Transfer apparatus and laser annealing apparatus

    公开(公告)号:US09941147B2

    公开(公告)日:2018-04-10

    申请号:US15182953

    申请日:2016-06-15

    CPC classification number: H01L21/6838 H01L21/67288

    Abstract: A transfer apparatus includes a supporting member, a free electron excitation device and a detection device; the free electrons excitation device is configured to excite semiconductor material of an object to be transferred to generate free electrons, and the detection device is configured to detect whether material of a surface of the transferred object in contact with the support surface of the supporting member is conductive under excitation by the free electron excitation device. A laser annealing apparatus comprising the transfer apparatus is further provided.

    VACUUM ADSORBING WORKBENCH AND VACUUM ADSORBING DEVICE

    公开(公告)号:US20190015955A1

    公开(公告)日:2019-01-17

    申请号:US15981884

    申请日:2018-05-16

    Inventor: Lu Wang

    Abstract: A vacuum adsorbing workbench and a vacuum adsorbing device are provided. The vacuum adsorbing workbench includes a workbench body, a first suction tube and an occluder. The workbench body is provided with multiple suction holes. Each suction hole is in communication with the first suction tube. The occluder is able to be connected with the first suction tube cooperatively to cut off communication between each suction hole and the first suction tube.

    DEVICE FOR FILM THICKNESS MEASUREMENT AND METHOD FOR FILM THICKNESS MEASUREMENT
    26.
    发明申请
    DEVICE FOR FILM THICKNESS MEASUREMENT AND METHOD FOR FILM THICKNESS MEASUREMENT 有权
    薄膜厚度测量装置和薄膜厚度测量方法

    公开(公告)号:US20170074633A1

    公开(公告)日:2017-03-16

    申请号:US15122731

    申请日:2015-09-15

    CPC classification number: G01B7/06 G01B5/066 G01B7/085 G01B7/16

    Abstract: The embodiments of the invention disclose a device for film thickness measurement and a method for film thickness measurement. The device comprises a planar indenter, a collecting unit and a processing unit. The planar indenter comprises a base plate and a piezoelectric film layer. The collecting unit comprises a plurality of collecting circuits evenly distributed above the piezoelectric film layer and spaced from each other. The collecting circuits are used for collecting current signals generated when the piezoelectric film layer deforms at positions corresponding to the collecting circuits. The processing unit is used for calculating a film thickness of the film sample to be measured based on the current signals collected by each of the collecting circuits.

    Abstract translation: 本发明的实施例公开了一种用于膜厚度测量的装置和用于膜厚测量的方法。 该装置包括平面压头,收集单元和处理单元。 平面压头包括基板和压电膜层。 收集单元包括均匀地分布在压电膜层上方并彼此间隔开的多个收集电路。 集电电路用于收集当压电薄膜层在与集电电路相对应的位置变形时产生的电流信号。 处理单元用于基于由每个集电电路收集的电流信号计算要测量的膜样品的膜厚度。

    ARRAY SUBSTRATE AND DISPLAY APPARATUS

    公开(公告)号:US20240431143A1

    公开(公告)日:2024-12-26

    申请号:US17907489

    申请日:2021-12-24

    Abstract: An array substrate is provided. The array substrate includes a plurality of subpixels. A respective subpixel of the plurality of subpixels includes a first transistor. The first transistor includes a gate electrode; a first electrode on the gate electrode; a semiconductor material layer on a side of the first electrode away from the gate electrode; a second electrode on a side of the semiconductor material layer away from the first electrode; an organic layer on a side of the second electrode away from the semiconductor material layer; and a third electrode on a side of the organic layer away from the second electrode. An orthographic projection of the second electrode on a base substrate at least partially overlaps with an orthographic projection of the organic layer on the base substrate.

    Method for manufacturing template
    29.
    发明授权

    公开(公告)号:US11467487B2

    公开(公告)日:2022-10-11

    申请号:US16632041

    申请日:2019-01-03

    Inventor: Kang Guo Lu Wang

    Abstract: A manufacturing method of a template includes: providing a base; forming a photoresist pattern on the base and patterning the base by using the photoresist pattern as a mask, and the forming the photoresist pattern includes: forming a plurality of first patterns spaced apart from each other on the base; forming a first material layer on the plurality of first patterns; patterning the at least one first pattern by using the first material layer as a mask so that the first pattern is formed into at least one first sub-pattern; and removing the first material layer; and the first material layer at least cover one side of at least one of the plurality of first patterns in a direction perpendicular to a surface on which the base is located.

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