Invention Grant
- Patent Title: Metal-free frame design for silicon bridges for semiconductor packages
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Application No.: US18114123Application Date: 2023-02-24
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Publication No.: US12170253B2Publication Date: 2024-12-17
- Inventor: Dae-Woo Kim , Sujit Sharan , Sairam Agraharam
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/538
- IPC: H01L23/538 ; G01R31/27 ; H01L21/66 ; H01L23/00 ; H01L23/498 ; H01L23/522 ; H01L23/544 ; H01L23/58 ; H01L23/14 ; H01L25/065 ; H01L25/18 ; H10B80/00

Abstract:
Metal-free frame designs for silicon bridges for semiconductor packages and the resulting silicon bridges and semiconductor packages are described. In an example, a semiconductor structure includes a substrate having an insulating layer disposed thereon, the substrate having a perimeter. A metallization structure is disposed on the insulating layer, the metallization structure including conductive routing disposed in a dielectric material stack. A first metal guard ring is disposed in the dielectric material stack and surrounds the conductive routing. A second metal guard ring is disposed in the dielectric material stack and surrounds the first metal guard ring. A metal-free region of the dielectric material stack surrounds the second metal guard ring. The metal-free region is disposed adjacent to the second metal guard ring and adjacent to the perimeter of the substrate.
Public/Granted literature
- US20230223361A1 METAL-FREE FRAME DESIGN FOR SILICON BRIDGES FOR SEMICONDUCTOR PACKAGES Public/Granted day:2023-07-13
Information query
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