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公开(公告)号:US20180366438A1
公开(公告)日:2018-12-20
申请号:US15781998
申请日:2015-12-22
Applicant: Intel Corporation
Inventor: Dae-Woo Kim , Sujit Sharan , Ravindranath V. Mahajan
IPC: H01L25/065 , H01L23/538 , H01L23/498 , H01L23/31 , H01L25/00
Abstract: A package assembly includes a substrate extending from a first substrate end to a second substrate end. A plurality of conductive traces extend along the substrate. A plurality of contacts are coupled with the respective conductive traces of the plurality of conductive traces. Each of the contacts of the plurality of contacts includes a contact pad coupled with a respective conductive trace of the plurality of conductive traces, and a contact post coupled with the contact pad, the contact post extends from the contact pad. A package cover layer is coupled over the plurality of contact posts. The plurality of contact posts are configured to penetrate the package cover layer and extend to a raised location above the package cover layer.
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公开(公告)号:US20160133589A1
公开(公告)日:2016-05-12
申请号:US14996795
申请日:2016-01-15
Applicant: Intel Corporation
Inventor: Debendra Mallik , Robert L. Sankman , Sujit Sharan
IPC: H01L23/00 , H01L23/498
CPC classification number: H01L24/09 , H01L21/4846 , H01L21/4853 , H01L21/561 , H01L21/568 , H01L23/3128 , H01L23/49816 , H01L23/49827 , H01L23/50 , H01L23/5389 , H01L24/05 , H01L24/06 , H01L24/16 , H01L24/26 , H01L24/32 , H01L24/97 , H01L25/0652 , H01L25/0655 , H01L25/0657 , H01L2224/0401 , H01L2224/0903 , H01L2224/09181 , H01L2224/131 , H01L2224/16225 , H01L2224/16227 , H01L2224/32225 , H01L2224/73204 , H01L2224/97 , H01L2225/06513 , H01L2225/06517 , H01L2225/06541 , H01L2924/15311 , H01L2924/181 , H01L2924/00 , H01L2224/81 , H01L2924/014
Abstract: An apparatus includes at least a first integrated circuit (IC) and a wafer-fabricated space transformer (ST). The IC includes bonding pads of a first inter-pad pitch on a bottom surface. The ST includes a top surface having bonding pads of the first inter-pad pitch, and at least a portion of the bonding pads of the first IC are bonded to the bonding pads of the top surface. The ST includes a bottom surface having bonding pads of a second inter-pad pitch, at least one dielectric insulating layer between the top surface and the bottom surface, and conductive interconnect in the dielectric layer configured to provide electrical continuity between the bonding pads of the top surface and the bonding pads of the bottom surface.
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公开(公告)号:US12170253B2
公开(公告)日:2024-12-17
申请号:US18114123
申请日:2023-02-24
Applicant: Intel Corporation
Inventor: Dae-Woo Kim , Sujit Sharan , Sairam Agraharam
IPC: H01L23/538 , G01R31/27 , H01L21/66 , H01L23/00 , H01L23/498 , H01L23/522 , H01L23/544 , H01L23/58 , H01L23/14 , H01L25/065 , H01L25/18 , H10B80/00
Abstract: Metal-free frame designs for silicon bridges for semiconductor packages and the resulting silicon bridges and semiconductor packages are described. In an example, a semiconductor structure includes a substrate having an insulating layer disposed thereon, the substrate having a perimeter. A metallization structure is disposed on the insulating layer, the metallization structure including conductive routing disposed in a dielectric material stack. A first metal guard ring is disposed in the dielectric material stack and surrounds the conductive routing. A second metal guard ring is disposed in the dielectric material stack and surrounds the first metal guard ring. A metal-free region of the dielectric material stack surrounds the second metal guard ring. The metal-free region is disposed adjacent to the second metal guard ring and adjacent to the perimeter of the substrate.
