公开(公告)号：US12215974B2

公开(公告)日：2025-02-04

申请号：US17969200

申请日：2022-10-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Woo Lee ,  Wook Rae Kim ,  Kwang Soo Kim ,  Myung Jun Lee ,  Seo Yeon Jeong ,  Sung Ho Jang

IPC: G01B9/02055 ,  G01B9/02 ,  G01B9/02001 ,  G01B9/02015 ,  H01L21/66

Abstract: A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

公开(公告)号：US12105027B2

公开(公告)日：2024-10-01

申请号：US17684052

申请日：2022-03-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jang Ryul Park ,  Soon Yang Kwon ,  Kwang Rak Kim ,  Myung Jun Lee ,  Sung Ho Jang

IPC: G01N21/95 ,  G02B7/00 ,  G01N21/88 ,  G02B3/00

CPC classification number: G01N21/9501 ,  G02B7/005 ,  G01N2021/8845 ,  G02B2003/0093

Abstract: A method for fabricating a semiconductor device is provided. The method includes: loading a substrate on a stage of an apparatus for inspecting the substrate; extracting a first light having a first wavelength from a light by using a light source; acquiring first position information on at least one focal point, formed on the substrate, based on the first wavelength by using a controller, the at least one focal point being a pre-calculated at least one focal point; adjusting a position of at least one from among an objective lens and at least one microsphere in a vertical direction by using the first position information in the controller; condensing the first light, which has passed through the at least one microsphere, on the at least one focal point formed on the substrate; and inspecting the substrate by using the first light condensed on the at least one focal point.