公开(公告)号：US20080191134A1

公开(公告)日：2008-08-14

申请号：US11923421

申请日：2007-10-24

Applicant: Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

Inventor： Gilad Almogy ,  Dror Shemesh ,  Pavel Adamec

IPC: G01N23/00 ,  G01T1/00

CPC classification number: H01J37/244 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2446 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2804

Abstract: A charged particle detector assembly comprises a particle detector, which has at least one particle sensitive region for detecting at least a portion of the spatial distribution of charged particles and for generating a two-dimensional optical signal which correlates to the detected spatial distribution. Further, an image conduit has an input coupled to the particle sensitive region of the particle detector for transmitting the two-dimensional optical signal to at least one optical detector. Further, a selecting means is adapted for selecting at least a portion of the two-dimensional optical signal.

Abstract translation: 带电粒子检测器组件包括粒子检测器，该粒子检测器具有至少一个用于检测带电粒子的空间分布的至少一部分的粒子敏感区域，并用于产生与检测到的空间分布相关的二维光信号。 此外，图像导管具有耦合到粒子检测器的粒子敏感区域的输入端，用于将二维光信号传输到至少一个光学检测器。 此外，选择装置适于选择二维光信号的至少一部分。

公开(公告)号：US20080061244A1

公开(公告)日：2008-03-13

申请号：US11849768

申请日：2007-09-04

Applicant: PAVEL ADAMEC

Inventor： PAVEL ADAMEC

IPC: G01T1/20

CPC classification number: H01J37/244 ,  H01J2237/2443

Abstract: An assembly for a detection unit for an optical device is described. The assembly includes a scintillator adapted to received secondary particles and, in response, generate photons, wherein the scintillator includes an opening for trespassing of a primary beam through the scintillator. The scintillator including the opening is asymmetrical with regard to one axis.

Abstract translation: 描述了用于光学装置的检测单元的组件。 该组件包括适于接收的二次粒子的闪烁体，并且作为响应产生光子，其中闪烁体包括用于侵入通过闪烁体的初级束的开口。 包括开口的闪烁体相对于一个轴线是不对称的。

公开(公告)号：US20070001574A1

公开(公告)日：2007-01-04

申请号：US11426544

申请日：2006-06-26

Applicant: FANG ZHOU ,  PAVEL ADAMEC

Inventor： FANG ZHOU ,  PAVEL ADAMEC

IPC: H01J1/02

CPC classification number: H01J1/3044 ,  H01J37/06 ,  H01J2209/017 ,  H01J2209/0226 ,  H01J2237/06341

Abstract: A field emitter arrangement is provided, said field emitter arrangement comprising a field emitter tip having an emitting surface, and at least one light source adapted to illuminate the emitting surface of the field emitter tip. Furthermore, a method of cleaning an emitting surface of a field emitter tip is provided, the method comprising the steps of: providing a field emitter tip having an emitting surface and a light source and illuminating the emitting surface of the field emitter tip with the light source.

Abstract translation: 提供场发射器布置，所述场发射器布置包括具有发射表面的场发射器尖端，以及适于照射场发射器尖端的发射表面的至少一个光源。 此外，提供了一种清洁场发射器尖端的发射表面的方法，该方法包括以下步骤：提供具有发射表面和光源的场发射器尖端，并用光照射场发射器尖端的发射表面 资源。

公开(公告)号：US20060226753A1

公开(公告)日：2006-10-12

申请号：US11387090

申请日：2006-03-22

Applicant: Pavel Adamec ,  Stefan Lanio

Inventor： Pavel Adamec ,  Stefan Lanio

IPC: H01J9/02

CPC classification number: H01J1/135 ,  H01J1/18 ,  H01J37/07 ,  H01J37/242 ,  H01J2237/06316

Abstract: An emitter for a charged particle beam apparatus is provided, said emitter comprising a filament extending between and being attached to first and second supports, an emitter tip attached to the filament, and a stabilization element attached to a third support and to the filament, wherein the first, second and third supports define a triangle so that the stabilization element extends at least partially in a direction perpendicular to the direction in which the filament extends.

Abstract translation: 提供了一种用于带电粒子束装置的发射器，所述发射器包括在第一和第二支撑件之间延伸并连接到第一和第二支撑件的灯丝，连接到灯丝的发射极尖端以及连接到第三支撑件和灯丝的稳定元件，其中 第一，第二和第三支撑件限定三角形，使得稳定元件至少部分地沿垂直于灯丝延伸方向的方向延伸。

公开(公告)号：US20060169910A1

公开(公告)日：2006-08-03

申请号：US10539179

申请日：2003-12-12

Applicant: Jugen Frosien ,  Pavel Adamec

Inventor： Jugen Frosien ,  Pavel Adamec

IPC: H01J1/50

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/145 ,  H01J37/3177

Abstract: The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.

Abstract translation: 本发明提供了一种用于带电粒子多光束系统的光学系统。 光学系统包括静电透镜部件和磁性透镜部件。 这些部件用于将多个带电粒子束聚焦在分开的开口中，用于至少多个穿过光学系统的带电粒子束中的每一个。

公开(公告)号：US20060151713A1

公开(公告)日：2006-07-13

申请号：US11323017

申请日：2005-12-30

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H01J1/50

CPC classification number: H01J37/12 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/1205 ,  H01J2237/121 ,  H01J2237/1405 ,  H01J2237/1501 ,  H01J2237/2611 ,  H01J2237/2817

Abstract: The invention provides a multiple lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of the optical axes of the lens sub units are inclined to each other. Further, the invention provides a charged particle beam device which comprises at least one multiple lens assembly and a method for operating a charged particle beam device.

