公开(公告)号：US20160270199A1

公开(公告)日：2016-09-15

申请号：US15161628

申请日：2016-05-23

Applicant: GIGAPHOTON INC.

Inventor： Fumio IWAMOTO ,  Takashi SAITO ,  Tsukasa HORI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/006 ,  G03F7/70033 ,  H05G2/005

Abstract: An aspect of the present disclosure may include a gas lock cover secured to a nozzle holder and provided downstream of a nozzle. The gas lock cover may cover a periphery of an exit of the nozzle and be structured to guide gas supplied from a gas supply unit. The gas lock cover may include a hollow cylindrical part provided downstream of the nozzle and having an exit opening for outputting droplets that are outputted from the nozzle and pass through an internal cavity of the cylindrical part. The gas lock cover may include a channel for transmitting the gas supplied from the gas supply unit, the channel being structured to orient a flow of the transmitted gas so as to flow to the exit opening of the cylindrical part through the internal cavity of the cylindrical part.

Abstract translation: 本公开的一个方面可以包括固定到喷嘴保持器并设置在喷嘴下游的气体锁盖。 气体锁定盖可以覆盖喷嘴的出口的周边，并被构造成引导从气体供应单元供应的气体。 气体锁定盖可以包括设置在喷嘴下游的中空圆柱形部分，并且具有用于输出从喷嘴输出并穿过圆柱形部分的内部空腔的液滴的出口。 气体锁定盖可以包括用于传送从气体供应单元供应的气体的通道，该通道被构造成使透过气体的流动定向，以便通过圆筒形的内部空腔流到圆柱形部分的出口 部分。

公开(公告)号：US20160248215A1

公开(公告)日：2016-08-25

申请号：US15145016

申请日：2016-05-03

Applicant: Gigaphoton Inc.

Inventor： Natsushi SUZUKI ,  Osamu WAKABAYASHI ,  Hiroaki TSUSHIMA ,  Masanori YASHIRO

IPC: H01S3/036 ,  H01S3/225 ,  B01D53/04 ,  H01S3/104

CPC classification number: H01S3/036 ,  B01D53/0446 ,  B01D53/346 ,  B01D53/685 ,  B01D53/82 ,  B01D53/86 ,  B01D2251/404 ,  B01D2251/602 ,  B01D2253/108 ,  B01D2255/20753 ,  B01D2255/20761 ,  B01D2257/2027 ,  B01D2258/0216 ,  B01D2259/40003 ,  H01S3/104 ,  H01S3/225

Abstract: A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.

Abstract translation: 气体激光装置可以包括：激光室，其通过第一控制阀连接到第一激光气体供应源，第一激光气体供应源提供含有卤素气体的第一激光气体，并通过第二控制阀连接到第二激光气体供应源， 具有比第一激光气体低的卤素气体浓度的第二激光气体; 净化塔，其从至少一部分从激光室排出的气体中除去至少一部分卤素气体和卤素化合物; 增压泵，其通过第三控制阀连接到激光室，其将通过净化塔的气体的压力升高到高于激光室的工作气体压力的气体压力; 以及控制器，其基于从所述增压泵通过所述第三控制阀向所述激光室供给的第一量的气体计算第二量的所述第一激光气体，所述第一激光气体将被供给到所述激光室并控制 基于计算第二量的结果的第一控制阀。

公开(公告)号：US20160044773A1

公开(公告)日：2016-02-11

申请号：US14887450

申请日：2015-10-20

Applicant: GIGAPHOTON INC.

Inventor： Masaki NAKANO ,  Osamu WAKABAYASHI

IPC: H05G2/00

CPC classification number: H05G2/006 ,  B05B9/002 ,  B05B12/02 ,  B05B17/0607 ,  B05B17/0615 ,  G03F7/70033 ,  G03F7/70041 ,  G03F7/7085 ,  H01L21/268 ,  H01L22/10 ,  H05G2/003 ,  H05G2/008

Abstract: A target supply device may include a reservoir configured to hold a target material in its interior in liquid form, a vibrating element configured to apply vibrations to the reservoir, a target sensor configured to detect droplets of the target material outputted from the reservoir, a control unit configured to set parameters based on a result of the detection performed by the target sensor, a function generator configured to generate an electrical signal having a waveform based on the parameters, and a power source configured to apply a driving voltage to the vibrating element in accordance with the electrical signal.

