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    PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCE
    31.
    发明申请
    PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCE 有权
    用于激光持续等离子体光源的等离子体电池

    公开(公告)号：US20130106275A1

    公开(公告)日：2013-05-02

    申请号：US13647680

    申请日：2012-10-09

    Applicant: KLA- Tencor Corporation

    Inventor： Anant Chimmalgi ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Rajeev Patil

    IPC: H01J61/52 ,  H01J61/28

    CPC classification number: H01J61/526 ,  H01J61/28 ,  H01J65/04

    Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.

    Abstract translation: 用于激光维持等离子体光源的可再填充等离子体单元包括等离子体灯泡，灯泡由对所选波长的辐射基本上透明的玻璃材料形成，气体端口组件可操作地连接到 所述灯泡并且设置在所述气体灯泡的第一部分处，其中所述灯泡构造成经由所述气体端口组件选择性地从气体源接收气体。

    Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
    36.
    发明授权
    Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures 有权
    通过调节和控制灯工作温度来减少热应力的方法和装置

    公开(公告)号：US09534848B2

    公开(公告)日：2017-01-03

    申请号：US13975945

    申请日：2013-08-26

    Applicant: KLA-Tencor Corporation

    Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

    IPC: F21V29/00 ,  F28C3/04 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60 ,  F21V19/00

    CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

    Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

    System and Method for Inhibiting Radiative Emission of a Laser-Sustained Plasma Source
    37.
    发明申请
    System and Method for Inhibiting Radiative Emission of a Laser-Sustained Plasma Source 有权
    用于抑制激光持续等离子体源的辐射发射的系统和方法

    公开(公告)号：US20160205758A1

    公开(公告)日：2016-07-14

    申请号：US14989348

    申请日：2016-01-06

    Applicant: KLA-Tencor Corporation

    Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Kenneth P. Gross ,  Richard Solarz ,  Lauren Wilson ,  Rahul Yadav ,  Joshua Wittenberg ,  Anant Chimmalgi ,  Xiumei Liu ,  Brooke Bruguier

    IPC: H05G2/00

    CPC classification number: H05G2/008 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H05G2/003

    Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

    Abstract translation: 用于形成激光维持等离子体的系统包括气体容纳元件，被配置为产生泵浦照明的照明源和收集器元件。 气体容纳元件构造成容纳一定体积的气体混合物。 收集器元件被配置为将来自泵送源的泵浦照明聚焦到容纳在气体容纳元件内的气体混合物的体积中，以便在发射宽带辐射的气体混合物的体积内产生等离子体。 气体混合物过滤由等离子体发射的一个或多个选定波长的辐射。

    Open Plasma Lamp for Forming a Light-Sustained Plasma
    38.
    发明申请
    Open Plasma Lamp for Forming a Light-Sustained Plasma 有权

    公开(公告)号：US20160163516A1

    公开(公告)日：2016-06-09

    申请号：US15043804

    申请日：2016-02-15

    Applicant: KLA-Tencor Corporation

    Inventor： Lauren Wilson ,  Anant Chimmalgi ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Gildardo Delgado

    IPC: H01J37/32 ,  H01J65/04

    CPC classification number: H01J37/32339 ,  H01J37/32449 ,  H01J65/04

    Abstract: An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

    High Power Broadband Light Source
    40.
    发明申请
    High Power Broadband Light Source 有权
    大功率宽带光源

    公开(公告)号：US20150333471A1

    公开(公告)日：2015-11-19

    申请号：US14667235

    申请日：2015-03-24

    Applicant: KLA-Tencor Corporation

    Inventor： Anant Chimmalgi ,  Rahul Yadav ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Matthew Derstine

    IPC: H01S3/0915 ,  H01S3/00 ,  H05G2/00

    CPC classification number: H01S3/0915 ,  G02B6/2804 ,  G02B6/4296 ,  H01S3/0071 ,  H01S3/2383 ,  H05G2/008

    Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.

    Abstract translation: 用于产生高功率宽带光的系统包括多个光持续等离子体光源。 光源中的每一个包括泵送源，用于容纳气体并被配置为从泵浦源接收泵浦照明的气体容纳结构和抛物面反射器元件，抛物面反射器元件被布置成收集所产生的宽度辐射的至少一部分 等离子体并形成准直宽带辐射输出。 该系统还包括一组光学元件，其被配置为将来自多个光持久等离子体光源的抛物面反射器元件的准直宽带输出组合成聚集的宽带光束。

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