METHOD OF MANUFACTURING LIQUID JET HEAD, LIQUID JET HEAD, AND LIQUID JET APPARATUS
    21.
    发明申请
    METHOD OF MANUFACTURING LIQUID JET HEAD, LIQUID JET HEAD, AND LIQUID JET APPARATUS 有权
    液体喷射头,液体喷射头和液体喷射装置的制造方法

    公开(公告)号:US20150258792A1

    公开(公告)日:2015-09-17

    申请号:US14639233

    申请日:2015-03-05

    IPC分类号: B41J2/16

    摘要: A method of manufacturing a liquid jet head includes: a through hole forming step of forming through holes on first and second base plates; an actuator plate bonding step of bonding actuator plates to the respective base plates; and an electrode forming step of forming electrodes on the bonded bodies of the base plates and the actuator plates. In the through hole forming step, the through holes are formed on the base plates and the inner surfaces of the through holes are roughened. In the electrode forming step, second extraction electrodes are routed to a principal surface of the first base plate through the through holes.

    摘要翻译: 一种制造液体喷射头的方法包括:通孔形成步骤,在第一和第二基板上形成通孔; 将致动器板接合到各个基板的致动器板接合步骤; 以及在基板和致动器板的接合体上形成电极的电极形成步骤。 在通孔形成工序中,在基板上形成通孔,使贯通孔的内表面粗糙化。 在电极形成步骤中,第二提取电极通过通孔被路由到第一基板的主表面。

    Ink-jet head and manufacturing method of the same
    23.
    发明授权
    Ink-jet head and manufacturing method of the same 有权
    喷墨头及其制造方法相同

    公开(公告)号:US09050798B2

    公开(公告)日:2015-06-09

    申请号:US13786311

    申请日:2013-03-05

    摘要: According to embodiments, a manufacturing method for an ink-jet head is disclosed. The method comprises forming an ink pressure chamber, forming an oscillating plate, and forming, on the oscillating plate, a first electrode having a predetermined footprint. The method further comprises forming, on the oscillating plate and on the first electrode, a piezoelectric film having a footprint that is geometrically similar to the predetermined footprint, forming, on the oscillating plate and the piezoelectric film, a second electrode having a footprint that is geometrically similar to the predetermined footprint, and forming a nozzle in the oscillating plate.

    摘要翻译: 根据实施例,公开了一种用于喷墨头的制造方法。 该方法包括形成墨压室,形成振荡板,并在振荡板上形成具有预定印迹的第一电极。 该方法还包括在振荡板上和第一电极上形成压电薄膜,该压电薄膜具有与预定印迹几何相似的印迹,在振荡板和压电薄膜上形成具有足迹的第二电极 在几何学上类似于预定的足迹,并在振荡板中形成喷嘴。

    Method of fabricating an integrated orifice plate and cap structure
    26.
    发明授权
    Method of fabricating an integrated orifice plate and cap structure 有权
    制造集成孔板和盖结构的方法

    公开(公告)号:US08940559B2

    公开(公告)日:2015-01-27

    申请号:US13289208

    申请日:2011-11-04

    IPC分类号: H01L21/00 B41J2/16

    摘要: In an embodiment, a method of fabricating an integrated orifice plate and cap structure includes forming an orifice bore on the front side of a product wafer, coating side walls of the orifice bore with a protective material, grinding the product wafer from its back side to a final thickness, forming a first hardmask for subsequent cavity formation, forming a second hardmask over the first hardmask for subsequent descender formation, forming a softmask over the second hardmask for subsequent convergent bore formation, etching a latent convergent bore using the softmask as an etch delineation feature, etching a descender using the second hardmask as an etch delineation feature, and anisotropic etching of convergent bore walls and cavities using the first hardmask as an etch delineation feature.

    摘要翻译: 在一个实施例中,制造集成孔板和盖结构的方法包括在产品晶片的正面上形成孔口孔,用保护材料涂覆孔孔的侧壁,将产品晶片从其背面研磨到 最后的厚度,形成用于后续空腔形成的第一硬掩模,在第一硬掩模上形成第二硬掩模用于随后的下沉形成,在第二硬掩模上形成软掩模以用于随后的会聚孔形成,使用软掩模蚀刻潜在会聚孔作为蚀刻 描绘特征,使用第二硬掩模蚀刻下坡作为蚀刻描绘特征,以及使用第一硬掩模作为蚀刻描绘特征的会聚孔壁和空腔的各向异性蚀刻。

    Microfluidic nozzle formation and process flow
    28.
    发明授权
    Microfluidic nozzle formation and process flow 有权
    微流控喷嘴形成和工艺流程