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公开(公告)号:US12113026B2
公开(公告)日:2024-10-08
申请号:US18377991
申请日:2023-10-09
Applicant: Intel Corporation
Inventor: Henning Braunisch , Chia-Pin Chiu , Aleksandar Aleksov , Hinmeng Au , Stefanie M. Lotz , Johanna M. Swan , Sujit Sharan
IPC: H01L23/538 , H01L23/00 , H01L23/13 , H01L25/065 , H01L21/683
CPC classification number: H01L23/5385 , H01L23/13 , H01L23/5381 , H01L24/14 , H01L24/73 , H01L25/0652 , H01L25/0655 , H01L25/0657 , H01L21/6835 , H01L24/17 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/81 , H01L2224/0401 , H01L2224/13099 , H01L2224/1403 , H01L2224/141 , H01L2224/16145 , H01L2224/16225 , H01L2224/17181 , H01L2224/32245 , H01L2224/45099 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/49175 , H01L2224/73207 , H01L2224/73253 , H01L2224/81001 , H01L2224/81005 , H01L2224/81801 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06562 , H01L2924/00011 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/01076 , H01L2924/01079 , H01L2924/014 , H01L2924/10253 , H01L2924/10271 , H01L2924/10329 , H01L2924/12042 , H01L2924/1461 , H01L2924/15153 , H01L2924/19107 , H01L2924/351 , H01L2224/48091 , H01L2924/00014 , H01L2224/49175 , H01L2224/48227 , H01L2924/00 , H01L2224/45147 , H01L2924/00 , H01L2924/01015 , H01L2924/00 , H01L2924/1461 , H01L2924/00 , H01L2924/00014 , H01L2224/45099 , H01L2924/12042 , H01L2924/00 , H01L2924/00014 , H01L2224/0401 , H01L2924/00011 , H01L2924/01005 , H01L2924/00011 , H01L2224/0401
Abstract: A multi-chip package includes a substrate (110) having a first side (111), an opposing second side (112), and a third side (213) that extends from the first side to the second side, a first die (120) attached to the first side of the substrate and a second die (130) attached to the first side of the substrate, and a bridge (140) adjacent to the third side of the substrate and attached to the first die and to the second die. No portion of the substrate is underneath the bridge. The bridge creates a connection between the first die and the second die. Alternatively, the bridge may be disposed in a cavity (615, 915) in the substrate or between the substrate and a die layer (750). The bridge may constitute an active die and may be attached to the substrate using wirebonds (241, 841, 1141, 1541).
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公开(公告)号:US20240332193A1
公开(公告)日:2024-10-03
申请号:US18192804
申请日:2023-03-30
Applicant: Intel Corporation
Inventor: Lijiang Wang , Sujit Sharan
IPC: H01L23/538
CPC classification number: H01L23/5381 , H01L23/5386
Abstract: In one embodiment, an interconnect bridge circuitry includes a first set of bridge-to-die electrical connectors in a first region of the circuitry, a second set of bridge-to-die electrical connectors in a second region of the circuitry, and an interconnection between a bridge-to-die connector of the first set and a bridge-to-die connector of the second set. The interconnection is in a third region of the circuitry between the first region and the second region, and includes a first trace connected to the bridge-to-die electrical connector of the first set, a second trace connected to the bridge-to-die electrical connector of the second set, the second trace parallel with the first trace, and a third trace connected between the first trace and the second trace.
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46.
公开(公告)号:US12046568B2
公开(公告)日:2024-07-23
申请号:US18214742
申请日:2023-06-27
Applicant: Intel Corporation
Inventor: Andrew Collins , Sujit Sharan , Jianyong Xie
IPC: H01L23/66 , H01L21/48 , H01L23/522 , H01L23/528 , H01L23/538 , H01L25/00 , H01L25/16 , H01L23/48
CPC classification number: H01L23/66 , H01L21/4846 , H01L23/5223 , H01L23/5286 , H01L23/5381 , H01L23/5389 , H01L25/16 , H01L25/50 , H01L23/481 , H01L2223/6666 , H01L2223/6672
Abstract: A package substrate is disclosed. The package substrate includes a die package in the package substrate located at least partially underneath a location of a power delivery interface in a die that is coupled to the surface of the package substrate. Connection terminals are accessible on a surface of the die package to provide connection to the die that is coupled to the surface of the package substrate. Metal-insulator-metal layers inside the die package are coupled to the connection terminals.
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公开(公告)号:US11876053B2
公开(公告)日:2024-01-16
申请号:US17144130
申请日:2021-01-07
Applicant: Intel Corporation
Inventor: Henning Braunisch , Chia-Pin Chiu , Aleksandar Aleksov , Hinmeng Au , Stefanie M. Lotz , Johanna M. Swan , Sujit Sharan
IPC: H01L23/538 , H01L23/13 , H01L23/00 , H01L25/065 , H01L21/683
CPC classification number: H01L23/5385 , H01L23/13 , H01L23/5381 , H01L24/14 , H01L24/73 , H01L25/0652 , H01L25/0655 , H01L25/0657 , H01L21/6835 , H01L24/17 , H01L24/45 , H01L24/48 , H01L24/49 , H01L24/81 , H01L2224/0401 , H01L2224/13099 , H01L2224/141 , H01L2224/1403 , H01L2224/16145 , H01L2224/16225 , H01L2224/17181 , H01L2224/32245 , H01L2224/45099 , H01L2224/45147 , H01L2224/48091 , H01L2224/48227 , H01L2224/49175 , H01L2224/73207 , H01L2224/73253 , H01L2224/81001 , H01L2224/81005 , H01L2224/81801 , H01L2225/0651 , H01L2225/06513 , H01L2225/06517 , H01L2225/06562 , H01L2924/00011 , H01L2924/00014 , H01L2924/014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01029 , H01L2924/01032 , H01L2924/01033 , H01L2924/01076 , H01L2924/01079 , H01L2924/10253 , H01L2924/10271 , H01L2924/10329 , H01L2924/12042 , H01L2924/1461 , H01L2924/15153 , H01L2924/19107 , H01L2924/351 , H01L2224/48091 , H01L2924/00014 , H01L2224/49175 , H01L2224/48227 , H01L2924/00 , H01L2224/45147 , H01L2924/00 , H01L2924/01015 , H01L2924/00 , H01L2924/1461 , H01L2924/00 , H01L2924/00014 , H01L2224/45099 , H01L2924/12042 , H01L2924/00 , H01L2924/00014 , H01L2224/0401 , H01L2924/00011 , H01L2924/01005 , H01L2924/00011 , H01L2224/0401
Abstract: A multi-chip package includes a substrate (110) having a first side (111), an opposing second side (112), and a third side (213) that extends from the first side to the second side, a first die (120) attached to the first side of the substrate and a second die (130) attached to the first side of the substrate, and a bridge (140) adjacent to the third side of the substrate and attached to the first die and to the second die. No portion of the substrate is underneath the bridge. The bridge creates a connection between the first die and the second die. Alternatively, the bridge may be disposed in a cavity (615, 915) in the substrate or between the substrate and a die layer (750). The bridge may constitute an active die and may be attached to the substrate using wirebonds (241, 841, 1141, 1541).
