Invention Grant
- Patent Title: Method of using a direct electron detector for a TEM
- Patent Title (中): 使用TEM的直接电子检测器的方法
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Application No.: US13096865Application Date: 2011-04-28
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Publication No.: US08592762B2Publication Date: 2013-11-26
- Inventor: Uwe Luecken , Alan Frank de Jong , Gerrit Cornelis van Hoften , Frank Jeroen Pieter Schuurmans
- Applicant: Uwe Luecken , Alan Frank de Jong , Gerrit Cornelis van Hoften , Frank Jeroen Pieter Schuurmans
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP10161243 20100428
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
A method of using a direct electron detector in a TEM, in which an image with a high intensity peak, such as a diffractogram or an EELS spectrum, is imaged on said detector. As known the high intensity peak may damage the detector. To avoid this damage, the center of the image is moved, as a result of which not one position of the detector is exposed to the high intensity, but the high intensity is smeared over the detector, displacing the high intensity peak before damage results.
Public/Granted literature
- US20110266439A1 Method of Using a Direct Electron Detector for a TEM Public/Granted day:2011-11-03
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