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    Electron spectroscopy
    33.
    发明授权
    Electron spectroscopy 有权
    电子光谱学

    公开(公告)号：US08481931B2

    公开(公告)日：2013-07-09

    申请号：US12482577

    申请日：2009-06-11

    Applicant: Simon Page

    Inventor： Simon Page

    IPC: G21K5/00 ,  H01J37/26

    CPC classification number: H01J37/05 ,  G01N23/2273 ,  H01J37/08 ,  H01J37/295 ,  H01J37/30 ,  H01J2237/05 ,  H01J2237/08 ,  H01J2237/0815

    Abstract: The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a delay line detector) for detecting electrons emitted from the sample and an ion gun (8) for delivering a polycyclic aromatic hydrocarbon (PAH) ion beam to the sample, wherein the ion gun comprises a polycyclic aromatic hydrocarbon ion source, for example comprising coronene. In an embodiment, the PAH is located in a heated chamber (22) and vaporised to produce gas phase PAH. The gas phase PAH molecules are then ionised by electron impact, extracted from the ion source via an extraction field and focussed using ion optics. The PAH ion beam can be used for surface cleaning and depth analysis.

    Abstract translation: 本发明提供了一种包括用于照射样品的高能粒子源（12），用于检测从样品发射的电子的电子检测器系统（16）（例如包括延迟线检测器）的电子能谱装置（12） 用于将多环芳烃（PAH）离子束输送到样品的枪（8），其中所述离子枪包括多环芳族烃离子源，例如包含芳烃。 在一个实施方案中，PAH位于加热室（22）中并蒸发以产生气相PAH。 气相PAH分子然后通过电子轰击电离，通过提取场从离子源提取，并使用离子光学聚焦。 PAH离子束可用于表面清洁和深度分析。

    Low contamination, low energy beamline architecture for high current ion implantation
    35.
    发明授权
    Low contamination, low energy beamline architecture for high current ion implantation 有权
    低电流离子注入的低污染，低能束线架构

    公开(公告)号：US07994488B2

    公开(公告)日：2011-08-09

    申请号：US12108890

    申请日：2008-04-24

    Applicant: Yongzhang Huang

    Inventor： Yongzhang Huang

    IPC: G21K1/00

    CPC classification number: H01J37/3171 ,  H01J37/20 ,  H01J37/3007 ,  H01J2237/022 ,  H01J2237/05 ,  H01J2237/202 ,  H01J2237/24528

    Abstract: An ion implantation system comprising an ion source that generates an ion beam along a beam path, a mass analyzer component downstream of the ion source that performs mass analysis and angle correction on the ion beam, a resolving aperture electrode comprising at least one electrode downstream of the mass analyzer component and along the beam path having a size and shape according to a selected mass resolution and a beam envelope, a deflection element downstream of the resolving aperture electrode that changes the path of the ion beam exiting the deflection element, a deceleration electrode downstream of the deflection element that decelerates the ion beam, a support platform within an end station for retaining and positioning a workpiece which is implanted with charged ions, and wherein the end station is mounted approximately eight degrees counterclockwise so that the deflected ion beam is perpendicular to the workpiece.

    Abstract translation: 一种离子注入系统，包括沿光束路径产生离子束的离子源，离子源下游的质量分析器组件，其对离子束执行质量分析和角度校正;分辨孔径电极，包括至少一个电极 所述质量分析器部件并且沿着所述光束路径具有根据所选择的质量分辨率和光束包络的尺寸和形状;在所述分辨孔径电极下游的偏转元件改变离开偏转元件的离子束的路径;减速电极 在偏转元件的下游，使离子束减速，在终端站内的支撑平台，用于保持和定位植入有带电离子的工件，并且其中终端站逆时针安装大约八度，使得偏转的离子束垂直 到工件。

    Apparatus and method for partial ion implantation
    36.
    发明授权
    Apparatus and method for partial ion implantation 失效
    用于部分离子注入的装置和方法

    公开(公告)号：US07728312B2

    公开(公告)日：2010-06-01

    申请号：US11957914

    申请日：2007-12-17

    Applicant: Kyong Bong Rouh ,  Dong Seok Kim

    Inventor： Kyong Bong Rouh ,  Dong Seok Kim

    IPC: H01J37/317 ,  H01J37/08 ,  G21K5/10

    CPC classification number: H01J37/3171 ,  H01J37/3172 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/05 ,  H01L21/26513

    Abstract: An apparatus and method for partial ion implantation, which desirably provide control over the energy of the implanted dopants, generally includes an ion beam generator, and first and second deceleration units. The first deceleration unit decelerates the energy of an ion beam generated by the ion beam generator; and a subsequent, second deceleration unit further decelerates the energy into different energy levels according to regions of a wafer into which the ions are to be implanted.

