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公开(公告)号：US09087675B2
公开(公告)日：2015-07-21
申请号：US14238718
申请日：2012-06-20
CPC分类号： H01J37/26 , H01J9/50 , H01J37/08 , H01J49/16 , H01J2237/0807 , Y02W30/828
摘要： Provided is an ion source emitter that does not cause significant extraction voltage changes even when an apex portion of the emitter is repeatedly regenerated. The emitter has a shape of a triangular pyramid with the single atom at the apex. An apex portion of the emitter is substantially shaped like a hexagon when viewed from the apex side.
摘要翻译： 提供了即使当发射器的顶点部分被重复再生时也不会引起显着的提取电压变化的离子源发射体。 发射体具有三角锥形，顶点具有单个原子。 当从顶点观察时，发射体的顶点部分基本成形为六边形。
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公开(公告)号：US20140191128A1
公开(公告)日：2014-07-10
申请号：US14238718
申请日：2012-06-20
CPC分类号： H01J37/26 , H01J9/50 , H01J37/08 , H01J49/16 , H01J2237/0807 , Y02W30/828
摘要： Provided is an ion source emitter that does not cause significant extraction voltage changes even when an apex portion of the emitter is repeatedly regenerated. The emitter has a shape of a triangular pyramid with the single atom at the apex. An apex portion of the emitter is substantially shaped like a hexagon when viewed from the apex side.
摘要翻译： 提供了即使当发射器的顶点部分被重复再生时也不会引起显着的提取电压变化的离子源发射体。 发射体具有三角锥形，顶点具有单个原子。 当从顶点观察时，发射体的顶点部分基本成形为六边形。
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3.发明授权Gas field ion source and method for using same, ion beam device, and emitter tip and method for manufacturing same 有权气体离子源及其使用方法，离子束装置和发射极尖端及其制造方法公开(公告)号：US08847173B2
公开(公告)日：2014-09-30
申请号：US13811392
申请日：2011-07-13
申请人： Yoshimi Kawanami , Shinichi Matsubara , Hironori Moritani , Noriaki Arai , Hiroyasu Shichi , Tomihiro Hashizume , Hiroyasu Kaga , Norihide Saho , Hiroyuki Muto , Yoichi Ose
发明人： Yoshimi Kawanami , Shinichi Matsubara , Hironori Moritani , Noriaki Arai , Hiroyasu Shichi , Tomihiro Hashizume , Hiroyasu Kaga , Norihide Saho , Hiroyuki Muto , Yoichi Ose
CPC分类号： H01J37/261 , B23K9/00 , H01J1/3044 , H01J37/08 , H01J37/26 , H01J2237/0807
摘要： To provide a gas field ion source having a high angular current density, the gas field ion source is configured such that at least a base body of an emitter tip configuring the gas field ion source is a single crystal metal, such that the apex of the emitter tip is formed into a pyramid shape or a cone shape having a single atom at the top, and such that the extraction voltage in the case of ionizing helium gas by the single atom is set to 10 kV or more.
摘要翻译： 为了提供具有高角电流密度的气体场离子源，气体离子源被配置为使得至少构成气体离子源的发射极尖端的基体是单晶金属，使得 发射极尖端形成为在顶部具有单个原子的锥体形状或锥形形状，并且使得通过单个原子将氦气离子化的情况下的提取电压设定为10kV以上。
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4.发明申请GAS FIELD ION SOURCE AND METHOD FOR USING SAME, ION BEAM DEVICE, AND EMITTER TIP AND METHOD FOR MANUFACTURING SAME 有权气体场离子源及其使用方法，离子束装置和发射体提示及其制造方法公开(公告)号：US20130119252A1
公开(公告)日：2013-05-16
申请号：US13811392
申请日：2011-07-13
申请人： Yoshimi Kawanami , Shinichi Matsubara , Hironori Moritani , Noriaki Arai , Hiroyasu Shichi , Tomihiro Hashizume , Hiroyasu Kaga , Norihide Saho , Hiroyuki Muto , Yoichi Ose
发明人： Yoshimi Kawanami , Shinichi Matsubara , Hironori Moritani , Noriaki Arai , Hiroyasu Shichi , Tomihiro Hashizume , Hiroyasu Kaga , Norihide Saho , Hiroyuki Muto , Yoichi Ose
CPC分类号： H01J37/261 , B23K9/00 , H01J1/3044 , H01J37/08 , H01J37/26 , H01J2237/0807
摘要： To provide a gas field ion source having a high angular current density, the gas field ion source is configured such that at least a base body of an emitter tip configuring the gas field ion source is a single crystal metal, such that the apex of the emitter tip is formed into a pyramid shape or a cone shape having a single atom at the top, and such that the extraction voltage in the case of ionizing helium gas by the single atom is set to 10 kV or more.
摘要翻译： 为了提供具有高角电流密度的气体场离子源，气体离子源被配置为使得至少构成气体离子源的发射极尖端的基体是单晶金属，使得 发射极尖端形成为在顶部具有单个原子的锥体形状或锥形形状，并且使得通过单个原子将氦气离子化的情况下的提取电压设定为10kV以上。
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