SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20250120095A1

    公开(公告)日:2025-04-10

    申请号:US18802058

    申请日:2024-08-13

    Abstract: A semiconductor device includes a substrate, source/drain regions on the substrate, a channel layer between the source/drain regions and including indium gallium zinc oxide (IGZO), a variable resistance layer on the channel layer and including metal oxide that satisfies a stoichiometric ratio of metal to oxygen, a gate insulating layer on the variable resistance layer and including metal oxide that does not satisfy the stoichiometric ratio of metal to oxygen, and a gate electrode on the gate insulating layer.

    SEMICONDUCTOR DEVICE AND ELECTRONIC SYSTEM INCLUDING THE SAME

    公开(公告)号:US20240365567A1

    公开(公告)日:2024-10-31

    申请号:US18471585

    申请日:2023-09-21

    CPC classification number: H10B63/845 H10B63/34

    Abstract: A semiconductor device according to an embodiment includes a gate stack structure and a channel structure. The gate stack structure includes a plurality of gate electrodes and a plurality of insulating layers alternately stacked on a substrate in a first direction perpendicular to an upper surface of the substrate. The channel structure includes a portion penetrating through the gate stack structure and extending in the first direction. The channel structure includes a channel layer, a resistance change layer, and a metal-containing layer sequentially stacked. The metal-containing layer includes a metal or a metal compound.

    Variable resistance memory device
    25.
    发明授权

    公开(公告)号:US11037992B2

    公开(公告)日:2021-06-15

    申请号:US16567094

    申请日:2019-09-11

    Abstract: A variable resistance memory device including insulating patterns sequentially stacked on a substrate; first conductive lines between adjacent ones of the insulating patterns and spaced apart from each other in a first direction; a second conductive line between the first conductive lines and penetrating the insulating patterns in a third direction perpendicular to a top surface of the substrate; a phase-change pattern between the second conductive line and each of the first conductive lines and between the adjacent ones of the insulating patterns to cover a top surface of a first adjacent insulating pattern and a bottom surface of a second adjacent insulating pattern; and a selection element between the phase-change pattern and the second conductive line and between the adjacent ones of the insulating patterns to cover the top surface of the first adjacent insulating pattern and the bottom surface of the second adjacent insulating pattern.

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