知搜-全球专利检索

  1. Login
  2. Sign Up

Search Results

244 records (took 0.024 seconds)

    Multiple lens assembly and charged particle beam device comprising the same
    31.
    发明申请
    Multiple lens assembly and charged particle beam device comprising the same 有权
    多透镜组件和包括该多透镜组件的带电粒子束装置

    公开(公告)号：US20060151713A1

    公开(公告)日：2006-07-13

    申请号：US11323017

    申请日：2005-12-30

    Applicant: Pavel Adamec

    Inventor： Pavel Adamec

    IPC: H01J1/50

    CPC classification number: H01J37/12 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/1501 ,  H01J2237/2611 ,  H01J2237/2817

    Abstract: The invention provides a multiple lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of the optical axes of the lens sub units are inclined to each other. Further, the invention provides a charged particle beam device which comprises at least one multiple lens assembly and a method for operating a charged particle beam device.

    Abstract translation: 本发明提供了一种用于带电粒子束装置的多透镜组件1，其包括至少两个透镜子单元2，每个子单元具有光轴3，其中透镜子单元的至少两个光轴倾斜于每个 其他。 此外，本发明提供一种带电粒子束装置，其包括至少一个多透镜组件和用于操作带电粒子束装置的方法。

    Method of identification and quantification of biological molecules and apparatus therefore
    33.
    发明申请
    Method of identification and quantification of biological molecules and apparatus therefore 审中-公开
    因此，鉴定和定量生物分子和仪器的方法

    公开(公告)号：US20050244821A1

    公开(公告)日：2005-11-03

    申请号：US10344650

    申请日：2001-08-16

    Applicant: Ory Zik ,  Elisha Moses ,  Nava Levit-Binnun ,  Ariel Lindner

    Inventor： Ory Zik ,  Elisha Moses ,  Nava Levit-Binnun ,  Ariel Lindner

    IPC: C12Q1/68 ,  G01N33/53 ,  G01N33/543 ,  G01N33/58 ,  G01N33/60

    CPC classification number: G01N33/543 ,  G01N33/54373 ,  G01N33/587 ,  G01N2458/15 ,  H01J2237/1205 ,  H01J2237/2605

    Abstract: A method of detecting binding between first member or members of a binding pair and corresponding second member or members of the binding pair is disclosed. The method comprises interacting a solid support onto which the first member or members of the binding pair being immobilized and arrayed with the corresponding second member or members of the binding pair, the corresponding second member or members of the binding pair being directly or indirectly tagged with a heavy atom; and determining a spatial distribution of the heavy atom over a surface of the solid support, thereby detecting the binding between the first member or members of the binding pair and the corresponding second member or members of the binding pair.

    Abstract translation: 公开了一种检测结合对的第一成员或成员与相应的第二成员或结合对的成员之间的结合的方法。 该方法包括使固体支持物相互作用，其中固定和排列结合对的第一个成员或其成员与相应的第二个成员或结合对的成员，其中相应的第二个成员或结合对的第二个成员被直接或间接标记 一个重的原子 以及确定所述固体支持物表面上所述重质原子的空间分布，从而检测所述结合对的第一成员或所述结合对的相应第二成员或所述结合对的成员之间的结合。

    COMPACT MICROCOLUMN FOR AUTOMATED ASSEMBLY
    34.
    发明申请
    COMPACT MICROCOLUMN FOR AUTOMATED ASSEMBLY 失效
    用于自动组装的紧凑型微型计算机

    公开(公告)号：US20050199821A1

    公开(公告)日：2005-09-15

    申请号：US10799836

    申请日：2004-03-12

    Applicant: Rahul Saini ,  Zoran Jandric

    Inventor： Rahul Saini ,  Zoran Jandric

    IPC: G01K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J37/04 ,  H01J37/067 ,  H01L21/44 ,  H05K1/00

    CPC classification number: H01J37/04 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/28 ,  H01J37/3177 ,  H01J2237/03 ,  H01J2237/0492 ,  H01J2237/1205

    Abstract: A microcolumn including an assembly substrate and a plurality of beam modification components. The assembly substrate includes a plurality of sockets, and the beam modification components each include a connector coupled to a corresponding one of the sockets. Assembly of the beam modification components to the assembly substrate may employ automation and/or automated calibration, including automated motion of robotic stages in a substantially automated manner.

