamu Yamada ,  Yoichi Ose ,  Tomohiro Kudo

    发明人： Hideo Todokoro ,  Shou Takami ,  Makoto Ezumi ,  Osamu Yamada ,  Yoichi Ose ,  Tomohiro Kudo

    IPC分类号： G01Q30/02 ,  H01J37/244 ,  H01J37/28

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/04756

    摘要： The present invention relates to a scanning electron microscope employing a deceleration field forming technology (retarding), more particularly a scanning electron microscope which separates and detects secondary electrons at high efficiency.The object of the present invention is accomplished by providing an electron source, a lens for condensing the primary electron beam which is emitted from said electron source, a detector for detecting electrons which are generated by radiation of the primary electron beam onto a specimen, a first deceleration means for decelerating the primary electron beam which is radiated onto said specimen, a second deceleration means for decelerating electrons which are generated on the specimen, and a deflector for deflecting said electrons which are decelerated by said second decelerating means.

    摘要翻译： 本发明涉及一种采用减速场形成技术（延迟）的扫描电子显微镜，更具体地说，涉及一种以高效率分离和检测二次电子的扫描电子显微镜。本发明的目的是提供一种电子源， 用于冷凝从所述电子源发射的一次电子束的透镜，用于检测通过将一次电子束辐射到样本上而产生的电子的检测器，用于使被辐射到所述样本上的一次电子束减速的第一减速装置 ，用于使在试样上产生的电子减速的第二减速装置和用于使由所述第二减速装置减速的所述电子偏转的偏转器。