Abstract translation: 本发明提供了一种用于带电粒子束装置的多透镜组件1，其包括至少两个透镜子单元2，每个子单元具有光轴3，其中透镜子单元的至少两个光轴倾斜于每个 其他。 此外，本发明提供一种带电粒子束装置，其包括至少一个多透镜组件和用于操作带电粒子束装置的方法。

公开(公告)号：US06943349B2

公开(公告)日：2005-09-13

申请号：US10258869

申请日：2001-04-27

Applicant: Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

Inventor： Pavel Adamec ,  Ralf Degenhardt ,  Hans-Peter Feuerbaum ,  Harry Munack ,  Dieter Winkler

IPC: G01Q30/02 ,  H01J37/04 ,  H01J37/09 ,  H01J37/26 ,  G21K1/08 ,  G01N23/00 ,  H01J3/14 ,  H01J37/28

CPC classification number: H01J37/04 ,  H01J37/09 ,  H01J37/266

Abstract: The present invention provides an improved column for a charged particle beam device. The column comprises an aperture plate having multiple apertures to produce multiple beams of charged particles and a deflector to influence the beams of charged particles so that each beam appears to come from a different source. Furthermore, an objective lens is used in order to focus the charged-particle beams onto the specimen. Due to the deflector, multiple images of the source are created on the surface of the specimen whereby all the images can be used for parallel data acquisition. Accordingly, the speed of data acquisition is increased. With regard to the focusing properties of the objective lens, the beams of charged particles can basically be treated as independent particle beams which do not negatively affect each other. Accordingly, each beam basically provides the same resolution as the beam of a conventional charged particle beam device.

Abstract translation: 本发明提供了一种用于带电粒子束装置的改进的柱。 柱包括具有多个孔的孔板，以产生多个带电粒子束和偏转器，以影响带电粒子束，使得每个束似乎来自不同的源。 此外，使用物镜以将带电粒子束聚焦到样本上。 由于偏转器，在样品的表面上产生了源的多个图像，从而所有图像可以用于并行数据采集。 因此，数据采集的速度增加。 关于物镜的聚焦特性，带电粒子束基本上可以被视为不会相互影响的独立的粒子束。 因此，每个光束基本上提供与常规带电粒子束装置的光束相同的分辨率。

公开(公告)号：US06825476B2

公开(公告)日：2004-11-30

申请号：US10182226

申请日：2002-09-26

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H01J37317

CPC classification number: H01J37/153 ,  H01J37/147 ,  H01J2237/04737 ,  H01J2237/04924

Abstract: An improved column for a charged particle beam device is constituted by, among other things, deflectors for scanning the beam over the specimen, for aligning the beam with regard to the objective and for compensating aberrations caused by the objective. Thereby, the total number of electrode arrangements and/or coil arrangements that are used for the deflectors and that are independently controllable, is 8 or less.

Abstract translation: 用于带电粒子束装置的改进的列尤其包括用于扫描样品上的束的偏转器，用于使光束相对于物镜对准并且用于补偿由物镜引起的像差。 因此，用于偏转器并且可独立控制的电极布置和/或线圈布置的总数为8个或更小。

公开(公告)号：US08674300B2

公开(公告)日：2014-03-18

申请号：US12910502

申请日：2010-10-22

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H05B37/02

CPC classification number: H01J37/073 ,  H01J2237/022 ,  H01J2237/0653 ,  H01J2237/2485

Abstract: A method and a device for stabilizing the emission current of an emitter of a charged particle beam device are provided. In the method, the emitter is operated under predetermined operation parameters including at least one voltage with a predetermined value. The method includes determining a first value of the emission current under the predetermined operation parameters and flash cleaning the emitter while a first electric field is applied to the emitter. The first electric field is generated by the at least one voltage having a first value of the at least one voltage, wherein the first value of the at least one voltage is provided in dependence of the determined first value of the emission current.

Abstract translation: 提供一种用于稳定带电粒子束装置的发射极的发射电流的方法和装置。 在该方法中，发射器在包括至少一个具有预定值的电压的预定操作参数下运行。 该方法包括在预定操作参数下确定发射电流的第一值，并且在向发射器施加第一电场时闪光清洁发射器。 第一电场由具有至少一个电压的第一值的至少一个电压产生，其中根据确定的发射电流的第一值提供至少一个电压的第一值。

公开(公告)号：US08044368B2

公开(公告)日：2011-10-25

申请号：US12047614

申请日：2008-03-13

Applicant: Pavel Adamec

Inventor： Pavel Adamec

IPC: H01J1/50

CPC classification number: H01J37/141 ,  H01J2237/002 ,  H01J2237/1405

Abstract: A magnetic lens for a charged particle beam device and a charged particle beam device are provided. The magnetic lens includes a coil with coil windings to be excited for generation of a magnetic field, a pole piece to guide the magnetic field, a heat shield, which is connected to a cooling system, and a thermal insulation layer provided between the heat shield and the coil.

Abstract translation: 提供了一种用于带电粒子束装置和带电粒子束装置的磁透镜。 磁性透镜包括具有用于产生磁场的被激励的线圈绕组的线圈，用于引导磁场的极片，连接到冷却系统的隔热层和设置在隔热层之间的绝热层 和线圈。