公开(公告)号：US12215974B2

公开(公告)日：2025-02-04

申请号：US17969200

申请日：2022-10-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seung Woo Lee ,  Wook Rae Kim ,  Kwang Soo Kim ,  Myung Jun Lee ,  Seo Yeon Jeong ,  Sung Ho Jang

IPC: G01B9/02055 ,  G01B9/02 ,  G01B9/02001 ,  G01B9/02015 ,  H01L21/66

Abstract: A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.