    Abstract translation: 包括组装衬底和多个束修改组件的微柱。 组装衬底包括多个插座，并且光束修改部件各自包括连接到对应的一个插座的连接器。 将束修改部件组装到组装衬底可以采用自动化和/或自动校准，包括基本自动化的机器人级的自动运动。

    Apparatus for generating a plurality of beamlets
    36.
    发明申请
    Apparatus for generating a plurality of beamlets 有权
    用于产生多个子束的装置

    公开(公告)号：US20040232349A1

    公开(公告)日：2004-11-25

    申请号：US10797364

    申请日：2004-03-10

    Inventor： Pieter Kruit

    IPC: H01J003/26 ,  H01J003/14

    CPC classification number: H01J3/07 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/063 ,  H01J37/12 ,  H01J37/153 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/151 ,  H01J2237/1536 ,  H01J2237/26 ,  H01J2237/31774

    Abstract: The invention relates to an apparatus for generating a plurality of charged particle beamlets, comprising a charged particle source for generating a diverging charged particle beam, a converging means for refracting said diverging charged particle beam and a lens array comprising a plurality of lenses, wherein said lens array is located between said charged particle source and said converging means. In this way, it is possible to reduce aberrations of the converging means.

    Abstract translation: 本发明涉及一种用于产生多个带电粒子束的装置，包括用于产生发散带电粒子束的带电粒子源，用于折射所述发散带电粒子束的会聚装置和包括多个透镜的透镜阵列，其中所述 透镜阵列位于所述带电粒子源和所述会聚装置之间。 以这种方式，可以减小会聚装置的像差。

    Multi-beam exposure apparatus using a multi- axis electron lens, electron lens convergencing a plurality of electron beam and fabrication method of a semiconductor device
    37.
    发明申请
    Multi-beam exposure apparatus using a multi- axis electron lens, electron lens convergencing a plurality of electron beam and fabrication method of a semiconductor device 审中-公开
    使用多轴电子透镜的多光束曝光装置，会聚有多个电子束的电子透镜以及半导体装置的制造方法

    公开(公告)号：US20030189180A1

    公开(公告)日：2003-10-09

    申请号：US09824881

    申请日：2001-04-04

    Inventor： Shinichi Hamaguchi ,  Takeshi Haraguchi ,  Hiroshi Yasuda

    IPC: G21G005/00 ,  A61N005/00

    CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/3177 ,  H01J2237/0635 ,  H01J2237/1205

    Abstract: An electron beam exposure apparatus for exposing a wafer with a plurality of electron beams has a multi-axis that includes: a plurality of magnetic conductive member arranged to be substantially parallel to each other, the magnetic conductive members having a plurality of openings; and a non-magnetic conductive member provided between the magnetic conductive members, the non-magnetic conductive member having a plurality of through holes. The openings of the magnetic conductive members and the through holes of the non-magnetic conductive members form together a plurality of lens openings operable to converge the electron beams independently of each other by allowing the electron beams to pass therethrough, respectively.

    Abstract translation: 用于使多个电子束曝光晶片的电子束曝光装置具有多轴，其包括：多个导电构件，其被布置为基本上彼此平行，所述导电构件具有多个开口; 以及设置在所述导磁部件之间的非磁性导电部件，所述非磁性导电部件具有多个通孔。 磁性导电部件的开口和非磁性导电部件的通孔分别通过允许电子束通过其中而分别彼此独立地会聚电子束的多个透镜开口形成多个透镜开口。

    Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method
    39.
    发明申请
    Electron optical system, charged-particle beam exposure apparatus using the same, and device manufacturing method 失效
    电子光学系统，带电粒子束曝光装置及其制造方法

    公开(公告)号：US20020000766A1

    公开(公告)日：2002-01-03

    申请号：US09819907

    申请日：2001-03-29

    Inventor： Haruhito Ono ,  Takayuki Yagi

    IPC: H01J001/53

    CPC classification number: H01J37/12 ,  H01J2237/1205 ,  H01J2237/31774

    Abstract: An electron optical system of this invention includes, e.g., an upper electrode having a plurality of apertures, a plurality of middle electrodes having a plurality of aligned apertures, a lower electrode having a plurality of apertures, and a shield interposed between adjacent middle electrodes.

    Abstract translation: 本发明的电子光学系统包括例如具有多个孔的上部电极，具有多个对准的孔的多个中间电极，具有多个孔的下部电极以及插入相邻的中间电极之间的屏蔽。

Patent Agency Ranking