    Abstract translation: 用于部分离子注入的装置和方法，其期望地提供对注入的掺杂剂的能量的控制，通常包括离子束发生器以及第一和第二减速单元。 第一减速单元减速由离子束发生器产生的离子束的能量; 并且随后的第二减速单元根据要离子注入的晶片的区域进一步将能量减速到不同的能级。

    ELECTRON SPECTROSCOPY
    37.
    发明申请
    ELECTRON SPECTROSCOPY 有权
    电子光谱

    公开(公告)号：US20090309023A1

    公开(公告)日：2009-12-17

    申请号：US12482577

    申请日：2009-06-11

    Applicant: Simon Page

    Inventor： Simon Page

    IPC: G01N23/00

    CPC classification number: H01J37/05 ,  G01N23/2273 ,  H01J37/08 ,  H01J37/295 ,  H01J37/30 ,  H01J2237/05 ,  H01J2237/08 ,  H01J2237/0815

    Abstract: The present invention provides an electron spectroscopy apparatus (12) comprising a high energy particle source (12) for irradiating a sample, an electron detector system (16) (e.g. including a delay line detector) for detecting electrons emitted from the sample and an ion gun (8) for delivering a polycyclic aromatic hydrocarbon (PAH) ion beam to the sample, wherein the ion gun comprises a polycyclic aromatic hydrocarbon ion source, for example comprising coronene. In an embodiment, the PAH is located in a heated chamber (22) and vaporised to produce gas phase PAH. The gas phase PAH molecules are then ionised by electron impact, extracted from the ion source via an extraction field and focussed using ion optics. The PAH ion beam can be used for surface cleaning and depth analysis.

    Abstract translation: 本发明提供了一种包括用于照射样品的高能粒子源（12），用于检测从样品发射的电子的电子检测器系统（16）（例如包括延迟线检测器）的电子分光装置（12） 用于将多环芳烃（PAH）离子束输送到样品的枪（8），其中所述离子枪包括多环芳族烃离子源，例如包含芳烃。 在一个实施方案中，PAH位于加热室（22）中并蒸发以产生气相PAH。 气相PAH分子然后通过电子轰击电离，通过提取场从离子源提取，并使用离子光学聚焦。 PAH离子束可用于表面清洁和深度分析。

    TECHNIQUES FOR COMMENSURATE CUSP-FIELD FOR EFFECTIVE ION BEAM NEUTRALIZATION
    38.
    发明申请
    TECHNIQUES FOR COMMENSURATE CUSP-FIELD FOR EFFECTIVE ION BEAM NEUTRALIZATION 有权
    用于有意义的离子束中和的通用现场技术

    公开(公告)号：US20090095894A1

    公开(公告)日：2009-04-16

    申请号：US11872576

    申请日：2007-10-15

    Applicant: Bon Woong Koo ,  Frank Sinclair

    Inventor： Bon Woong Koo ,  Frank Sinclair

    IPC: H05H3/02

    CPC classification number: H01J37/026 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/04 ,  H01J2237/05

    Abstract: Techniques for commensurate cusp-field for effective ion beam neutralization are disclosed. In one particular exemplary embodiment, the techniques may be realized as a charged particle injection system comprising a beamguide configured to transport an ion beam through a dipole field. The charged particle injection system may also comprise a first array of magnets and a second array of magnets configured to generate a multi-cusp magnetic field, positioned along at least a portion of an ion beam path, the first array of magnets being on a first side of the ion beam path and the second array of magnets being on a second side of the ion beam path. The charged particle injection system may further comprise a charged particle source having one or more apertures configured to inject charged particles into the ion beam path. The charged particle injection system may furthermore align the one or more apertures with at least one of the first array of magnets and the second array of magnets to align the injected charged particles from the charged particle source with one or more magnetic regions for an effective charged particle diffusion into the ion beam path.

