公开(公告)号：US10199282B2

公开(公告)日：2019-02-05

申请号：US15626302

申请日：2017-06-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Won Park ,  Jeong-Su Ha ,  Sangbong Park ,  Kwang Soo Kim ,  Byeong Kyu Cha

IPC: H01L21/66 ,  G01N21/95 ,  G01N21/88 ,  G06T7/00 ,  H04N7/18

Abstract: Disclosed are an inspection apparatus and a method of manufacturing a semiconductor device using the same. The inspection apparatus includes a stage configured to receive a substrate, an objective lens on the stage and configured to enlarge the substrate optically, an ocular lens on the objective lens and configured to form at its image plane an image of the substrate, and a plurality of sensors above the ocular lens and in the image plane of the ocular lens.

公开(公告)号：US12215974B2

公开(公告)日：2025-02-04

申请号：US17969200

申请日：2022-10-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Woo Lee ,  Wook Rae Kim ,  Kwang Soo Kim ,  Myung Jun Lee ,  Seo Yeon Jeong ,  Sung Ho Jang

IPC: G01B9/02055 ,  G01B9/02 ,  G01B9/02001 ,  G01B9/02015 ,  H01L21/66

Abstract: A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

公开(公告)号：US20230309312A1

公开(公告)日：2023-09-28

申请号：US18299150

申请日：2023-04-12

Applicant: Samsung Electronics Co., Ltd.

Inventor： Joo Won Park ,  Kyeong Jin Park ,  Kwang Soo Kim

IPC: H10B43/40 ,  H01L23/535 ,  H10B43/27

CPC classification number: H10B43/40 ,  H01L23/535 ,  H10B43/27

Abstract: Semiconductor devices are provided. A semiconductor device includes a substrate and a stacked structure in which a plurality of insulating layers and a plurality of electrode layers are alternately stacked on the substrate. The semiconductor device includes a plurality of dummy channel structures that pass through the stacked structure. Moreover, the semiconductor device includes a contact structure in contact with at least one of the plurality of dummy channel structures adjacent thereto, and in contact with one of the plurality of electrode layers.

公开(公告)号：US11264401B2

公开(公告)日：2022-03-01

申请号：US16270570

申请日：2019-02-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jun Hyoung Kim ,  Kwang Soo Kim ,  Seok Cheon Baek ,  Geun Won Lim

IPC: H01L27/11556 ,  H01L27/11582 ,  H01L27/11575 ,  H01L27/11573 ,  H01L27/11548 ,  H01L27/11524 ,  H01L27/11529 ,  H01L27/1157

Abstract: A vertical memory device includes a substrate having a peripheral circuit structure, first gate patterns having first gate pad regions stacked vertically from the substrate, vertical channel structures penetrating the first gate patterns, first gate contact structures each extending vertically to a corresponding first gate pad region, mold patterns stacked vertically from the substrate, the mold patterns each being positioned at the same height from the substrate with a corresponding gate pattern, peripheral contact structures penetrating the mold patterns to be connected to the peripheral circuit structure, a first block separation structure disposed between the first gate contact structures and the peripheral contact structures, and a first peripheral circuit connection wiring extending across the first block separation structure to connect one of the first gate contact structures to one of the peripheral contact structures.

公开(公告)号：US11004865B2

公开(公告)日：2021-05-11

申请号：US16692385

申请日：2019-11-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kwang Soo Kim ,  Shin Hwan Kang ,  Jae Hoon Jang ,  Kohji Kanamori

IPC: H01L27/11582 ,  H01L27/11556 ,  G11C16/04

Abstract: A memory device includes a plurality of gate electrode layers stacked on a substrate, a plurality of channel layers penetrating the plurality of gate electrode layers, a gate insulating layer between the plurality of gate electrode layers and the plurality of channel layers, and a common source line on the substrate adjacent to the gate electrode layers. The common source line includes a first part and a second part that are alternately arranged in a first direction and have different heights in a direction vertical to a top surface of the substrate. The gate insulating layer includes a plurality of vertical parts and a horizontal part. The plurality of vertical parts surrounds corresponding ones of the plurality of channel layers. The horizontal part extends parallel to a top surface of the substrate.

公开(公告)号：US10804194B2

公开(公告)日：2020-10-13

申请号：US15902806

申请日：2018-02-22

Applicant: Samsung Electronics Co., Ltd.

Inventor： Gang Zhang ,  Kwang Soo Kim ,  Won Bong Jung

IPC: H01L23/522 ,  H01L21/68 ,  H01L27/11524 ,  H01L27/11536 ,  H01L27/11556 ,  H01L23/532 ,  H01L21/768 ,  H01L27/11573 ,  H01L27/11565 ,  H01L27/11582 ,  H01L27/11575

Abstract: A semiconductor device comprises a peripheral circuit region provided on a first substrate and including circuit devices and a contact plug extending on the first substrate in a vertical direction; a memory cell region provided on a second substrate disposed above the first substrate and including memory cells; and a through insulating region penetrating through the second substrate on the contact plug and covering an upper surface of the contact plug.

公开(公告)号：US10732129B2

公开(公告)日：2020-08-04

申请号：US16250378

申请日：2019-01-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kwang Soo Kim ,  Youngkyu Park ,  Sungho Jang ,  Byeonghwan Jeon

IPC: G01N21/956 ,  G03F7/20

Abstract: Disclosed are an apparatus for and a method of performing an inspection and metrology process. The apparatus may include a stage configured to load a substrate thereon, a sensor on the stage, an object lens between the sensor and the stage, a light source generating an illumination light to be transmitted to the substrate through the object lens, a first band filtering part between the light source and the object lens to control a wavelength of the illumination light within a first bandwidth, and a second band filtering part between the light source and the object lens to control a wavelength of the illumination light within a second bandwidth, which is smaller than the first bandwidth.

公开(公告)号：US10291090B2

公开(公告)日：2019-05-14

申请号：US14729466

申请日：2015-06-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young Kwan Kim ,  Byung Ryel In ,  Deok Jin Kim ,  Kwang Soo Kim ,  Jong Jin Park ,  Myung Bae Bang ,  Keun Young Yoon

IPC: H02K1/28 ,  H02K7/04 ,  B29C65/48 ,  H02K1/27 ,  H02K1/30 ,  H02K15/03

Abstract: A motor assembly having an internal channel passing an interior of a rotor, and a method for producing the same are provided. The motor assembly includes an adhesive flowing along the internal channel, and the rotor can be firmly coupled and improving durability and production efficiency of the rotor.

公开(公告)号：US09729090B2

公开(公告)日：2017-08-08

申请号：US14595382

申请日：2015-01-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kwang Soo Kim ,  Deok Jin Kim ,  Young Kwan Kim

IPC: H02K3/28 ,  H02P6/08 ,  H02K21/16 ,  H02K29/00 ,  H02P6/00 ,  H02P6/26 ,  H02K7/20 ,  H02P5/46

CPC classification number: H02P6/08 ,  H02K21/16 ,  H02K29/00 ,  H02K2213/06 ,  H02P6/005 ,  H02P6/085 ,  H02P6/26

Abstract: A cleaner includes a BLDC motor and a power unit. The BLDC motor includes a rotor and a stator provided with a DC coil and an AC coil in a separate manner. The power unit is configured to supply DC power and AC power to the DC coil and the AC coil, respectively.