Abstract translation: 目标供应装置可以包括被配置为在其内部保持液体形式的目标材料的储存器，被配置为向储存器施加振动的振动元件，配置成检测从储存器输出的目标材料的液滴的目标传感器， 被配置为基于由所述目标传感器执行的检测结果来设置参数的单元，被配置为生成基于所述参数的具有波形的电信号的功能发生器，以及被配置为向所述振动元件施加驱动电压的电源 符合电信号。

公开(公告)号：US20160035603A1

公开(公告)日：2016-02-04

申请号：US14854395

申请日：2015-09-15

Applicant: KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION ,  GIGAPHOTON INC.

Inventor： Hiroshi IKENOUE ,  Osamu WAKABAYASHI

IPC: H01L21/67 ,  B23K26/00 ,  B23K26/067

CPC classification number: H01L21/67115 ,  B23K26/0006 ,  B23K26/03 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/08 ,  B23K26/352 ,  B23K26/354 ,  H01L21/02532 ,  H01L21/02675

Abstract: Provided is a laser annealing apparatus that may include: a laser light source section configured to output pulsed laser light to be applied to a thin film formed on a workpiece; a pulse width varying section configured to vary a pulse width of the pulsed laser light; a melt state measuring section configured to detect that the thin film irradiated with the pulsed laser light is in a melt state; and a controlling section configured to determine, based on a result of detection by the melt state measuring section, a duration of time during which the thin film is in the melt state, and to control the pulse width varying section to allow the duration of time to be of a predetermined length.

Abstract translation: 提供一种激光退火装置，其可以包括：激光光源部，被配置为输出施加到形成在工件上的薄膜的脉冲激光; 脉冲宽度变化部，被配置为改变脉冲激光的脉冲宽度; 熔融状态测定部，被配置为检测用脉冲激光照射的薄膜处于熔融状态; 以及控制部，被配置为基于熔融状态测量部的检测结果确定薄膜处于熔融状态的持续时间，并且控制脉冲宽度变化部以允许持续时间 具有预定长度。

公开(公告)号：US20150189730A1

公开(公告)日：2015-07-02

申请号：US14643782

申请日：2015-03-10

Applicant: GIGAPHOTON INC.

Inventor： Masato MORIYA ,  Hideyuki HAYASHI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  H01J37/304 ,  H01J37/22

CPC classification number: H05G2/008 ,  H01J37/228 ,  H01J37/3045 ,  H01J2237/20292 ,  H05G2/005 ,  H05G2/006

Abstract: An extreme ultraviolet light generation device may comprise: a chamber provided with a through-hole; an introduction optical system configured to introduce the pulse laser beam into a first predetermined region inside the chamber through the through-hole; a target supply device configured to output the target toward the first predetermined region; a light source configured to irradiate a second predetermined region with light whose optical path in the second predetermined region has a transverse section that is longer along a direction perpendicular to a direction of movement of the target than along the direction of movement of the target, the second predetermined region including part of a trajectory of the target between the target supply device and the first predetermined region; and an optical sensor configured to detect light incident on the optical sensor from the second predetermined region to detect the target passing through the second predetermined region.

Abstract translation: 极紫外线发生装置可以包括：设置有通孔的室; 导入光学系统，被配置为通过所述通孔将所述脉冲激光束引入所述腔室内的第一预定区域; 目标供给装置，被配置为朝向所述第一预定区域输出所述目标; 光源，被配置为用第二预定区域的光线照射第二预定区域中的光路，沿着与目标的移动方向垂直的方向的垂直于目标的移动方向的横向部分具有横向部分， 所述第二预定区域包括所述目标供给装置和所述第一预定区域之间的所述目标的轨迹的一部分; 以及光学传感器，被配置为从所述第二预定区域检测入射在所述光学传感器上的光，以检测通过所述第二预定区域的目标。

公开(公告)号：US20150055672A1

公开(公告)日：2015-02-26

申请号：US14531876

申请日：2014-11-03

Applicant: Gigaphoton Inc.

Inventor： Akihiko KUROSU ,  Junichi FUJIMOTO ,  Yosuke ISHIZUKA ,  Takashi MATSUNAGA ,  Osamu WAKABAYASHI

IPC: H01S3/223 ,  F16C32/04

CPC classification number: H01S3/036 ,  F16C32/047 ,  H01S3/02 ,  H01S3/041 ,  H01S3/223 ,  H01S3/2232 ,  H01S3/2258

Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.