    Abstract translation: 公开了用于有效离子束中和的相应尖点的技术。 在一个特定的示例性实施例中，技术可以被实现为带电粒子注入系统，其包括配置成将离子束传送通过偶极子场的波导。 带电粒子注入系统还可以包括第一磁体阵列和配置成产生沿离子束路径的至少一部分定位的多尖点磁场的第二磁体阵列，第一磁体阵列位于第一 离子束路径的一侧和第二磁体阵列位于离子束路径的第二侧上。 带电粒子注入系统还可以包括具有一个或多个孔的带电粒子源，其被配置为将带电粒子注入到离子束路径中。 带电粒子注入系统还可以将一个或多个孔与第一磁体阵列和第二磁体阵列中的至少一个对准，以将来自带电粒子源的注入的带电粒子与一个或多个磁性区域对准，用于有效带电 粒子扩散入离子束路径。

    Ion implantation monitor system and method thereof
    39.
    发明申请
    Ion implantation monitor system and method thereof 审中-公开
    离子注入监测系统及其方法

    公开(公告)号：US20060033041A1

    公开(公告)日：2006-02-16

    申请号：US11203002

    申请日：2005-08-11

    Applicant: Shian-Jyh Lin ,  Yuan-Song Tai

    Inventor： Shian-Jyh Lin ,  Yuan-Song Tai

    IPC: B01D59/44

    CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J2237/05 ,  H01J2237/24405 ,  H01J2237/2446 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/31703

    Abstract: An ion beam energy monitor system and method thereof. A physical field generator generates a physical field in a direction not parallel to an ion beam, refracting the ion beam, and a receiving device located on the path of the refracted ion beam receives the ion beam and calculates the energy thereof according to a collision distribution of ions of the ion beam. The output energy of the ion beam is thus being well adjusted.

    Abstract translation: 一种离子束能量监测系统及其方法。 物理场发生器在不平行于离子束的方向上产生物理场，折射离子束，位于折射离子束路径上的接收装置接收离子束并根据碰撞分布计算其能量 的离子束离子。 因此，离子束的输出能量被很好地调节。

    Bio electron microscope and observation method of specimen
    40.
    发明申请
    Bio electron microscope and observation method of specimen 失效
    生物电子显微镜和样品观察方法

    公开(公告)号：US20040135083A1

    公开(公告)日：2004-07-15

    申请号：US10621444

    申请日：2003-07-18

    Inventor： Hiroshi Kakibayashi ,  Shigeyuki Hosoki ,  Yuji Takagi ,  Ryo Miyake ,  Kuniyasu Nakamura ,  Mitsugu Sato ,  Hiroyuki Kobayashi

    IPC: G01N023/04 ,  G01N023/225

    CPC classification number: H01J37/22 ,  H01J37/26 ,  H01J2237/05 ,  H01J2237/2809 ,  H01J2237/2813

    Abstract: A bio electron microscope and an observation method which can observe a bio specimen by low damage and high contrast to perform high-accuracy image analysis, and conduct high-throughput specimen preparation. 1) A specimen is observed at an accelerating voltage 1.2 to 4.2 times a critical electron accelerating voltage possible to transmit a specimen obtained under predetermined conditions. 2) An electron energy filter of small and simplified construction is provided between the specimen and an electron detector for imaging by the electron beam in a specified energy region of the electron beams transmitting the specimen. 3) Similarity between an observed image such as virus or protein in the specimen and a reference image such as known virus or protein is subjected to quantitative analysis by image processing. 4) A preparation protocol of the bio specimen is made into a chip using an MEMS technique, which is then mounted on a specimen stage part of an electron microscope to conduct specimen introduction, preparation and transfer onto a specimen holder.

    Abstract translation: 一种生物电子显微镜和观察方法，可以通过低损伤和高对比度观察生物样品，进行高精度图像分析，并进行高通量样品制备。 1）在可能传输在预定条件下获得的样品的临界电子加速电压的1.2至4.2倍的加速电压下观察样品。 2）在样品和电子检测器之间提供小而简化结构的电子能过滤器，用于通过电子束在传输样品的电子束的规定能量区域内的电子束进行成像。 3）通过图像处理对样本中的观察图像（例如病毒或蛋白质）与已知病毒或蛋白质等参考图像之间的相似性进行定量分析。 4）使用MEMS技术将生物样品的制备方案制成芯片，然后将其安装在电子显微镜的样品台部分上，以将样品引入，准备和转移到样品架上。

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