    公开(公告)号:US08925835B2

    公开(公告)日:2015-01-06

    申请号:US12422690

    申请日:2009-04-13

    申请人: Ming Fang Fuchao Wang

    发明人: Ming Fang Fuchao Wang

    IPC分类号: B05B1/24 B41J2/16 B41J2/14

    摘要: A method that includes forming a chamber in a substrate, forming a silicon layer overlying the chamber, etching the silicon layer to remove selected regions and retain a selected portion overlying the chamber, the selected portion being at a location and having dimensions that correspond to a location and to dimensions of a nozzle, and forming a first metal layer adjacent to the selected portion. The method also includes forming a path in the substrate to expose the chamber concurrently with removing the selected portion of the silicon layer to expose the nozzle, the nozzle being in fluid communication with the path, the chamber, and a surrounding environment.

    摘要翻译: 一种方法,其包括在衬底中形成腔室,形成覆盖在所述腔室上的硅层,蚀刻所述硅层以去除所选择的区域并且保持覆盖所述腔室的选定部分,所述选定部分位于并且具有对应于 位置和尺寸,以及形成与选定部分相邻的第一金属层。 该方法还包括在衬底中形成路径以同时去除硅层的选定部分以暴露喷嘴,喷嘴与路径,腔室和周围环境流体连通。

    INK JET RECORDING HEAD AND METHOD FOR MANUFACTURING THE SAME
    29.
    发明申请
    INK JET RECORDING HEAD AND METHOD FOR MANUFACTURING THE SAME 有权
    喷墨记录头及其制造方法

    公开(公告)号:US20140292937A1

    公开(公告)日:2014-10-02

    申请号:US14231502

    申请日:2014-03-31

    IPC分类号: B41J2/04 B41J2/16

    摘要: An ink jet recording head includes a substrate having a plurality of discharge energy generation elements and having an ink supply port, a protective film provided on the substrate and configured to protect wiring connected to the discharge energy generation elements, and an ink discharge port forming member, wherein the protective film has a protruding portion, wherein the ink discharge port forming member has a beam-like protrusion, wherein the beam-like protrusion has a reinforcing rib, and wherein a separation film containing gold is formed at a portion where the protruding portion and the reinforcing rib are held in close contact with each other.

    摘要翻译: 一种喷墨记录头,包括具有多个排出能量产生元件并具有供墨口的基板,设置在该基板上并构造成保护与排出能量产生元件连接的布线的保护膜,以及一个喷墨口形成件 其特征在于,所述保护膜具有突出部,所述喷墨口形成部件具有梁状突起,所述梁状突起具有加强肋,在所述突出部的部分形成有含金的分离膜, 部分和加强筋彼此紧密接触。

    Method of manufacturing liquid jet head, liquid jet head, and liquid jet apparatus
    30.
    发明授权
    Method of manufacturing liquid jet head, liquid jet head, and liquid jet apparatus 有权
    液体喷射头,液体喷射头和液体喷射装置的制造方法

    公开(公告)号:US08827429B2

    公开(公告)日:2014-09-09

    申请号:US13401888

    申请日:2012-02-22

    申请人: Osamu Koseki

    发明人: Osamu Koseki

    IPC分类号: B41J2/045 H01L41/22 H04R17/00

    摘要: In a method of manufacturing a liquid jet head, a piezoelectric substrate is bonded onto a first base. Ejection grooves for ejection channels and dummy grooves for dummy channels are alternately formed in parallel with one another. The ejection grooves and the dummy grooves have such a depth as to pierce the piezoelectric substrate and to reach the first base substrate. An electrode material is deposited on inner surfaces of the ejection grooves and the dummy grooves. A cover plate is bonded to the piezoelectric substrate so as to cover the ejection grooves and the dummy grooves. In a subsequent first base substrate removing step, a part of the first base substrate on a side opposite to the cover plate and the electrode material deposited on bottom surfaces of the dummy grooves are removed. A second base substrate is then bonded to the first base substrate.

    摘要翻译: 在液体喷射头的制造方法中,将压电基板接合在第一基底上。 用于喷射通道的喷射槽和用于虚拟通道的虚拟槽彼此平行地交替地形成。 喷射槽和虚拟槽具有刺穿压电基板并到达第一基底的深度。 电极材料沉积在喷射槽和虚拟槽的内表面上。 盖板结合到压电基板上以覆盖喷射槽和虚拟槽。 在随后的第一基底去除步骤中,去除与盖板相对的一侧上的第一基底基板的一部分和沉积在虚拟凹槽的底表面上的电极材料。 然后将第二基底接合到第一基底。