Abstract translation: 放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环， 被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。

公开(公告)号：US20150028231A1

公开(公告)日：2015-01-29

申请号：US14455685

申请日：2014-08-08

Applicant: GIGAPHOTON INC

Inventor： Hakaru MIZOGUCHI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  H01S3/223 ,  H01S3/041 ,  H01S3/23

CPC classification number: H05G2/008 ,  H01S3/0064 ,  H01S3/0315 ,  H01S3/038 ,  H01S3/041 ,  H01S3/0971 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2366 ,  H05G2/005

Abstract: A laser apparatus may include a master oscillator configured to output a laser beam, at least one amplifier provided in a beam path of the laser beam, at least one saturable absorber gas cell provided downstream from the at least one amplifier and configured to contain a saturable absorber gas for absorbing a part of the laser beam, the part of the laser beam having a beam intensity equal to or lower than a predetermined beam intensity, a fan provided in the saturable absorber gas cell and configured to cause the saturable absorber gas to circulate, and a heat exchanger provided in the saturable absorber gas cell and configured to cool the saturable absorber gas.

Abstract translation: 激光装置可以包括被配置为输出激光束的主振荡器，设置在激光束的光束路径中的至少一个放大器，设置在至少一个放大器的下游的至少一个饱和吸收器气体单元，并且被配置为包含可饱和 用于吸收激光束的一部分的吸收气体，所述激光束的一部分具有等于或小于预定光束强度的光束强度;风扇，设置在所述可饱和吸收器气体单元中并且构造成使所述饱和吸收剂气体循环 以及设置在可饱和吸收器气体电池中并且构造成冷却可饱和吸收剂气体的热交换器。

公开(公告)号：US20140346375A1

公开(公告)日：2014-11-27

申请号：US14455669

申请日：2014-08-08

Applicant: GIGAPHOTON INC.

Inventor： Krzysztof NOWAK ,  Takashi SUGANUMA ,  Osamu WAKABAYASHI

IPC: H01S3/10 ,  H01S3/104 ,  H01S3/097 ,  H05G2/00

CPC classification number: H01S3/10015 ,  H01S3/0014 ,  H01S3/0971 ,  H01S3/10069 ,  H01S3/104 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2325 ,  H01S2301/02 ,  H05G2/008

Abstract: A laser apparatus includes a master oscillator configured to output a pulse laser beam, at least one amplifier disposed in an optical path of the pulse laser beam, an energy detector that is disposed in the optical path on one of an input side and an output side of the amplifier and that is configured to detect energy of self-oscillating light from the amplifier, a gain adjustment section configured to adjust the gain of the amplifier, and a control unit configured to control the gain adjustment section based on a detection result from the energy detector when a pulse laser beam is not being inputted into the amplifier from the master oscillator.

Abstract translation: 激光装置包括：主振荡器，被配置为输出脉冲激光束;设置在所述脉冲激光束的光路中的至少一个放大器;能量检测器，设置在所述光路中的输入侧和输出侧之一上 并且被配置为检测来自放大器的自振荡光的能量;增益调整部，被配置为调整放大器的增益;以及控制单元，被配置为基于来自所述放大器的检测结果来控制所述增益调整部 当脉冲激光束未从主振荡器输入到放大器中时，能量检测器。

公开(公告)号：US20140341248A1

公开(公告)日：2014-11-20

申请号：US14455701

申请日：2014-08-08

Applicant: GIGAPHOTON INC.

Inventor： Osamu WAKABAYASHI ,  Krzysztof NOWAK

IPC: H01S3/034

CPC classification number: H01S3/005 ,  H01S3/2232 ,  H01S3/2316 ,  H01S3/2333 ,  H05G2/008

Abstract: An amplifier may include a plurality of discharge tubes arranged in a designed path of a seed laser beam and an optical system arranged to steer the seed laser beam to travel along the designed path.

Abstract translation: 放大器可以包括布置在种子激光束的设计路径中的多个放电管和被布置成控制种子激光束沿着设计路径行进的光学系统。

公开(公告)号：US20140332700A1

公开(公告)日：2014-11-13

申请号：US14339172

申请日：2014-07-23

Applicant: GIGAPHOTON INC.

Inventor： Miwa IGARASHI ,  Yukio WATANABE ,  Kouji ASHIKAWA ,  Norio IWAI ,  Osamu WAKABAYASHI

IPC: H05G2/00 ,  G21K5/10

CPC classification number: H05G2/008 ,  G21K5/10 ,  H05G2/003

Abstract: An apparatus for generating extreme ultraviolet light may include a reference member, a chamber fixed to the reference member, the chamber including at least one window, a laser beam introduction optical system configured to introduce an externally supplied laser beam into the chamber through the at least one window, and a positioning mechanism configured to position the laser beam introduction optical system to the reference member.

Abstract translation: 用于产生极紫外光的装置可以包括参考构件，固定到参考构件的腔室，所述腔室包括至少一个窗口，激光束引入光学系统，其配置成通过至少一个外部供应的激光束 一个窗口，以及配置成将激光束引入光学系统定位到参考构件的定位机构。