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    Hermetic sealing of a nonlinear crystal for use in a laser system
    1.
    发明授权
    Hermetic sealing of a nonlinear crystal for use in a laser system 有权

    公开(公告)号：US11119384B2

    公开(公告)日：2021-09-14

    申请号：US16133611

    申请日：2018-09-17

    Applicant: KLA-Tencor Corporation

    Inventor： Rajeev Patil ,  David Ramirez ,  Yevgeniy Churin ,  William Replogle

    IPC: G02F1/35 ,  H01L21/67 ,  H01S3/00

    Abstract: Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.

    PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCE
    2.
    发明申请
    PLASMA CELL FOR LASER-SUSTAINED PLASMA LIGHT SOURCE 有权
    用于激光持续等离子体光源的等离子体电池

    公开(公告)号：US20130106275A1

    公开(公告)日：2013-05-02

    申请号：US13647680

    申请日：2012-10-09

    Applicant: KLA- Tencor Corporation

    Inventor： Anant Chimmalgi ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Rajeev Patil

    IPC: H01J61/52 ,  H01J61/28

    CPC classification number: H01J61/526 ,  H01J61/28 ,  H01J65/04

    Abstract: A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.

    Abstract translation: 用于激光维持等离子体光源的可再填充等离子体单元包括等离子体灯泡，灯泡由对所选波长的辐射基本上透明的玻璃材料形成，气体端口组件可操作地连接到 所述灯泡并且设置在所述气体灯泡的第一部分处，其中所述灯泡构造成经由所述气体端口组件选择性地从气体源接收气体。

    Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures
    4.
    发明申请
    Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures 有权
    通过调节和控制灯泡工作温度来减少热应力的方法和装置

    公开(公告)号：US20140060792A1

    公开(公告)日：2014-03-06

    申请号：US13975945

    申请日：2013-08-26

    Applicant: KLA-Tencor Corporation

    Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

    IPC: F28C3/04

    CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

    Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

    HERMETIC SEALING OF A NONLINEAR CRYSTAL FOR USE IN A LASER SYSTEM
    5.
    发明申请
    HERMETIC SEALING OF A NONLINEAR CRYSTAL FOR USE IN A LASER SYSTEM 审中-公开

    公开(公告)号：US20190094653A1

    公开(公告)日：2019-03-28

    申请号：US16133611

    申请日：2018-09-17

    Applicant: KLA-Tencor Corporation

    Inventor： Rajeev Patil ,  David Ramirez ,  Yevgeniy Churin ,  William Replogle

    IPC: G02F1/35 ,  H01L21/67 ,  H01S3/00

    Abstract: Disclosed are methods and apparatus for hermetically sealing a nonlinear optical (NLO) crystal for use in a laser system. A mounted NLO crystal, an enclosure base, a lid, and a plurality of window components are moved into an oven. A vacuum bake process is then performed on the mounted NLO crystal, enclosure base, lid, and plurality of window components until a humidity level that is less than a predefined amount is reached. The mounted NLO crystal, enclosure base, lid, and plurality of window components are moved from the oven onto a stage of a glove box that includes a sealing tool. In the glove box, the mounted NLO crystal is hermetically sealed into the enclosure base by sealing the lid and plurality of window components into openings of the enclosure base.

    Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures
    8.
    发明授权
    Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures 有权
    通过调节和控制灯工作温度来减少热应力的方法和装置

    公开(公告)号：US09534848B2

    公开(公告)日：2017-01-03

    申请号：US13975945

    申请日：2013-08-26

    Applicant: KLA-Tencor Corporation

    Inventor： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

    IPC: F21V29/00 ,  F28C3/04 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60 ,  F21V19/00

    CPC classification number: F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

    Abstract: A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

    Abstract translation: 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

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