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48.
公开(公告)号:US11848259B2
公开(公告)日:2023-12-19
申请号:US16219765
申请日:2018-12-13
Applicant: Intel Corporation
Inventor: Dae-Woo Kim , Sujit Sharan
IPC: H01L23/498 , H01L23/538 , H01L23/13 , H01L25/065 , H01L23/00 , H01L23/48
CPC classification number: H01L23/49827 , H01L23/13 , H01L23/49822 , H01L23/5381 , H01L24/00 , H01L25/0655 , H01L23/48 , H01L24/16 , H01L24/17 , H01L2224/14 , H01L2224/16225 , H01L2224/16238 , H01L2224/171 , H01L2224/1703 , H01L2224/17133 , H01L2224/17177 , H01L2924/1431 , H01L2924/1435 , H01L2924/153 , H01L2924/1517
Abstract: Alternative surfaces for conductive pad layers of silicon bridges for semiconductor packages, and the resulting silicon bridges and semiconductor packages, are described. In an example, a semiconductor structure includes a substrate having a lower insulating layer disposed thereon. The substrate has a perimeter. A metallization structure is disposed on the lower insulating layer. The metallization structure includes conductive routing disposed in a dielectric material stack. First and second pluralities of conductive pads are disposed in a plane above the metallization structure. Conductive routing of the metallization structure electrically connects the first plurality of conductive pads with the second plurality of conductive pads. An upper insulating layer is disposed on the first and second pluralities of conductive pads. The upper insulating layer has a perimeter substantially the same as the perimeter of the substrate.
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49.
公开(公告)号:US11728294B2
公开(公告)日:2023-08-15
申请号:US17518504
申请日:2021-11-03
Applicant: Intel Corporation
Inventor: Andrew Collins , Sujit Sharan , Jianyong Xie
IPC: H01L23/66 , H01L23/522 , H01L23/538 , H01L23/528 , H01L25/00 , H01L21/48 , H01L25/16 , H01L23/48
CPC classification number: H01L23/66 , H01L21/4846 , H01L23/5223 , H01L23/5286 , H01L23/5381 , H01L23/5389 , H01L25/16 , H01L25/50 , H01L23/481 , H01L2223/6666 , H01L2223/6672
Abstract: A package substrate is disclosed. The package substrate includes a die package in the package substrate located at least partially underneath a location of a power delivery interface in a die that is coupled to the surface of the package substrate. Connection terminals are accessible on a surface of the die package to provide connection to the die that is coupled to the surface of the package substrate. Metal-insulator-metal layers inside the die package are coupled to the connection terminals.
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50.
公开(公告)号:US11676889B2
公开(公告)日:2023-06-13
申请号:US17573479
申请日:2022-01-11
Applicant: Intel Corporation
Inventor: Arnab Sarkar , Sujit Sharan , Dae-Woo Kim
IPC: H01L23/498 , H01L23/544 , H01L21/66 , H01L23/58 , H01L25/065 , H01L23/00 , H01L25/18
CPC classification number: H01L23/49827 , H01L22/32 , H01L23/544 , H01L23/585 , H01L24/10 , H01L25/0655 , H01L24/16 , H01L25/18 , H01L2223/54426 , H01L2223/54453 , H01L2224/14 , H01L2224/16227 , H01L2924/1431 , H01L2924/1432 , H01L2924/1434 , H01L2924/1517 , H01L2924/15192 , H01L2924/15313 , H01L2924/3512
Abstract: Guard ring designs enabling in-line testing of silicon bridges for semiconductor packages, and the resulting silicon bridges and semiconductor packages, are described. In an example, a semiconductor structure includes a substrate having an insulating layer disposed thereon. A metallization structure is disposed on the insulating layer. The metallization structure incudes conductive routing disposed in a dielectric material stack. The semiconductor structure also includes a first metal guard ring disposed in the dielectric material stack and surrounding the conductive routing. The first metal guard ring includes a plurality of individual guard ring segments. The semiconductor structure also includes a second metal guard ring disposed in the dielectric material stack and surrounding the first metal guard ring. Electrical testing features are disposed in the dielectric material stack, between the first metal guard ring and the second metal guard ring.
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